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Class Information
Number: 451/287
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder > Planar surface abrading
Description: Abrading machine wherein the work holder rotates the work about an axis either parallel to or coincident with the axis of the abrading tool.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7422514 |
Dental crown polishing apparatus |
Sep. 9, 2008 |
| 7416474 |
Planarization apparatus |
Aug. 26, 2008 |
| 7410411 |
Method of determining the number of active diamonds on a conditioning disk |
Aug. 12, 2008 |
| 7381116 |
Polishing media stabilizer |
Jun. 3, 2008 |
| 7367871 |
Semiconductor processing methods of removing conductive material |
May. 6, 2008 |
| 7367867 |
Two-side working machine |
May. 6, 2008 |
| 7364493 |
Lap grinding and polishing machine |
Apr. 29, 2008 |
| 7364497 |
Polish pad and chemical mechanical polishing apparatus comprising the same |
Apr. 29, 2008 |
| 7354332 |
Technique for process-qualifying a semiconductor manufacturing tool using metrology data |
Apr. 8, 2008 |
| 7354334 |
Reducing polishing pad deformation |
Apr. 8, 2008 |
| 7341502 |
Methods and systems for planarizing workpieces, e.g., microelectronic workpieces |
Mar. 11, 2008 |
| 7335088 |
CMP system with temperature-controlled polishing head |
Feb. 26, 2008 |
| 7316600 |
Metal working method to reduce thermal damage |
Jan. 8, 2008 |
| 7314401 |
Methods and systems for conditioning planarizing pads used in planarizing substrates |
Jan. 1, 2008 |
| 7311590 |
Polishing pad with grooves to retain slurry on the pad texture |
Dec. 25, 2007 |
| 7303462 |
Edge bead removal by an electro polishing process |
Dec. 4, 2007 |
| 7297047 |
Bubble suppressing flow controller with ultrasonic flow meter |
Nov. 20, 2007 |
| 7278905 |
Apparatus and method for conditioning polishing surface, and polishing apparatus and method of operation |
Oct. 9, 2007 |
| 7261621 |
Pad conditioner for chemical mechanical polishing apparatus |
Aug. 28, 2007 |
| 7258598 |
Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device |
Aug. 21, 2007 |
| 7258595 |
Polishing apparatus |
Aug. 21, 2007 |
| 7255629 |
Polishing assembly with a window |
Aug. 14, 2007 |
| 7244168 |
Methods for reducing delamination during chemical mechanical polishing |
Jul. 17, 2007 |
| 7241202 |
Substrate polishing apparatus |
Jul. 10, 2007 |
| 7238084 |
Chemical mechanical polishing apparatus and chemical mechanical polishing method using the same |
Jul. 3, 2007 |
| 7238087 |
Planarizing device and a planarization method for semiconductor substrates |
Jul. 3, 2007 |
| 7238092 |
Low-force electrochemical mechanical processing method and apparatus |
Jul. 3, 2007 |
| 7238093 |
Polishing cloth for chemical mechanical polishing, and chemical mechanical polishing apparatus using said cloth |
Jul. 3, 2007 |
| 7229337 |
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting |
Jun. 12, 2007 |
| 7226345 |
CMP pad with designed surface features |
Jun. 5, 2007 |
| 7223157 |
Chemical-mechanical polishing apparatus and method of conditioning polishing pad |
May. 29, 2007 |
| 7223153 |
Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces |
May. 29, 2007 |
| 7220166 |
Methods and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate |
May. 22, 2007 |
| 7214122 |
Substrate polishing apparatus |
May. 8, 2007 |
| 7210989 |
Planarizing machines and methods for dispensing planarizing solutions in the processing of microelectronic workpieces |
May. 1, 2007 |
| 7201635 |
Methods and systems for conditioning planarizing pads used in planarizing substrates |
Apr. 10, 2007 |
| 7201640 |
Method of sucking water and water sucking device |
Apr. 10, 2007 |
| 7198560 |
Wafer planarization composition and method of use |
Apr. 3, 2007 |
| 7196011 |
Apparatus and method for treating substrates |
Mar. 27, 2007 |
| 7189139 |
Polishing apparatus |
Mar. 13, 2007 |
| 7186164 |
Processing pad assembly with zone control |
Mar. 6, 2007 |
| 7186171 |
Composite retaining ring |
Mar. 6, 2007 |
| 7182677 |
Chemical mechanical polishing pad for controlling polishing slurry distribution |
Feb. 27, 2007 |
| 7175508 |
Polishing apparatus, method of manufacturing semiconductor device using the same, and semiconductor device manufactured by this method |
Feb. 13, 2007 |
| 7175510 |
Method and apparatus for conditioning a polishing pad |
Feb. 13, 2007 |
| 7176676 |
Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece |
Feb. 13, 2007 |
| 7169235 |
Cleaning method and polishing apparatus employing such cleaning method |
Jan. 30, 2007 |
| 7169015 |
Apparatus for optical inspection of wafers during processing |
Jan. 30, 2007 |
| 7166014 |
Chemical mechanical planarization process control utilizing in-situ conditioning process |
Jan. 23, 2007 |
| 7166015 |
Apparatus and method for controlling fluid material composition on a polishing pad |
Jan. 23, 2007 |
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