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Class Information
Number: 451/287
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder > Planar surface abrading
Description: Abrading machine wherein the work holder rotates the work about an axis either parallel to or coincident with the axis of the abrading tool.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7604529 |
Three-dimensional network for chemical mechanical polishing |
Oct. 20, 2009 |
| 7601049 |
Double side wafer grinder and methods for assessing workpiece nanotopology |
Oct. 13, 2009 |
| 7591714 |
Wafer grinding and tape attaching apparatus and method |
Sep. 22, 2009 |
| 7591711 |
Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces |
Sep. 22, 2009 |
| 7588482 |
Apparatus and method for manufacturing liquid crystal display device |
Sep. 15, 2009 |
| 7585205 |
Substrate polishing apparatus and method |
Sep. 8, 2009 |
| 7572173 |
Polishing apparatus and pad replacing method thereof |
Aug. 11, 2009 |
| 7559825 |
Method of polishing a semiconductor wafer |
Jul. 14, 2009 |
| 7541287 |
Method for machining a semiconductor wafer on both sides in a carrier, carrier, and a semiconductor wafer produced by the method |
Jun. 2, 2009 |
| 7510460 |
Substrate polishing apparatus |
Mar. 31, 2009 |
| 7507148 |
Polishing apparatus, polishing head and polishing method |
Mar. 24, 2009 |
| 7507144 |
Substrate polishing apparatus |
Mar. 24, 2009 |
| 7503833 |
Three-dimensional network for chemical mechanical polishing |
Mar. 17, 2009 |
| 7503837 |
Composite retaining ring |
Mar. 17, 2009 |
| 7500902 |
Thickness-measuring method during grinding process |
Mar. 10, 2009 |
| 7494931 |
Method for fabricating semiconductor device and polishing method |
Feb. 24, 2009 |
| 7488240 |
Polishing device |
Feb. 10, 2009 |
| 7485028 |
Chemical mechanical polishing retaining ring, apparatuses and methods incorporating same |
Feb. 3, 2009 |
| 7465668 |
Method of manufacturing semiconductor device |
Dec. 16, 2008 |
| 7462094 |
Wafer grinding method |
Dec. 9, 2008 |
| 7438795 |
Electrochemical-mechanical polishing system |
Oct. 21, 2008 |
| 7435158 |
Initial position setting method of grinding wheel in vertical double disc surface grinding machine |
Oct. 14, 2008 |
| 7422514 |
Dental crown polishing apparatus |
Sep. 9, 2008 |
| 7416474 |
Planarization apparatus |
Aug. 26, 2008 |
| 7410411 |
Method of determining the number of active diamonds on a conditioning disk |
Aug. 12, 2008 |
| 7381116 |
Polishing media stabilizer |
Jun. 3, 2008 |
| 7367867 |
Two-side working machine |
May. 6, 2008 |
| 7367871 |
Semiconductor processing methods of removing conductive material |
May. 6, 2008 |
| 7364497 |
Polish pad and chemical mechanical polishing apparatus comprising the same |
Apr. 29, 2008 |
| 7364493 |
Lap grinding and polishing machine |
Apr. 29, 2008 |
| 7354332 |
Technique for process-qualifying a semiconductor manufacturing tool using metrology data |
Apr. 8, 2008 |
| 7354334 |
Reducing polishing pad deformation |
Apr. 8, 2008 |
| 7341502 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces |
Mar. 11, 2008 |
| 7335088 |
CMP system with temperature-controlled polishing head |
Feb. 26, 2008 |
| 7316600 |
Metal working method to reduce thermal damage |
Jan. 8, 2008 |
| 7314401 |
Methods and systems for conditioning planarizing pads used in planarizing substrates |
Jan. 1, 2008 |
| 7311590 |
Polishing pad with grooves to retain slurry on the pad texture |
Dec. 25, 2007 |
| 7303462 |
Edge bead removal by an electro polishing process |
Dec. 4, 2007 |
| 7297047 |
Bubble suppressing flow controller with ultrasonic flow meter |
Nov. 20, 2007 |
| 7278905 |
Apparatus and method for conditioning polishing surface, and polishing apparatus and method of operation |
Oct. 9, 2007 |
| 7261621 |
Pad conditioner for chemical mechanical polishing apparatus |
Aug. 28, 2007 |
| 7258595 |
Polishing apparatus |
Aug. 21, 2007 |
| 7258598 |
Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device |
Aug. 21, 2007 |
| 7255629 |
Polishing assembly with a window |
Aug. 14, 2007 |
| 7244168 |
Methods for reducing delamination during chemical mechanical polishing |
Jul. 17, 2007 |
| 7241202 |
Substrate polishing apparatus |
Jul. 10, 2007 |
| 7238084 |
Chemical mechanical polishing apparatus and chemical mechanical polishing method using the same |
Jul. 3, 2007 |
| 7238087 |
Planarizing device and a planarization method for semiconductor substrates |
Jul. 3, 2007 |
| 7238092 |
Low-force electrochemical mechanical processing method and apparatus |
Jul. 3, 2007 |
| 7238093 |
Polishing cloth for chemical mechanical polishing, and chemical mechanical polishing apparatus using said cloth |
Jul. 3, 2007 |
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