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Class Information
Number: 438/960
Name: Semiconductor device manufacturing: process > Porous semiconductor
Description: Art collection involving the processing of the porous semiconductor region of the substrate.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8530256 Production process for semiconductor device Sep. 10, 2013
8530336 Method for manufacturing semiconductor substrate Sep. 10, 2013
8512581 Methods for liquid transfer coating of three-dimensional substrates Aug. 20, 2013
8436303 Transmission electron microscope micro-grid May. 7, 2013
8294098 Transmission electron microscope micro-grid Oct. 23, 2012
8288723 Transmission electron microscope micro-grid and method for making the same Oct. 16, 2012
8241991 Method for forming interconnect structure having airgap Aug. 14, 2012
8207431 Transmission electron microscope micro-grid and method for manufacturing the same Jun. 26, 2012
8163589 Active layer for solar cell and the manufacturing method making the same Apr. 24, 2012
8129269 Method of improving mechanical properties of semiconductor interconnects with nanoparticles Mar. 6, 2012
8119438 Method of manufacturing solar cell Feb. 21, 2012
8043909 Porous semiconductive film and process for its production Oct. 25, 2011
8003551 Surface-activation of semiconductor nanostructures for biological applications Aug. 23, 2011
7892970 Alternative methods for fabrication of substrates and heterostructures made of silicon compounds and alloys Feb. 22, 2011
7829362 Field-effect transistor, sensor using it, and production method thereof Nov. 9, 2010
7776307 Concentric gate nanotube transistor devices Aug. 17, 2010
7745302 Method for making transmission electron microscope grid Jun. 29, 2010
7718469 Alternative methods for fabrication of substrates and heterostructures made of silicon compounds and alloys May. 18, 2010
7662706 Nanostructures formed of branched nanowhiskers and methods of producing the same Feb. 16, 2010
7663225 Method for manufacturing electronic components, mother substrate, and electronic component Feb. 16, 2010
7659178 Semiconductor device structures with reduced junction capacitance and drain induced barrier lowering and methods for fabricating such device structures and for fabricating a semiconductor-on-i Feb. 9, 2010
7629224 VLSI fabrication processes for introducing pores into dielectric materials Dec. 8, 2009
7607213 Method of making a device for measuring deformation Oct. 27, 2009
7588995 Method to create damage-free porous low-k dielectric films and structures resulting therefrom Sep. 15, 2009
7531423 Reduced-resistance finFETs by sidewall silicidation and methods of manufacturing the same May. 12, 2009
7531429 Methods and apparatuses for manufacturing ultra thin device layers for integrated circuit devices May. 12, 2009
7432218 Method for producing porous body Oct. 7, 2008
7335575 Semiconductor constructions and semiconductor device fabrication methods Feb. 26, 2008
7309620 Use of sacrificial layers in the manufacture of high performance systems on tailored substrates Dec. 18, 2007
7300854 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method Nov. 27, 2007
7279404 Process for fabricating strained layers of silicon or of a silicon/germanium alloy Oct. 9, 2007
7265064 Semiconductor device with porous interlayer insulating film Sep. 4, 2007
7112615 Porous material formation by chemical vapor deposition onto colloidal crystal templates Sep. 26, 2006
7091108 Methods and apparatuses for manufacturing ultra thin device layers for integrated circuit devices Aug. 15, 2006
7060587 Method for forming macropores in a layer and products obtained thereof Jun. 13, 2006
7052976 Method and apparatus for cutting devices from conductive substrates secured during cutting by vacuum pressure May. 30, 2006
7005380 Simultaneous formation of device and backside contacts on wafers having a buried insulator layer Feb. 28, 2006
6982224 Method for forming metal wires in semiconductor device Jan. 3, 2006
6962855 Method of forming a porous material layer in a semiconductor device Nov. 8, 2005
6939782 Method for producing thin layers on a specific support and an application thereof Sep. 6, 2005
6939728 Method of fabricating silicon emitter with a low porosity heavily doped contact layer Sep. 6, 2005
6896955 Ionic additives for extreme low dielectric constant chemical formulations May. 24, 2005
6881644 Smoothing method for cleaved films made using a release layer Apr. 19, 2005
6878611 Patterned strained silicon for high performance circuits Apr. 12, 2005
6875633 Process for production of SOI substrate and process for production of semiconductor device Apr. 5, 2005
6852648 Semiconductor device having a low dielectric constant dielectric material and process for its manufacture Feb. 8, 2005
6828253 Enhancement, stabilization and metallization of porous silicon Dec. 7, 2004
6812163 Semiconductor device with porous interlayer insulating film Nov. 2, 2004
6806171 Method of producing a thin layer of crystalline material Oct. 19, 2004
6806161 Process for preparing insulating material having low dielectric constant Oct. 19, 2004

1 2 3 4

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