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Browse by Category: Main > Tools & Hardware
Class Information
Number: 451/289
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder > Having vacuum or adhesive securing means
Description: Abrading machine wherein the work holder includes suction or adhesive holding means.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8672730 Method and apparatus for polishing and grinding a radius surface on the axial end of a cylinder Mar. 18, 2014
8636561 Polishing head and polishing apparatus Jan. 28, 2014
8535115 Gathering spectra from multiple optical heads Sep. 17, 2013
RE44491 Chemical mechanical polishing retaining ring Sep. 10, 2013
8506363 Substrate holder and substrate holding method Aug. 13, 2013
8465342 Method of making and apparatus having windowless polishing pad and protected fiber Jun. 18, 2013
8357029 Polishing apparatus Jan. 22, 2013
8332064 Polishing method and polishing apparatus, and program for controlling polishing apparatus Dec. 11, 2012
8268114 Workpiece holder for polishing, workpiece polishing apparatus and polishing method Sep. 18, 2012
8157615 Device and process for applying and/or detaching a wafer to/from a carrier Apr. 17, 2012
8133096 Multi-phase polishing pad Mar. 13, 2012
8113918 Substrate supporting unit and single type substrate polishing apparatus using the same Feb. 14, 2012
8110321 Method of manufacture of damascene reticle Feb. 7, 2012
8070560 Polishing apparatus and method Dec. 6, 2011
8052504 Method, apparatus and system for use in processing wafers Nov. 8, 2011
8021210 Polishing head and polishing apparatus having the same Sep. 20, 2011
8021211 Substrate holder with liquid supporting surface Sep. 20, 2011
7992877 Non contact substrate chuck Aug. 9, 2011
7976362 Substrate polishing apparatus and method Jul. 12, 2011
7942725 Polishing apparatus May. 17, 2011
7780505 Semiconductor manufacturing apparatus and semiconductor manufacturing method Aug. 24, 2010
7740247 Compound sliding seal unit suitable for atmosphere to vacuum applications Jun. 22, 2010
7740521 Polishing head, polishing apparatus and polishing method for semiconductor wafer Jun. 22, 2010
7682224 Method of machining substrate Mar. 23, 2010
7674154 Apparatus and method for polishing objects using object cleaners Mar. 9, 2010
7645185 Substrate delivery mechanism Jan. 12, 2010
7632173 Substrate holding apparatus and polishing apparatus Dec. 15, 2009
7601051 Grinding machine having grinder head and method of manufacturing semiconductor device by using the grinding machine Oct. 13, 2009
7559825 Method of polishing a semiconductor wafer Jul. 14, 2009
7500902 Thickness-measuring method during grinding process Mar. 10, 2009
7491118 Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity Feb. 17, 2009
7459397 Polishing method for semiconductor substrate, and polishing jig used therein Dec. 2, 2008
7445543 Polishing apparatus Nov. 4, 2008
7364497 Polish pad and chemical mechanical polishing apparatus comprising the same Apr. 29, 2008
7364496 Polishing head for polishing semiconductor wafers Apr. 29, 2008
7303467 Chemical mechanical polishing apparatus with rotating belt Dec. 4, 2007
7247083 Polishing apparatus Jul. 24, 2007
7223158 Method for polishing a semiconductor wafer May. 29, 2007
7223153 Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces May. 29, 2007
7207871 Carrier head with multiple chambers Apr. 24, 2007
7201640 Method of sucking water and water sucking device Apr. 10, 2007
7189141 Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus Mar. 13, 2007
7175504 Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus Feb. 13, 2007
7175509 Grinder and method of and apparatus for non-contact conditioning of tool Feb. 13, 2007
7166013 Polishing apparatus and method for producing semiconductors using the apparatus Jan. 23, 2007
RE39471 Apparatus for and method for polishing workpiece Jan. 16, 2007
7140956 Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece Nov. 28, 2006
7137874 Semiconductor wafer, polishing apparatus and method Nov. 21, 2006
7121934 Carrier head for chemical mechanical polishing apparatus Oct. 17, 2006
7112889 Semiconductor device having an alignment mark formed by the same material with a metal post Sep. 26, 2006

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