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Class Information
Number: 451/288
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder > Planar surface abrading > Having pressure plate
Description: Abrading machine including means bearing directly upon the work to apply grinding pressure.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7614939 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
Nov. 10, 2009 |
| 7601050 |
Polishing apparatus with grooved subpad |
Oct. 13, 2009 |
| 7597609 |
Substrate retaining ring for CMP |
Oct. 6, 2009 |
| 7591711 |
Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces |
Sep. 22, 2009 |
| 7575504 |
Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly |
Aug. 18, 2009 |
| 7568970 |
Chemical mechanical polishing pads |
Aug. 4, 2009 |
| 7544115 |
Chemical mechanical polishing assembly with altered polishing pad topographical components |
Jun. 9, 2009 |
| 7537512 |
Multiple fluid supplying apparatus for carrier of semiconductor wafer polishing system |
May. 26, 2009 |
| 7534162 |
Grooved platen with channels or pathway to ambient air |
May. 19, 2009 |
| 7530880 |
Method and apparatus for improved chemical mechanical planarization pad with pressure control and process monitor |
May. 12, 2009 |
| 7527271 |
Fast substrate loading on polishing head without membrane inflation step |
May. 5, 2009 |
| 7520797 |
Platen endpoint window with pressure relief |
Apr. 21, 2009 |
| 7520795 |
Grooved retaining ring |
Apr. 21, 2009 |
| 7507148 |
Polishing apparatus, polishing head and polishing method |
Mar. 24, 2009 |
| 7497767 |
Vibration damping during chemical mechanical polishing |
Mar. 3, 2009 |
| 7491117 |
Substrate holding apparatus |
Feb. 17, 2009 |
| 7488235 |
Polishing apparatus and related polishing methods |
Feb. 10, 2009 |
| 7467990 |
Back pressure control system for CMP and wafer polishing |
Dec. 23, 2008 |
| 7438795 |
Electrochemical-mechanical polishing system |
Oct. 21, 2008 |
| 7410411 |
Method of determining the number of active diamonds on a conditioning disk |
Aug. 12, 2008 |
| 7402098 |
Carrier head for workpiece planarization/polishing |
Jul. 22, 2008 |
| 7374471 |
Apparatus and method for polishing semiconductor wafers using one or more pivotable load-and-unload cups |
May. 20, 2008 |
| 7364493 |
Lap grinding and polishing machine |
Apr. 29, 2008 |
| 7364497 |
Polish pad and chemical mechanical polishing apparatus comprising the same |
Apr. 29, 2008 |
| 7357695 |
Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces |
Apr. 15, 2008 |
| 7357699 |
Substrate holding apparatus and polishing apparatus |
Apr. 15, 2008 |
| 7335092 |
Carrier head for workpiece planarization/polishing |
Feb. 26, 2008 |
| 7331847 |
Vibration damping in chemical mechanical polishing system |
Feb. 19, 2008 |
| 7326103 |
Vertically adjustable chemical mechanical polishing head and method for use thereof |
Feb. 5, 2008 |
| 7316602 |
Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing |
Jan. 8, 2008 |
| 7311586 |
Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure |
Dec. 25, 2007 |
| 7303466 |
Carrier head of chemical mechanical polishing apparatus having barriers dividing pressure chamber into a plurality of pressure zones |
Dec. 4, 2007 |
| 7285037 |
Systems including differential pressure application apparatus |
Oct. 23, 2007 |
| 7273407 |
Transparent polishing pad |
Sep. 25, 2007 |
| 7267600 |
Polishing apparatus |
Sep. 11, 2007 |
| 7255630 |
Methods of manufacturing carrier heads for polishing micro-device workpieces |
Aug. 14, 2007 |
| 7255771 |
Multiple zone carrier head with flexible membrane |
Aug. 14, 2007 |
| 7247083 |
Polishing apparatus |
Jul. 24, 2007 |
| 7244168 |
Methods for reducing delamination during chemical mechanical polishing |
Jul. 17, 2007 |
| 7238083 |
Wafer carrier with pressurized membrane and retaining ring actuator |
Jul. 3, 2007 |
| 7238090 |
Polishing apparatus having a trough |
Jul. 3, 2007 |
| 7229343 |
Orbiting indexable belt polishing station for chemical mechanical polishing |
Jun. 12, 2007 |
| 7217176 |
Polishing tool with several pressure zones |
May. 15, 2007 |
| 7207871 |
Carrier head with multiple chambers |
Apr. 24, 2007 |
| 7207862 |
Polishing apparatus and method for detecting foreign matter on polishing surface |
Apr. 24, 2007 |
| 7204743 |
Integrated circuit interconnect fabrication systems |
Apr. 17, 2007 |
| 7201640 |
Method of sucking water and water sucking device |
Apr. 10, 2007 |
| 7201634 |
Polishing methods and apparatus |
Apr. 10, 2007 |
| 7198561 |
Flexible membrane for multi-chamber carrier head |
Apr. 3, 2007 |
| 7196011 |
Apparatus and method for treating substrates |
Mar. 27, 2007 |
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