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Class Information
Number: 451/288
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder > Planar surface abrading > Having pressure plate
Description: Abrading machine including means bearing directly upon the work to apply grinding pressure.










Patents under this class:

Patent Number Title Of Patent Date Issued
8702477 Polishing pad sub plate Apr. 22, 2014
8662961 Polishing pad seasoning method, seasoning plate, and semiconductor polishing device Mar. 4, 2014
8657644 Eddy current sensor and polishing method and apparatus Feb. 25, 2014
8647172 Wafer pads for fixed-spindle floating-platen lapping Feb. 11, 2014
8647171 Fixed-spindle floating-platen workpiece loader apparatus Feb. 11, 2014
8641476 Coplanar alignment apparatus for rotary spindles Feb. 4, 2014
8622783 Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet Jan. 7, 2014
8602848 Method and system for polishing float glass Dec. 10, 2013
8602842 Three-point fixed-spindle floating-platen abrasive system Dec. 10, 2013
8597084 Textured platen Dec. 3, 2013
8568199 Polishing endpoint detection apparatus Oct. 29, 2013
8556684 Retaining ring for chemical mechanical polishing Oct. 15, 2013
8545289 Distance monitoring device Oct. 1, 2013
RE44491 Chemical mechanical polishing retaining ring Sep. 10, 2013
8524035 Method and apparatus for conformable polishing Sep. 3, 2013
8517803 Retaining ring for chemical mechanical polishing Aug. 27, 2013
8500515 Fixed-spindle and floating-platen abrasive system using spherical mounts Aug. 6, 2013
8485866 Substrate holding apparatus, polishing apparatus, and polishing method Jul. 16, 2013
8475231 Carrier head membrane Jul. 2, 2013
8469776 Flexible membrane for carrier head Jun. 25, 2013
8460067 Polishing head zone boundary smoothing Jun. 11, 2013
8454410 Polishing apparatus Jun. 4, 2013
8454408 Load cup substrate sensing Jun. 4, 2013
8430717 Dynamic action abrasive lapping workholder Apr. 30, 2013
8398456 Polishing method, polishing apparatus and method of monitoring a substrate Mar. 19, 2013
8393936 Substrate retaining ring for CMP Mar. 12, 2013
8382558 Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method Feb. 26, 2013
8382554 Substrate polishing apparatus and method of polishing substrate using the same Feb. 26, 2013
8366516 Partial-area polishing device for optical disc Feb. 5, 2013
8360818 Automated chemical polishing system adapted for soft semiconductor materials Jan. 29, 2013
8357029 Polishing apparatus Jan. 22, 2013
8342906 Friction sensor for polishing system Jan. 1, 2013
8337280 High speed platen abrading wire-driven rotary workholder Dec. 25, 2012
8328600 Workpiece spindles supported floating abrasive platen Dec. 11, 2012
8323075 Polishing head, polishing apparatus and method for demounting workpiece Dec. 4, 2012
8298046 Retaining rings Oct. 30, 2012
8296931 Method for manufacturing storage medium Oct. 30, 2012
8268114 Workpiece holder for polishing, workpiece polishing apparatus and polishing method Sep. 18, 2012
8267746 Substrate holding apparatus, polishing apparatus, and polishing method Sep. 18, 2012
8246417 Polishing apparatus and polishing method Aug. 21, 2012
8202140 Wafer polishing carrier apparatus and chemical mechanical polishing equipment using the same Jun. 19, 2012
8192251 Pressure control system of wafer polishing apparatus Jun. 5, 2012
8192248 Semiconductor wafer polishing apparatus and method of polishing Jun. 5, 2012
8148266 Method and apparatus for conformable polishing Apr. 3, 2012
8137162 Semiconductor wafer polishing machine Mar. 20, 2012
8133097 Polishing apparatus Mar. 13, 2012
8113913 Method for the simultaneous grinding of a plurality of semiconductor wafers Feb. 14, 2012
8100739 Substrate holding apparatus, polishing apparatus, and polishing method Jan. 24, 2012
8079894 Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Dec. 20, 2011
8066552 Multi-layer polishing pad for low-pressure polishing Nov. 29, 2011











 
 
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