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Class Information
Number: 438/976
Name: Semiconductor device manufacturing: process > Temporary protective layer
Description: Art collection involving the temporary use of a protective layer.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8679280 Laser ablation of adhesive for integrated circuit fabrication Mar. 25, 2014
8679289 Method and apparatus for separating protective tape Mar. 25, 2014
8623721 Silicide formation and associated devices Jan. 7, 2014
8609515 Dicing die bonding film, semiconductor wafer, and semiconductor device Dec. 17, 2013
8561664 Die bonder, pickup method, and pickup device Oct. 22, 2013
8562750 Method and apparatus for processing bevel edge Oct. 22, 2013
8507363 Laser and plasma etch wafer dicing using water-soluble die attach film Aug. 13, 2013
8419895 Laser ablation for integrated circuit fabrication Apr. 16, 2013
8338198 Method of peeling thin film device and method of manufacturing semiconductor device using peeled thin film device Dec. 25, 2012
8334222 Semiconductor wafer processing method and apparatus Dec. 18, 2012
8309440 Method and apparatus for cleaning a substrate surface Nov. 13, 2012
8268687 Three-dimensional semiconductor memory device and method of fabricating the same Sep. 18, 2012
8192578 Chip pickup apparatus, chip pickup method, chip releasing device and chip releasing method Jun. 5, 2012
8172968 Method and system for contacting of a flexible sheet and a substrate May. 8, 2012
8158519 Method of manufacturing non-volatile memory cell using self-aligned metal silicide Apr. 17, 2012
8053337 Method of manufacturing semiconductor device Nov. 8, 2011
8048614 Semiconductor integrated circuit device fabrication method Nov. 1, 2011
8017466 Semiconductor device and manufacturing method for the same Sep. 13, 2011
8008166 Method and apparatus for cleaning a substrate surface Aug. 30, 2011
7981246 Method and device for detaching a component which is attached to a flexible film Jul. 19, 2011
7883989 Method for manufacturing semiconductor device Feb. 8, 2011
7846288 Methods and systems for removing protective films from microfeature workpieces Dec. 7, 2010
7820006 Die pickup apparatus for picking up semiconductor dies and methods for picking up semiconductor dies Oct. 26, 2010
7771560 Methods to prevent ECC (edge chipping and cracking) damage during die picking process Aug. 10, 2010
7763145 System for removal of an integrated circuit from a mount material Jul. 27, 2010
7757742 Vibration-induced die detachment system Jul. 20, 2010
7736921 Method for manufacturing electroluminescent element Jun. 15, 2010
7698806 Process for fabricating a slider or head for a data storage device Apr. 20, 2010
7644747 Rectangular substrate dividing apparatus Jan. 12, 2010
7642152 Method of fabricating spacers and cleaning method of post-etching and semiconductor device Jan. 5, 2010
7641760 Method of thermal adherend release and apparatus for thermal adherend release Jan. 5, 2010
7632374 Method and apparatus for picking up semiconductor chip and suction and exfoliation tool used therefor Dec. 15, 2009
7622361 Method for manufacturing semiconductor device Nov. 24, 2009
7614137 Method of manufacturing a magnetic slider head Nov. 10, 2009
7569118 Method for dicing wafer and process for manufacturing liquid-discharging head using the dicing method Aug. 4, 2009
7540077 Method for bonding slider row bars for photolithography process Jun. 2, 2009
7521384 Method and apparatus for peeling surface protective film Apr. 21, 2009
7497920 Method of manufacturing semiconductor device Mar. 3, 2009
7490650 Workpiece processing device Feb. 17, 2009
7455332 Method for controlling overcoat recession in a magnetic thin film head Nov. 25, 2008
7445688 Method and apparatus for picking up work piece and mounting machine Nov. 4, 2008
7390742 Method for producing a rewiring printed circuit board Jun. 24, 2008
7374584 Interconnects forming method and interconnects forming apparatus May. 20, 2008
7371591 Process for manufacturing liquid ejection head May. 13, 2008
7335605 Protective tape applying and separating method Feb. 26, 2008
7306695 Apparatus and method for picking up semiconductor chip Dec. 11, 2007
7303647 Driving mechanism for chip detachment apparatus Dec. 4, 2007
7297412 Fabrication of stacked microelectronic devices Nov. 20, 2007
7282417 Ion doping method to form source and drain Oct. 16, 2007
7264979 Method of manufacturing light emitting device Sep. 4, 2007

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