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Class Information
Number: 451/21
Name: Abrading > Precision device or process - or with condition responsive control > With feeding of tool or work holder > Tool wear compensation
Description: Subject matter comprising means to make allowance for the deterioration or impairment of the tool caused by wear.










Sub-classes under this class:

Class Number Class Name Patents
451/22 Sizing gauge controlled 55


Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8662956 Conditioner of chemical mechanical polishing apparatus Mar. 4, 2014
8408965 Eddy current gain compensation Apr. 2, 2013
8337279 Closed-loop control for effective pad conditioning Dec. 25, 2012
8298043 Pad conditioner dresser Oct. 30, 2012
8277279 Method for processing a work-piece Oct. 2, 2012
8231431 Solar panel edge deletion module Jul. 31, 2012
8231430 Wafer production method Jul. 31, 2012
8221191 CMP apparatus and method of polishing wafer using CMP Jul. 17, 2012
8136379 Helical part manufacturing apparatus and control method thereof Mar. 20, 2012
8123593 Configuring of lapping and polishing machines Feb. 28, 2012
8096853 Pre- and post-process bore gaging using a honing feed system equipped with feed force sensing Jan. 17, 2012
8070556 Grinding wheel for roll grinding and method of roll grinding Dec. 6, 2011
8065031 Polishing end point detection method utilizing torque change and device thereof Nov. 22, 2011
8043870 CMP pad thickness and profile monitoring system Oct. 25, 2011
8025555 System for measuring and controlling the level of vacuum applied to a conditioning holder within a CMP system Sep. 27, 2011
7997955 Method and apparatus for circumferential interior treatment of pipe elbows Aug. 16, 2011
7988533 Scratch removal device and method Aug. 2, 2011
7927186 Method for producing glass substrate for magnetic disk Apr. 19, 2011
7901267 Method for controlling the forces applied to a vacuum-assisted pad conditioning system Mar. 8, 2011
7846007 System and method for dressing a wafer polishing pad Dec. 7, 2010
7846006 Dressing a wafer polishing pad Dec. 7, 2010
7828626 Apparatus for conditioning processing pads Nov. 9, 2010
7749050 Pad conditioner dresser Jul. 6, 2010
7747336 Apparatus for creating a turning program Jun. 29, 2010
7722437 Manufacturing method of semiconductor integrated circuit device May. 25, 2010
7666064 Method for grinding semiconductor wafers Feb. 23, 2010
7575503 Vacuum-assisted pad conditioning system Aug. 18, 2009
7544113 Apparatus for controlling the forces applied to a vacuum-assisted pad conditioning system Jun. 9, 2009
7507143 Truing method for grinding wheel Mar. 24, 2009
7473162 Pad conditioner dresser with varying pressure Jan. 6, 2009
7473159 Detection of diamond contamination in polishing pad and reconditioning system therefor Jan. 6, 2009
7458879 Dressing apparatus and substrate holding apparatus Dec. 2, 2008
7413986 Feedforward and feedback control for conditioning of chemical mechanical polishing pad Aug. 19, 2008
7407433 Pad characterization tool Aug. 5, 2008
7404754 CNC tungsten steel cutting machine Jul. 29, 2008
7357695 Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces Apr. 15, 2008
7354333 Detection of diamond contamination in polishing pad Apr. 8, 2008
7326103 Vertically adjustable chemical mechanical polishing head and method for use thereof Feb. 5, 2008
7306506 In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging Dec. 11, 2007
7300342 Scratch removal device and method Nov. 27, 2007
7278901 Method and apparatus for measuring abrasion amount and pad friction force of polishing pad using thickness change of slurry film Oct. 9, 2007
7220163 Method and apparatus for measuring abrasion amount and pad friction force of polishing pad using thickness change of slurry film May. 22, 2007
7201632 In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging Apr. 10, 2007
7198543 Gear grinding machine Apr. 3, 2007
7198542 Method and system for controlling the chemical mechanical polishing by using a seismic signal of a seismic sensor Apr. 3, 2007
7195543 Machine tool with 5 machining axes with a continuous grinding tool profilling system Mar. 27, 2007
7172495 Method and apparatus using a sensor for finish-machining teeth Feb. 6, 2007
7137872 Scratch removal device and method Nov. 21, 2006
7131891 Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces Nov. 7, 2006
7125312 Rotor-grinding machine comprising a rotary head with two grinding wheels Oct. 24, 2006

1 2 3 4 5 6










 
 
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