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Class Information
Number: 438/973
Name: Semiconductor device manufacturing: process > Substrate orientation
Description: Art collection involving the use of a substrate of specified or nonstandard orientation.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8541869 Cleaved facet (Ga,Al,In)N edge-emitting laser diodes grown on semipolar bulk gallium nitride substrates Sep. 24, 2013
8378463 Orientation of electronic devices on mis-cut substrates Feb. 19, 2013
8278672 Semiconductor light-emitting device and fabrication method thereof Oct. 2, 2012
8236636 Hybrid orientation semiconductor structure with reduced boundary defects and method of forming same Aug. 7, 2012
8198108 Semiconductor device and method for manufacturing the same Jun. 12, 2012
8172968 Method and system for contacting of a flexible sheet and a substrate May. 8, 2012
8138035 Method for forming integrated circuits with aligned (100) NMOS and (110) PMOS FinFET sidewall channels Mar. 20, 2012
8076214 Display substrate and method of manufacturing the same Dec. 13, 2011
7910462 Growing [110] silicon on [001] oriented substrate with rare-earth oxide buffer film Mar. 22, 2011
7884447 Laser diode orientation on mis-cut substrates Feb. 8, 2011
7833854 Structure and method of fabricating a hybrid substrate for high-performance hybrid-orientation silicon-on-insulator CMOS devices Nov. 16, 2010
7816238 GaN substrate, substrate with epitaxial layer, semiconductor device, and method of manufacturing GaN substrate Oct. 19, 2010
7755172 Opto-electronic and electronic devices using N-face or M-plane GaN substrate prepared with ammonothermal growth Jul. 13, 2010
7605447 Highly manufacturable SRAM cells in substrates with hybrid crystal orientation Oct. 20, 2009
7589032 Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment Sep. 15, 2009
7524708 Fabrication method of a high brightness light emitting diode with a bidirectionally angled substrate Apr. 28, 2009
7425483 Structure and method of fabricating a hybrid substrate for high-performance hybrid-orientation silicon-on-insulator CMOS devices Sep. 16, 2008
7354523 Methods for sidewall etching and etching during filling of a trench Apr. 8, 2008
7285452 Method to selectively form regions having differing properties and structure Oct. 23, 2007
7279751 Semiconductor laser device and manufacturing method thereof Oct. 9, 2007
7241708 Laser irradiation method that includes moving a center of rotation along a straight line in order to enhance the crystallinity of the semiconductor film Jul. 10, 2007
7084051 Manufacturing method for semiconductor substrate and manufacturing method for semiconductor device Aug. 1, 2006
6887734 Method of manufacturing semiconductor pressure sensor May. 3, 2005
6822262 Semiconductor thin film and semiconductor device Nov. 23, 2004
6803264 Method of fabricating a semiconductor device Oct. 12, 2004
6740542 Method for producing micromachined devices and devices obtained thereof May. 25, 2004
6720632 Semiconductor device having diffusion layer formed using dopant of large mass number Apr. 13, 2004
6608328 Semiconductor light emitting diode on a misoriented substrate Aug. 19, 2003
6537895 Method of forming shallow trench isolation in a silicon wafer Mar. 25, 2003
6514836 Methods of producing strained microelectronic and/or optical integrated and discrete devices Feb. 4, 2003
6495886 Semiconductor thin film and semiconductor device Dec. 17, 2002
6455397 Method of producing strained microelectronic and/or optical integrated and discrete devices Sep. 24, 2002
6409463 Apparatuses and methods for adjusting a substrate centering system Jun. 25, 2002
6358867 Orientation independent oxidation of silicon Mar. 19, 2002
6335231 Method of fabricating a high reliable SOI substrate Jan. 1, 2002
6307214 Semiconductor thin film and semiconductor device Oct. 23, 2001
6245615 Method and apparatus on (110) surfaces of silicon structures with conduction in the <110> direction Jun. 12, 2001
6177285 Process for determining the crystal orientation in a wafer Jan. 23, 2001
6174788 Partial semiconductor wafer processing with multiple cuts of random sizes Jan. 16, 2001
6156625 Partial semiconductor wafer processing using wafermap display Dec. 5, 2000
6083830 Process for manufacturing a semiconductor device Jul. 4, 2000
6080599 Semiconductor optoelectric device and method of manufacturing the same Jun. 27, 2000
6001666 Manufacturing process of strain gauge sensor using the piezoresistive effect Dec. 14, 1999
5976954 Method and apparatus for cleaning and separating wafers bonded to a fixing member Nov. 2, 1999
5970330 Method of making field effect transistor with higher mobility Oct. 19, 1999
5956568 Methods of fabricating and contacting ultra-small semiconductor devices Sep. 21, 1999
5945690 Compound semiconductor device Aug. 31, 1999
5923054 Light emitting diode with tilted plane orientation Jul. 13, 1999
5888838 Method and apparatus for preventing chip breakage during semiconductor manufacturing using wafer grinding striation information Mar. 30, 1999
5883012 Method of etching a trench into a semiconductor substrate Mar. 16, 1999

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