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Class Information
Number: 451/285
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder
Description: Abrading machine including a member adapted to grip and turn with the work about an axis more than 360°.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6102776 |
Apparatus and method for controlling polishing of integrated circuit substrates |
Aug. 15, 2000 |
| 6102780 |
Substrate polishing apparatus and method for polishing semiconductor substrate |
Aug. 15, 2000 |
| 6102778 |
Wafer lapping method capable of achieving a stable abrasion rate |
Aug. 15, 2000 |
| 6099386 |
Control device for maintaining a chemical mechanical polishing machine in a wet mode |
Aug. 8, 2000 |
| 6095908 |
Polishing apparatus having a material for adjusting a surface of a polishing pad and method for adjusting the surface of the polishing pad |
Aug. 1, 2000 |
| 6093088 |
Surface polishing machine |
Jul. 25, 2000 |
| 6093280 |
Chemical-mechanical polishing pad conditioning systems |
Jul. 25, 2000 |
| 6089960 |
Semiconductor wafer polishing mechanism |
Jul. 18, 2000 |
| 6089961 |
Wafer polishing carrier and ring extension therefor |
Jul. 18, 2000 |
| 6090475 |
Polishing pad, methods of manufacturing and use |
Jul. 18, 2000 |
| 6086457 |
Washing transfer station in a system for chemical mechanical polishing |
Jul. 11, 2000 |
| 6080049 |
Wafer polishing apparatus |
Jun. 27, 2000 |
| 6080048 |
Polishing machine |
Jun. 27, 2000 |
| 6077149 |
Method and apparatus for surface-grinding of workpiece |
Jun. 20, 2000 |
| 6074286 |
Wafer processing apparatus and method of processing a wafer utilizing a processing slurry |
Jun. 13, 2000 |
| 6074276 |
Polishing apparatus |
Jun. 13, 2000 |
| 6071177 |
Method and apparatus for determining end point in a polishing process |
Jun. 6, 2000 |
| 6062961 |
Wafer polishing head drive |
May. 16, 2000 |
| 6062954 |
Semiconductor wafer surface flattening apparatus |
May. 16, 2000 |
| 6054015 |
Apparatus for loading and unloading substrates to a chemical-mechanical planarization machine |
Apr. 25, 2000 |
| 6050882 |
Carrier head to apply pressure to and retain a substrate |
Apr. 18, 2000 |
| 6045433 |
Apparatus for optical inspection of wafers during polishing |
Apr. 4, 2000 |
| 6033520 |
Apparatus for and method of polishing workpiece |
Mar. 7, 2000 |
| 6033987 |
Method for mapping and adjusting pressure distribution of CMP processes |
Mar. 7, 2000 |
| 6033293 |
Apparatus for performing chemical-mechanical polishing |
Mar. 7, 2000 |
| 6027398 |
Wafer polishing apparatus |
Feb. 22, 2000 |
| 6024630 |
Fluid-pressure regulated wafer polishing head |
Feb. 15, 2000 |
| 6012970 |
Process for forming a semiconductor device |
Jan. 11, 2000 |
| 6007411 |
Wafer carrier for chemical mechanical polishing |
Dec. 28, 1999 |
| 6004187 |
Method and apparatus for measuring film thickness and film thickness distribution during polishing |
Dec. 21, 1999 |
| 6004193 |
Dual purpose retaining ring and polishing pad conditioner |
Dec. 21, 1999 |
| 6001001 |
Apparatus and method for chemical mechanical polishing of a wafer |
Dec. 14, 1999 |
| 5997384 |
Method and apparatus for controlling planarizing characteristics in mechanical and chemical-mechanical planarization of microelectronic substrates |
Dec. 7, 1999 |
| 5993302 |
Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus |
Nov. 30, 1999 |
| 5989103 |
Magnetic carrier head for chemical mechanical polishing |
Nov. 23, 1999 |
| 5989107 |
Method for polishing workpieces and apparatus therefor |
Nov. 23, 1999 |
| 5980367 |
Semiconductor wafer polishing machine and method |
Nov. 9, 1999 |
| 5967885 |
Method of manufacturing an integrated circuit using chemical mechanical polishing |
Oct. 19, 1999 |
| 5964653 |
Carrier head with a flexible membrane for a chemical mechanical polishing system |
Oct. 12, 1999 |
| 5964643 |
Apparatus and method for in-situ monitoring of chemical mechanical polishing operations |
Oct. 12, 1999 |
| 5964652 |
Apparatus for the chemical-mechanical polishing of wafers |
Oct. 12, 1999 |
| 5961375 |
Shimming substrate holder assemblies to produce more uniformly polished substrate surfaces |
Oct. 5, 1999 |
| 5957754 |
Cavitational polishing pad conditioner |
Sep. 28, 1999 |
| 5957764 |
Modular wafer polishing apparatus and method |
Sep. 28, 1999 |
| 5957749 |
Apparatus for optical inspection of wafers during polishing |
Sep. 28, 1999 |
| 5954570 |
Conditioner for a polishing tool |
Sep. 21, 1999 |
| 5951373 |
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning |
Sep. 14, 1999 |
| 5951382 |
Chemical mechanical polishing carrier fixture and system |
Sep. 14, 1999 |
| 5944589 |
Abrasive pad and manufacturing method thereof and substrate polishing method using said abrasive pad |
Aug. 31, 1999 |
| 5944590 |
Polishing apparatus having retainer ring rounded along outer periphery of lower surface and method of regulating retainer ring to appropriate configuration |
Aug. 31, 1999 |
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