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Class Information
Number: 438/978
Name: Semiconductor device manufacturing: process > Forming tapered edges on substrate or adjacent layers
Description: Art collection involving the formation of nonperpendicular edges on the semiconductor substrate or layers residing thereupon.

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8633091 Chip package and fabrication method thereof Jan. 21, 2014
8481401 Component having a through-contact Jul. 9, 2013
8426325 Method for obtaining high-quality boundary for semiconductor devices fabricated on a partitioned substrate Apr. 23, 2013
8043973 Mask overhang reduction or elimination after substrate etch Oct. 25, 2011
8008209 Thermal gradient control of high aspect ratio etching and deposition processes Aug. 30, 2011
7843041 Thin-film circuit device having a low strength region, method for manufacturing the thin-film circuit device, and electronic apparatus Nov. 30, 2010
7838387 Method for manufacturing SOI wafer Nov. 23, 2010
7833806 Structure and method for fabricating cladded conductive lines in magnetic memories Nov. 16, 2010
7759259 Method of manufacturing semiconductor device Jul. 20, 2010
7741214 Method of forming a semiconductor device featuring copper wiring layers of different widths having metal capping layers of different thicknesses formed thereon Jun. 22, 2010
7727804 Method and apparatus for fabricating self-assembling microstructures Jun. 1, 2010
7670955 Semiconductor device and manufacturing method of the same Mar. 2, 2010
7632689 Methods for controlling the profile of a trench of a semiconductor structure Dec. 15, 2009
7550183 Method for manufacturing conductive element substrate, conductive element substrate, method for manufacturing liquid crystal display, liquid crystal display and electronic information equipmen Jun. 23, 2009
7550333 Nonplanar device with thinned lower body portion and method of fabrication Jun. 23, 2009
7537979 Method of manufacturing semiconductor device May. 26, 2009
7459364 Methods of forming self-aligned floating gates using multi-etching Dec. 2, 2008
7374983 Semiconductor device and manufacturing method thereof May. 20, 2008
7354856 Method for forming dual damascene structures with tapered via portions and improved performance Apr. 8, 2008
7351661 Semiconductor device having trench isolation layer and a method of forming the same Apr. 1, 2008
7303648 Via etch process Dec. 4, 2007
7291283 Combined wet etching method for stacked films and wet etching system used for same Nov. 6, 2007
7273824 Semiconductor structure and fabrication therefor Sep. 25, 2007
7238609 Method for fabricating semiconductor device Jul. 3, 2007
7229848 Method and apparatus for fabricating self-assembling microstructures Jun. 12, 2007
7211517 Semiconductor device and method that includes reverse tapering multiple layers May. 1, 2007
7183217 Dry-etching method Feb. 27, 2007
7101786 Method for forming a metal line in a semiconductor device Sep. 5, 2006
7071563 Barrier layer for interconnect structures of a semiconductor wafer and method for depositing the barrier layer Jul. 4, 2006
7052952 Method for forming wire line by damascene process using hard mask formed from contacts May. 30, 2006
7052956 Method for forming capacitor of semiconductor device May. 30, 2006
7018892 Semiconductor capacitor structure and method for manufacturing the same Mar. 28, 2006
6987054 Method of fabricating a semiconductor device having a groove formed in a resin layer Jan. 17, 2006
6969673 Semiconductor device with gate space of positive slope and fabrication method thereof Nov. 29, 2005
6953746 Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width Oct. 11, 2005
6949776 Heterojunction bipolar transistor with dielectric assisted planarized contacts and method for fabricating Sep. 27, 2005
6930376 Semiconductor device having a folded layer structure Aug. 16, 2005
6913705 Manufacturing method for optical integrated circuit having spatial reflection type structure Jul. 5, 2005
6908862 HDP-CVD dep/etch/dep process for improved deposition into high aspect ratio features Jun. 21, 2005
6872650 Ball electrode forming method Mar. 29, 2005
6858542 Semiconductor fabrication method for making small features Feb. 22, 2005
6852615 Ohmic contacts for high electron mobility transistors and a method of making the same Feb. 8, 2005
6852653 Method of manufacturing semiconductor substrate, semiconductor substrate, electro-optical apparatus and electronic equipment Feb. 8, 2005
6841472 Semiconductor device and method of fabricating the same Jan. 11, 2005
6774006 Microelectronic device fabricating method, and method of forming a pair of field effect transistor gate lines of different base widths from a common deposited conductive layer Aug. 10, 2004
6740569 Method of fabricating polysilicon film by excimer laser annealing process May. 25, 2004
6709924 Fabrication of shallow trench isolation structures with rounded corner and self-aligned gate Mar. 23, 2004
6689659 Method of making semiconductor memory device having a floating gate with a rounded edge Feb. 10, 2004
6680232 Trench etch with incremental oxygen flow Jan. 20, 2004
6656808 Transistor having variable width gate electrode and method of manufacturing the same Dec. 2, 2003

1 2 3 4 5 6

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