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Class Information
Number: 438/967
Name: Semiconductor device manufacturing: process > Semiconductor on specified insulator
Description: Art collection involving a semiconductor layer formed upon a specified insulative sublayer or substrate.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8383491 Method for manufacturing semiconductor substrate Feb. 26, 2013
8338270 Method for manufacturing SOI substrate and semiconductor device Dec. 25, 2012
8293626 Method for manufacturing semiconductor device Oct. 23, 2012
7888235 Fabrication of substrates with a useful layer of monocrystalline semiconductor material Feb. 15, 2011
7799589 Optical waveguide apparatus and method for manufacturing the same Sep. 21, 2010
7749870 Method for producing SOI substrate Jul. 6, 2010
7732867 Method for manufacturing SOQ substrate Jun. 8, 2010
7348226 Method of forming lattice-matched structure on silicon and structure formed thereby Mar. 25, 2008
7294536 Process for manufacturing an SOI wafer by annealing and oxidation of buried channels Nov. 13, 2007
7265029 Fabrication of substrates with a useful layer of monocrystalline semiconductor material Sep. 4, 2007
7253081 Surface finishing of SOI substrates using an EPI process Aug. 7, 2007
7185417 Method for shaping an air bearing surface of a magnetic head slider Mar. 6, 2007
7172930 Strained silicon-on-insulator by anodization of a buried p+ silicon germanium layer Feb. 6, 2007
7109130 Zeolite films for low k applications Sep. 19, 2006
7067400 Method for preventing sidewall consumption during oxidation of SGOI islands Jun. 27, 2006
7018912 Fabrication method of nitride semiconductors and nitride semiconductor structure fabricated thereby Mar. 28, 2006
6946369 Method for forming, by CVD, nanostructures of semi-conductor material of homogenous and controlled size on dielectric material Sep. 20, 2005
6911376 Selective heating using flash anneal Jun. 28, 2005
6865798 Method for shaping air bearing surface of magnetic head slider Mar. 15, 2005
6743651 Method of forming a SiGe-on-insulator substrate using separation by implantation of oxygen Jun. 1, 2004
6558994 Dual silicon-on-insulator device wafer die May. 6, 2003
6498371 Body-tied-to-body SOI CMOS inverter circuit Dec. 24, 2002
6429099 Implementing contacts for bodies of semiconductor-on-insulator transistors Aug. 6, 2002
6417075 Method for producing thin substrate layers Jul. 9, 2002
6403447 Reduced substrate capacitance high performance SOI process Jun. 11, 2002
6403388 Nanomachining method for integrated circuits Jun. 11, 2002
6383924 Method of forming buried conductor patterns by surface transformation of empty spaces in solid state materials May. 7, 2002
6287941 Surface finishing of SOI substrates using an EPI process Sep. 11, 2001
6235611 Method for making silicon-on-sapphire transducers May. 22, 2001
6150197 Method of fabricating heterolithic microwave integrated circuits Nov. 21, 2000
6136666 Method for fabricating silicon-on-insulator wafer Oct. 24, 2000
6127244 Method of manufacturing semiconductor device Oct. 3, 2000
6100106 Fabrication of nitride semiconductor light-emitting device Aug. 8, 2000
6033490 Growth of GaN layers on quartz substrates Mar. 7, 2000
5985687 Method for making cleaved facets for lasers fabricated with gallium nitride and other noncubic materials Nov. 16, 1999
5985728 Silicon on insulator process with recovery of a device layer from an etch stop layer Nov. 16, 1999
5932048 Method of fabricating direct-bonded semiconductor wafers Aug. 3, 1999
5879960 Manufacturing method of thin film diode for liquid crystal display device Mar. 9, 1999
5879970 Process of growing polycrystalline silicon-germanium alloy having large silicon content Mar. 9, 1999
5840593 Membrane dielectric isolation IC fabrication Nov. 24, 1998
5776803 Manufacture of electronic devices comprising thin-film circuitry on a polymer substrate Jul. 7, 1998
5741724 Method of growing gallium nitride on a spinel substrate Apr. 21, 1998
5736439 Method for forming a semiconductor device in which the insulating layer is heated to contract after crystallization of the semiconductor layer Apr. 7, 1998
5733641 Buffered substrate for semiconductor devices Mar. 31, 1998
5686320 Method for forming semiconductor layer of thin film transistor by using temperature difference Nov. 11, 1997
5686350 Method for fabricating defect-free compound semiconductor thin film on dielectric thin film Nov. 11, 1997
5596205 High-frequency wireless communication system on a single ultrathin silicon on sapphire chip Jan. 21, 1997
5573967 Method for making dynamic random access memory with fin-type stacked capacitor Nov. 12, 1996
5569538 Semiconductor-on-insulator structure and method for producing same Oct. 29, 1996
5559042 Method of fabricating a thin film semiconductor device using an insulating film which contracts when thermally treated Sep. 24, 1996

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