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Class Information
Number: 451/286
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder > By means loosely confining work
Description: Abrading machine wherein the workpiece is bounded by the work holder which is dimensioned so that the workpiece contained therein may move within the holder during the abrading operation.










Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8702473 Rock polishing systems and methods Apr. 22, 2014
8591286 Apparatus and method for temperature control during polishing Nov. 26, 2013
8574033 Wafer support member, method for manufacturing the same and wafer polishing unit comprising the same Nov. 5, 2013
8556684 Retaining ring for chemical mechanical polishing Oct. 15, 2013
8535121 Retaining ring and articles for carrier head Sep. 17, 2013
8517803 Retaining ring for chemical mechanical polishing Aug. 27, 2013
8414361 Silicon carbide, sapphire, germanium, silicon and pattern wafer polishing templates holder Apr. 9, 2013
8398456 Polishing method, polishing apparatus and method of monitoring a substrate Mar. 19, 2013
8357029 Polishing apparatus Jan. 22, 2013
8298046 Retaining rings Oct. 30, 2012
8128458 Polishing apparatus and substrate processing method Mar. 6, 2012
8100743 Polishing apparatus Jan. 24, 2012
8070560 Polishing apparatus and method Dec. 6, 2011
8033895 Retaining ring with shaped profile Oct. 11, 2011
8029640 Multilayer retaining ring for chemical mechanical polishing Oct. 4, 2011
7857683 CMP retaining ring Dec. 28, 2010
7674154 Apparatus and method for polishing objects using object cleaners Mar. 9, 2010
7654883 Polishing apparatus, polishing head and polishing method Feb. 2, 2010
7559825 Method of polishing a semiconductor wafer Jul. 14, 2009
7520955 Carrier head with a multilayer retaining ring for chemical mechanical polishing Apr. 21, 2009
7507148 Polishing apparatus, polishing head and polishing method Mar. 24, 2009
7503838 Belt sander Mar. 17, 2009
7364497 Polish pad and chemical mechanical polishing apparatus comprising the same Apr. 29, 2008
7361076 Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus Apr. 22, 2008
7354332 Technique for process-qualifying a semiconductor manufacturing tool using metrology data Apr. 8, 2008
7294040 Method and apparatus for supporting a microelectronic substrate relative to a planarization pad Nov. 13, 2007
7255637 Carrier head vibration damping Aug. 14, 2007
7244168 Methods for reducing delamination during chemical mechanical polishing Jul. 17, 2007
7201640 Method of sucking water and water sucking device Apr. 10, 2007
7198548 Polishing apparatus and method with direct load platen Apr. 3, 2007
7189139 Polishing apparatus Mar. 13, 2007
7175510 Method and apparatus for conditioning a polishing pad Feb. 13, 2007
RE39471 Apparatus for and method for polishing workpiece Jan. 16, 2007
7156725 Substrate polishing machine Jan. 2, 2007
7153185 Substrate edge detection Dec. 26, 2006
7153188 Temperature control in a chemical mechanical polishing system Dec. 26, 2006
7140956 Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece Nov. 28, 2006
7137874 Semiconductor wafer, polishing apparatus and method Nov. 21, 2006
7121922 Method and apparatus for polishing a workpiece surface Oct. 17, 2006
7121926 Methods for planarization of group VIII metal-containing surfaces using a fixed abrasive article Oct. 17, 2006
7121938 Polishing pad and method of fabricating semiconductor substrate using the pad Oct. 17, 2006
7101255 Polishing apparatus Sep. 5, 2006
7101261 Fluid-pressure regulated wafer polishing head Sep. 5, 2006
7101254 System and method for in-line metal profile measurement Sep. 5, 2006
7097537 Determination of position of sensor measurements during polishing Aug. 29, 2006
7094133 Retainer and wafer polishing apparatus Aug. 22, 2006
7090570 Chemical mechanical polishing apparatus and methods using a polishing surface with non-uniform rigidity Aug. 15, 2006
7074109 Chemical mechanical polishing control system and method Jul. 11, 2006
7063605 Retaining ring for wafer carriers Jun. 20, 2006
7040971 Carrier head with a flexible membrane May. 9, 2006

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