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Class Information
Number: 451/289
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder > Having vacuum or adhesive securing means
Description: Abrading machine wherein the work holder includes suction or adhesive holding means.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7601051 |
Grinding machine having grinder head and method of manufacturing semiconductor device by using the grinding machine |
Oct. 13, 2009 |
| 7559825 |
Method of polishing a semiconductor wafer |
Jul. 14, 2009 |
| 7500902 |
Thickness-measuring method during grinding process |
Mar. 10, 2009 |
| 7491118 |
Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity |
Feb. 17, 2009 |
| 7459397 |
Polishing method for semiconductor substrate, and polishing jig used therein |
Dec. 2, 2008 |
| 7445543 |
Polishing apparatus |
Nov. 4, 2008 |
| 7364497 |
Polish pad and chemical mechanical polishing apparatus comprising the same |
Apr. 29, 2008 |
| 7364496 |
Polishing head for polishing semiconductor wafers |
Apr. 29, 2008 |
| 7303467 |
Chemical mechanical polishing apparatus with rotating belt |
Dec. 4, 2007 |
| 7247083 |
Polishing apparatus |
Jul. 24, 2007 |
| 7223153 |
Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces |
May. 29, 2007 |
| 7223158 |
Method for polishing a semiconductor wafer |
May. 29, 2007 |
| 7207871 |
Carrier head with multiple chambers |
Apr. 24, 2007 |
| 7201640 |
Method of sucking water and water sucking device |
Apr. 10, 2007 |
| 7189141 |
Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus |
Mar. 13, 2007 |
| 7175504 |
Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus |
Feb. 13, 2007 |
| 7175509 |
Grinder and method of and apparatus for non-contact conditioning of tool |
Feb. 13, 2007 |
| 7166013 |
Polishing apparatus and method for producing semiconductors using the apparatus |
Jan. 23, 2007 |
| RE39471 |
Apparatus for and method for polishing workpiece |
Jan. 16, 2007 |
| 7140956 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Nov. 28, 2006 |
| 7137874 |
Semiconductor wafer, polishing apparatus and method |
Nov. 21, 2006 |
| 7121934 |
Carrier head for chemical mechanical polishing apparatus |
Oct. 17, 2006 |
| 7112889 |
Semiconductor device having an alignment mark formed by the same material with a metal post |
Sep. 26, 2006 |
| 7108591 |
Compliant wafer chuck |
Sep. 19, 2006 |
| 7090570 |
Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity |
Aug. 15, 2006 |
| 7081045 |
Apparatus for polishing a semiconductor wafer |
Jul. 25, 2006 |
| 7070478 |
Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces |
Jul. 4, 2006 |
| 7070490 |
Vacuum suction membrane for holding silicon wafer |
Jul. 4, 2006 |
| 7063600 |
Polishing apparatus |
Jun. 20, 2006 |
| 7052372 |
Chemical-mechanical polisher hardware design |
May. 30, 2006 |
| 7048619 |
Rubbing machine with realigning functions of rubbing cloth for use in LCD manufacturing process and rubbing method using the same |
May. 23, 2006 |
| 7044476 |
Compact pinlifter assembly integrated in wafer chuck |
May. 16, 2006 |
| 7040965 |
Methods for removing doped silicon material from microfeature workpieces |
May. 9, 2006 |
| 7029383 |
Polishing head of chemical mechanical polishing apparatus |
Apr. 18, 2006 |
| 7025664 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Apr. 11, 2006 |
| 7018268 |
Protection of work piece during surface processing |
Mar. 28, 2006 |
| 7014541 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Mar. 21, 2006 |
| 7004817 |
Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces |
Feb. 28, 2006 |
| 7004824 |
Method and apparatus for detecting and dispersing agglomerates in CMP slurry |
Feb. 28, 2006 |
| 7001256 |
Carrier head with a non-stick membrane |
Feb. 21, 2006 |
| 6997791 |
CMP polishing heads and methods of using the same |
Feb. 14, 2006 |
| 6991520 |
Abrasive machine and method of abrading work piece |
Jan. 31, 2006 |
| 6988932 |
Apparatus of sealing wafer backside for full-face processing |
Jan. 24, 2006 |
| 6979250 |
Carrier head with flexible membrane to provide controllable pressure and loading area |
Dec. 27, 2005 |
| 6966822 |
System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control |
Nov. 22, 2005 |
| 6945861 |
Polishing head of chemical mechanical polishing apparatus and polishing method using the same |
Sep. 20, 2005 |
| 6934595 |
Method and system for reducing semiconductor wafer breakage |
Aug. 23, 2005 |
| 6923714 |
Carrier head with a non-stick membrane |
Aug. 2, 2005 |
| 6923709 |
Chemical mechanical polishing apparatus having a measuring device for measuring a guide ring |
Aug. 2, 2005 |
| 6921324 |
Pad backer |
Jul. 26, 2005 |
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