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Class Information
Number: 438/980
Name: Semiconductor device manufacturing: process > Utilizing process equivalents or options
Description: Art collection involving the substitution of an operation that will perform the same or similar function of the operation it replaces.

Patents under this class:
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Patent Number Title Of Patent Date Issued
7155360 Process variation detector and process variation detecting method Dec. 26, 2006
6887775 Process and apparatus for epitaxially coating a semiconductor wafer and epitaxially coated semiconductor wafer May. 3, 2005
6638781 Semiconductor device and method of fabricating the same Oct. 28, 2003
6638776 Thermal characterization compensation Oct. 28, 2003
6559064 Method and apparatus for removing photoresist on semiconductor wafer May. 6, 2003
5879970 Process of growing polycrystalline silicon-germanium alloy having large silicon content Mar. 9, 1999
5728259 Process for fabricating thin-film semiconductor device without plasma induced damage Mar. 17, 1998
5707879 Neutron detector based on semiconductor materials Jan. 13, 1998
5698469 Method of making a hybrid circuit with a chip having active devices with extra-chip interconnections Dec. 16, 1997
5674758 Silicon on insulator achieved using electrochemical etching Oct. 7, 1997
5670388 Method of making contacted body silicon-on-insulator field effect transistor Sep. 23, 1997
5663075 Method of fabricating backside illuminated FET optical receiver with gallium arsenide species Sep. 2, 1997
5651860 Ion-implanted resist removal method Jul. 29, 1997
5575886 Method for fabricating semiconductor device with chemical-mechanical polishing process for planarization of interlayer insulation films Nov. 19, 1996
5567644 Method of making a resistor Oct. 22, 1996
5563095 Method for manufacturing semiconductor devices Oct. 8, 1996
5468657 Nitridation of SIMOX buried oxide Nov. 21, 1995
5454902 Production of clean, well-ordered CdTe surfaces using laser ablation Oct. 3, 1995
5448488 Computer-controlled individual chip management system for processing wafers Sep. 5, 1995
5434090 Processing chamber for processing semiconductor substrates Jul. 18, 1995
5420075 Forming multi-layered interconnections with fluorine compound treatment permitting selective deposition of insulator May. 30, 1995
5407838 Method for fabricating a semiconductor device using implantation and subsequent annealing to eliminate defects Apr. 18, 1995
5378317 Method for removing organic film Jan. 3, 1995
5375061 Manufacturing management and apparatus for a semiconductor device Dec. 20, 1994
5328549 Method of producing sheets of crystalline material and devices made therefrom Jul. 12, 1994
5300451 Process for forming a buried drain or collector region in monolithic semiconductor devices Apr. 5, 1994
5262351 Process for manufacturing a multilayer integrated circuit interconnection Nov. 16, 1993
5217564 Method of producing sheets of crystalline material and devices made therefrom Jun. 8, 1993
5210045 Dual dielectric field effect transistors for protected gate structures for improved yield and performance in thin film transistor matrix addressed liquid crystal displays May. 11, 1993
5177030 Method of making self-aligned vertical intrinsic resistance Jan. 5, 1993
5132240 Method for manufacturing a semiconductor device Jul. 21, 1992
5126008 Corrosion-free aluminum etching process for fabricating an integrated circuit structure Jun. 30, 1992
5120676 Use of phosphine and arsine compounds in chemical vapor deposition and chemical doping Jun. 9, 1992
5077238 Method of manufacturing a semiconductor device with a planar interlayer insulating film Dec. 31, 1991
5063174 Si/Au/Ni alloyed ohmic contact to n-GaAs and fabricating process therefor Nov. 5, 1991
5037766 Method of fabricating a thin film polysilicon thin film transistor or resistor Aug. 6, 1991
5028562 Method for producing a semiconductor laser using selective epitaxy Jul. 2, 1991
4994401 Method of making a thin film transistor Feb. 19, 1991
4954865 Integrated circuits Sep. 4, 1990
4897150 Method of direct write desposition of a conductor on a semiconductor Jan. 30, 1990
4892617 Processes involving lithographic materials Jan. 9, 1990
4891325 Method for re-using silicon base material of a metal insulator semiconductor (mis) inversion-layer solar cell Jan. 2, 1990
4849071 Method of forming a sealed diaphragm on a substrate Jul. 18, 1989
4820611 Titanium nitride as an antireflection coating on highly reflective layers for photolithography Apr. 11, 1989
4818712 Aluminum liftoff masking process and product Apr. 4, 1989
4737470 Method of making three dimensional structures of active and passive semiconductor components Apr. 12, 1988
4729965 Method of forming extrinsic base by diffusion from polysilicon/silicide source and emitter by lithography Mar. 8, 1988
4725566 Method of forming at least two metallizations of a semiconductor component, covered with a dielectric layer Feb. 16, 1988
4644637 Method of making an insulated-gate semiconductor device with improved shorting region Feb. 24, 1987
4626322 Photoelectrochemical preparation of a solid-state semiconductor photonic device Dec. 2, 1986

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