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Class Information
Number: 451/287
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder > Planar surface abrading
Description: Abrading machine wherein the work holder rotates the work about an axis either parallel to or coincident with the axis of the abrading tool.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5997392 |
Slurry injection technique for chemical-mechanical polishing |
Dec. 7, 1999 |
| 5989104 |
Workpiece carrier with monopiece pressure plate and low gimbal point |
Nov. 23, 1999 |
| 5989107 |
Method for polishing workpieces and apparatus therefor |
Nov. 23, 1999 |
| 5985094 |
Semiconductor wafer carrier |
Nov. 16, 1999 |
| 5980363 |
Under-pad for chemical-mechanical planarization of semiconductor wafers |
Nov. 9, 1999 |
| 5975991 |
Method and apparatus for processing workpieces with multiple polishing elements |
Nov. 2, 1999 |
| 5975994 |
Method and apparatus for selectively conditioning a polished pad used in planarizng substrates |
Nov. 2, 1999 |
| 5975997 |
Method of double-side lapping a wafer and an apparatus therefor |
Nov. 2, 1999 |
| 5961375 |
Shimming substrate holder assemblies to produce more uniformly polished substrate surfaces |
Oct. 5, 1999 |
| 5957749 |
Apparatus for optical inspection of wafers during polishing |
Sep. 28, 1999 |
| 5957750 |
Method and apparatus for controlling a temperature of a polishing pad used in planarizing substrates |
Sep. 28, 1999 |
| 5957764 |
Modular wafer polishing apparatus and method |
Sep. 28, 1999 |
| 5954566 |
Method and apparatus for reconditioning digital recording discs |
Sep. 21, 1999 |
| 5951373 |
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning |
Sep. 14, 1999 |
| 5951382 |
Chemical mechanical polishing carrier fixture and system |
Sep. 14, 1999 |
| 5948203 |
Optical dielectric thickness monitor for chemical-mechanical polishing process monitoring |
Sep. 7, 1999 |
| 5948205 |
Polishing apparatus and method for planarizing layer on a semiconductor wafer |
Sep. 7, 1999 |
| 5944582 |
Chemical mechanical polishing with a small polishing pad |
Aug. 31, 1999 |
| 5944583 |
Composite polish pad for CMP |
Aug. 31, 1999 |
| 5944591 |
Sure-seal rolling pin assembly |
Aug. 31, 1999 |
| 5941758 |
Method and apparatus for chemical-mechanical polishing |
Aug. 24, 1999 |
| 5938506 |
Methods and apparatus for conditioning grinding stones |
Aug. 17, 1999 |
| 5938507 |
Linear conditioner apparatus for a chemical mechanical polishing system |
Aug. 17, 1999 |
| 5938510 |
Disk cleaner device |
Aug. 17, 1999 |
| 5934980 |
Method of chemical mechanical polishing |
Aug. 10, 1999 |
| 5934984 |
Polishing apparatus |
Aug. 10, 1999 |
| 5931719 |
Method and apparatus for using pressure differentials through a polishing pad to improve performance in chemical mechanical polishing |
Aug. 3, 1999 |
| 5931722 |
Chemical mechanical polishing apparatus |
Aug. 3, 1999 |
| 5931723 |
Polishing apparatus |
Aug. 3, 1999 |
| 5928062 |
Vertical polishing device and method |
Jul. 27, 1999 |
| 5921849 |
Method and apparatus for distributing a polishing agent onto a polishing element |
Jul. 13, 1999 |
| 5919082 |
Fixed abrasive polishing pad |
Jul. 6, 1999 |
| 5916010 |
CMP pad maintenance apparatus and method |
Jun. 29, 1999 |
| 5916011 |
Process for polishing a semiconductor device substrate |
Jun. 29, 1999 |
| 5916012 |
Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher |
Jun. 29, 1999 |
| 5913713 |
CMP polishing pad backside modifications for advantageous polishing results |
Jun. 22, 1999 |
| 5913719 |
Workpiece holding mechanism |
Jun. 22, 1999 |
| 5911619 |
Apparatus for electrochemical mechanical planarization |
Jun. 15, 1999 |
| 5910043 |
Polishing pad for chemical-mechanical planarization of a semiconductor wafer |
Jun. 8, 1999 |
| 5908347 |
Polishing system for polishing wafer |
Jun. 1, 1999 |
| 5908530 |
Apparatus for chemical mechanical polishing |
Jun. 1, 1999 |
| 5906532 |
Method for polishing semiconductor substrate and apparatus for the same |
May. 25, 1999 |
| 5904608 |
Polishing apparatus having interlock function |
May. 18, 1999 |
| 5904609 |
Polishing apparatus and polishing method |
May. 18, 1999 |
| 5902173 |
Polishing machine with efficient polishing and dressing |
May. 11, 1999 |
| 5899792 |
Optical polishing apparatus and methods |
May. 4, 1999 |
| 5899799 |
Method and system to increase delivery of slurry to the surface of large substrates during polishing operations |
May. 4, 1999 |
| 5899800 |
Chemical mechanical polishing apparatus with orbital polishing |
May. 4, 1999 |
| 5897424 |
Renewable polishing lap |
Apr. 27, 1999 |
| 5897425 |
Vertical polishing tool and method |
Apr. 27, 1999 |
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