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Class Information
Number: 451/285
Name: Abrading > Machine > Rotary tool > Rotary disk > Work rotating > Rotary work holder
Description: Abrading machine including a member adapted to grip and turn with the work about an axis more than 360°.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7601051 |
Grinding machine having grinder head and method of manufacturing semiconductor device by using the grinding machine |
Oct. 13, 2009 |
| 7591711 |
Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces |
Sep. 22, 2009 |
| 7591714 |
Wafer grinding and tape attaching apparatus and method |
Sep. 22, 2009 |
| 7589023 |
Method of manufacturing semiconductor wafer |
Sep. 15, 2009 |
| 7585203 |
Bowling ball surface treatment machine and bowling ball surface treatment method |
Sep. 8, 2009 |
| 7572173 |
Polishing apparatus and pad replacing method thereof |
Aug. 11, 2009 |
| 7559825 |
Method of polishing a semiconductor wafer |
Jul. 14, 2009 |
| 7547242 |
Substrate polishing apparatus |
Jun. 16, 2009 |
| 7534166 |
Chemical mechanical polishing apparatus |
May. 19, 2009 |
| 7527544 |
System of using offset gage for CMP polishing pad alignment and adjustment |
May. 5, 2009 |
| 7524237 |
Diamond tool blade with circular cutting edge |
Apr. 28, 2009 |
| 7520798 |
Polishing pad with grooves to reduce slurry consumption |
Apr. 21, 2009 |
| 7520955 |
Carrier head with a multilayer retaining ring for chemical mechanical polishing |
Apr. 21, 2009 |
| 7520796 |
Polishing pad with grooves to reduce slurry consumption |
Apr. 21, 2009 |
| 7513818 |
Polishing endpoint detection system and method using friction sensor |
Apr. 7, 2009 |
| 7510460 |
Substrate polishing apparatus |
Mar. 31, 2009 |
| 7503837 |
Composite retaining ring |
Mar. 17, 2009 |
| 7488240 |
Polishing device |
Feb. 10, 2009 |
| 7481695 |
Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing head |
Jan. 27, 2009 |
| 7465221 |
Polishing apparatus |
Dec. 16, 2008 |
| 7459397 |
Polishing method for semiconductor substrate, and polishing jig used therein |
Dec. 2, 2008 |
| 7438795 |
Electrochemical-mechanical polishing system |
Oct. 21, 2008 |
| 7438632 |
Method and apparatus for cleaning a web-based chemical mechanical planarization system |
Oct. 21, 2008 |
| 7435165 |
Transparent microporous materials for CMP |
Oct. 14, 2008 |
| 7429207 |
System for endpoint detection with polishing pad |
Sep. 30, 2008 |
| 7419420 |
Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
Sep. 2, 2008 |
| 7407433 |
Pad characterization tool |
Aug. 5, 2008 |
| 7404757 |
Apparatus and method for breaking in multiple pad conditioning disks for use in a chemical mechanical polishing system |
Jul. 29, 2008 |
| 7390242 |
Diamond tool blade with circular cutting edge |
Jun. 24, 2008 |
| 7374471 |
Apparatus and method for polishing semiconductor wafers using one or more pivotable load-and-unload cups |
May. 20, 2008 |
| 7371152 |
Non-uniform subaperture polishing |
May. 13, 2008 |
| 7367867 |
Two-side working machine |
May. 6, 2008 |
| 7364497 |
Polish pad and chemical mechanical polishing apparatus comprising the same |
Apr. 29, 2008 |
| 7364493 |
Lap grinding and polishing machine |
Apr. 29, 2008 |
| 7357698 |
Polishing pad and chemical mechanical polishing apparatus using the same |
Apr. 15, 2008 |
| 7354335 |
CMP apparatus and load cup mechanism |
Apr. 8, 2008 |
| 7344434 |
Retaining ring with shaped surface |
Mar. 18, 2008 |
| 7338353 |
Loading device for chemical mechanical polisher of semiconductor wafer |
Mar. 4, 2008 |
| 7331847 |
Vibration damping in chemical mechanical polishing system |
Feb. 19, 2008 |
| 7326105 |
Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces |
Feb. 5, 2008 |
| 7314402 |
Method and apparatus for controlling slurry distribution |
Jan. 1, 2008 |
| 7306509 |
Processing device, processing method and method of manufacturing semiconductor device |
Dec. 11, 2007 |
| 7303466 |
Carrier head of chemical mechanical polishing apparatus having barriers dividing pressure chamber into a plurality of pressure zones |
Dec. 4, 2007 |
| 7300332 |
Polished state monitoring apparatus and polishing apparatus using the same |
Nov. 27, 2007 |
| 7294038 |
Process control in electrochemically assisted planarization |
Nov. 13, 2007 |
| 7294040 |
Method and apparatus for supporting a microelectronic substrate relative to a planarization pad |
Nov. 13, 2007 |
| 7278908 |
Polishing disk for a tool for the fine machining of optically active surfaces on spectacle lenses in particular |
Oct. 9, 2007 |
| 7273407 |
Transparent polishing pad |
Sep. 25, 2007 |
| 7267607 |
Transparent microporous materials for CMP |
Sep. 11, 2007 |
| 7252577 |
Methods for lapping using pneumatically actuated flexible coupling end effectors |
Aug. 7, 2007 |
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