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Class Information
Number: 451/285
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder
Description: Abrading machine including a member adapted to grip and turn with the work about an axis more than 360°.










Sub-classes under this class:

Class Number Class Name Patents
451/286 By means loosely confining work 289
451/290 Disk or wheel abrader 195
451/289 Having vacuum or adhesive securing means 355
451/287 Planar surface abrading 1,068
451/291 Planetary 58
451/292 Turret 30


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20

Patent Number Title Of Patent Date Issued
8702477 Polishing pad sub plate Apr. 22, 2014
8662958 Chemical-mechanical polishing apparatus for manufacturing semiconductor devices Mar. 4, 2014
8657648 Processing apparatus having four processing units Feb. 25, 2014
8636561 Polishing head and polishing apparatus Jan. 28, 2014
8597082 Grinding apparatus and method for fabrication of liquid crystal display device Dec. 3, 2013
8591286 Apparatus and method for temperature control during polishing Nov. 26, 2013
8585468 Retaining ring with shaped surface Nov. 19, 2013
8579679 Conditioning method and conditioning apparatus for polishing pad for use in double side polishing device Nov. 12, 2013
8562394 Polishing head and tool change arm for a polishing head Oct. 22, 2013
8556684 Retaining ring for chemical mechanical polishing Oct. 15, 2013
8506355 System and method for in-situ inspection during metallurgical cross-sectioning Aug. 13, 2013
8496512 Polishing pad, polishing method and method of forming polishing pad Jul. 30, 2013
8485863 Polishing liquids for activating and/or conditioning fixed abrasive polishing pads, and associated systems and methods Jul. 16, 2013
8480456 Ultra-flat, high throughput wafer lapping process Jul. 9, 2013
8465342 Method of making and apparatus having windowless polishing pad and protected fiber Jun. 18, 2013
8465345 Stepped retaining ring Jun. 18, 2013
8454410 Polishing apparatus Jun. 4, 2013
8431489 Chemical mechanical polishing pad having a low defect window Apr. 30, 2013
8414361 Silicon carbide, sapphire, germanium, silicon and pattern wafer polishing templates holder Apr. 9, 2013
8398878 Methods for producing and processing semiconductor wafers Mar. 19, 2013
8398464 Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for manufacturing grinding wheel and wafer edge grinding apparatus using the same Mar. 19, 2013
8398461 Polishing method, polishing pad and polishing system Mar. 19, 2013
8398458 Modular base-plate semiconductor polisher architecture Mar. 19, 2013
8398456 Polishing method, polishing apparatus and method of monitoring a substrate Mar. 19, 2013
8388410 RFID-containing carriers used for silicon wafer quality Mar. 5, 2013
8388412 Retaining ring with shaped profile Mar. 5, 2013
8376813 Retaining ring and articles for carrier head Feb. 19, 2013
8360817 Polishing apparatus and polishing method Jan. 29, 2013
8357029 Polishing apparatus Jan. 22, 2013
8348720 Ultra-flat, high throughput wafer lapping process Jan. 8, 2013
8342905 Optical disk restoration method and apparatus Jan. 1, 2013
8342906 Friction sensor for polishing system Jan. 1, 2013
8343300 Automated thermal slide debonder Jan. 1, 2013
8337281 Self-aligning rotary blade holder for sharpener Dec. 25, 2012
8313359 Chemical mechanical polishing apparatus Nov. 20, 2012
8298047 Substrate retainer Oct. 30, 2012
8287333 Single type substrate treating apparatus and method Oct. 16, 2012
8283252 Method of manufacturing semiconductor wafer Oct. 9, 2012
8277290 Polishing pad and polishing device Oct. 2, 2012
8267746 Substrate holding apparatus, polishing apparatus, and polishing method Sep. 18, 2012
8197301 Chemical mechanical polishing apparatus Jun. 12, 2012
8192248 Semiconductor wafer polishing apparatus and method of polishing Jun. 5, 2012
8172647 Polish pad conditioning in mechanical polishing systems May. 8, 2012
8172643 Polishing system having a track May. 8, 2012
8162723 Method of polishing a tungsten carbide surface Apr. 24, 2012
8157614 Method of making and apparatus having windowless polishing pad and protected fiber Apr. 17, 2012
8152595 System and method for optical endpoint detection during CMP by using an across-substrate signal Apr. 10, 2012
8133096 Multi-phase polishing pad Mar. 13, 2012
8128461 Chemical mechanical polishing with multi-zone slurry delivery Mar. 6, 2012
8100739 Substrate holding apparatus, polishing apparatus, and polishing method Jan. 24, 2012

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