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Class Information
Number: 438/975
Name: Semiconductor device manufacturing: process > Substrate or mask aligning feature
Description: Art collection involving the lining up of a mask or regions to be formed with structural features (e.g., indicia, marks, etc.) of the substrate.










Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
8647968 Method for producing a semiconductor layer Feb. 11, 2014
8637363 Methods of manufacturing a semiconductor device having a node array Jan. 28, 2014
8609441 Substrate comprising a mark Dec. 17, 2013
8592107 Method and apparatus of providing overlay Nov. 26, 2013
8592287 Overlay alignment mark and method of detecting overlay alignment error using the mark Nov. 26, 2013
8580581 Substrate for electronic device, stack for electronic device, electronice device, and method for manufacturing the same Nov. 12, 2013
8491799 Method for forming magnetic tunnel junction cell Jul. 23, 2013
8463419 System and method for improved automated semiconductor wafer manufacturing Jun. 11, 2013
8440472 Stacking apparatus and method for stacking integrated circuit elements May. 14, 2013
8440569 Method of eliminating a lithography operation May. 14, 2013
8420411 Method for aligning wafer stack Apr. 16, 2013
8377800 Alignment marks for polarized light lithography and method for use thereof Feb. 19, 2013
8361683 Multi-layer chip overlay target and measurement Jan. 29, 2013
8357935 Electronic component having an authentication pattern Jan. 22, 2013
8348503 System for active array temperature sensing and cooling Jan. 8, 2013
8344376 Apparatus and method for predetermined component placement to a target platform Jan. 1, 2013
8329360 Method and apparatus of providing overlay Dec. 11, 2012
8324742 Alignment mark for opaque layer Dec. 4, 2012
8310069 Semiconductor package having marking layer Nov. 13, 2012
8283256 Methods of forming microdevice substrates using double-sided alignment techniques Oct. 9, 2012
8274165 Semiconductor substrate, laminated chip package, semiconductor plate and method of manufacturing the same Sep. 25, 2012
8268696 Alignment mark for opaque layer Sep. 18, 2012
8268647 Method of manufacturing an ink jet print head Sep. 18, 2012
8247306 Solid-state image pickup device and a method of manufacturing the same Aug. 21, 2012
8227927 Chip package and fabrication method thereof Jul. 24, 2012
8183129 Alignment marks for polarized light lithography and method for use thereof May. 22, 2012
8129201 Stacking apparatus and method for stacking integrated circuit elements Mar. 6, 2012
8117741 Method for manufacturing a radiation imaging panel comprising imaging tiles Feb. 21, 2012
8119493 Method of forming a semiconductor device an alignment mark formed in a groove Feb. 21, 2012
8076214 Display substrate and method of manufacturing the same Dec. 13, 2011
8048614 Semiconductor integrated circuit device fabrication method Nov. 1, 2011
8043927 Method of manufacturing a CMOS image sensor Oct. 25, 2011
7998759 Maunfacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server Aug. 16, 2011
7998827 Method of forming a multi-level interconnect structure by overlay alignment procedures Aug. 16, 2011
7989967 High-contrast laser mark on substrate surfaces Aug. 2, 2011
7989968 Method and apparatus for measurement and control of photomask to substrate alignment Aug. 2, 2011
7960244 Process for the aligned manufacture of electronic semiconductor devices in a SOI substrate Jun. 14, 2011
7955946 Methods of determining x-y spatial orientation of a semiconductor substrate comprising an integrated circuit, methods of positioning a semiconductor substrate comprising an integrated circuit, Jun. 7, 2011
7943478 Semiconductor device manufacturing method May. 17, 2011
7915141 Deterministic generation of an integrated circuit identification number Mar. 29, 2011
7883985 Chip and multi-chip semiconductor device using the chip, and method for manufacturing same Feb. 8, 2011
7879515 Method to control semiconductor device overlay using post etch image metrology Feb. 1, 2011
7871908 Method of manufacturing semiconductor device Jan. 18, 2011
7862859 Method of correcting for pattern run out Jan. 4, 2011
7833829 MEMS devices and methods of assembling micro electromechanical systems (MEMS) Nov. 16, 2010
7825000 Method for integration of magnetic random access memories with improved lithographic alignment to magnetic tunnel junctions Nov. 2, 2010
7825001 Electronic device, method for manufacturing the same, and silicon substrate for electronic device Nov. 2, 2010
7807544 Solar cell fabrication using extrusion mask Oct. 5, 2010
7785981 Solid-state imaging device and method of manufacturing solid-state imaging device Aug. 31, 2010
7759808 Semiconductor substrate including first and second recognition marks and method for manufacturing semiconductor device Jul. 20, 2010

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