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Class Information
Number: 438/958
Name: Semiconductor device manufacturing: process > Passivation layer
Description: Art collection involving protecting the semiconductor substrate surface with a passivating coating.

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8664115 Copper interconnect with metal hardmask removal Mar. 4, 2014
8562750 Method and apparatus for processing bevel edge Oct. 22, 2013
8524591 Maintaining integrity of a high-K gate stack by passivation using an oxygen plasma Sep. 3, 2013
8501626 Methods for high temperature etching a high-K material gate structure Aug. 6, 2013
8482106 Method for producing ceramic passivation layers on silicon for solar cell manufacture Jul. 9, 2013
8455372 Method for cleaning and passivating gallium arsenide surface autologous oxide and depositing AL203 dielectric Jun. 4, 2013
8324003 Method for manufacturing a thin film transistor array panel Dec. 4, 2012
8273669 Method of forming a passivated densified nanoparticle thin film on a substrate Sep. 25, 2012
8193030 Methods of fabricating non-volatile memory devices having carbon nanotube layer and passivation layer Jun. 5, 2012
8183135 Method for manufacturing thin film transistor having hydrogen feeding layer formed between a metal gate and a gate insulating film May. 22, 2012
8062931 Surface treatment and passivation of AlGaN/GaN HEMT Nov. 22, 2011
7972954 Porous silicon dielectric Jul. 5, 2011
7955992 Method of passivating and encapsulating CdTe and CZT segmented detectors Jun. 7, 2011
7902038 Detachable substrate with controlled mechanical strength and method of producing same Mar. 8, 2011
7872333 Layer system comprising a silicon layer and a passivation layer, method for production a passivation layer on a silicon layer and the use of said system and method Jan. 18, 2011
7838354 Method for patterning contact etch stop layers by using a planarization process Nov. 23, 2010
7829450 Method of processing a contact pad, method of manufacturing a contact pad, and integrated circuit element Nov. 9, 2010
7816193 Method for fabricating a pixel structure of a liquid crystal display Oct. 19, 2010
7687320 Manufacturing method for packaged semiconductor device Mar. 30, 2010
7648857 Process for precision placement of integrated circuit overcoat material Jan. 19, 2010
7598176 Method for photoresist stripping and treatment of low-k dielectric material Oct. 6, 2009
7563629 Method of fabricating vertical structure LEDs Jul. 21, 2009
7550394 Semiconductor device and fabrication process thereof Jun. 23, 2009
7470993 Semiconductor component with passivation layer Dec. 30, 2008
7459405 Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill Dec. 2, 2008
7456084 Method of using a setter having a recess in manufacturing a net-shape semiconductor wafer Nov. 25, 2008
7279351 Method of passivating semiconductor device Oct. 9, 2007
7262131 Dielectric barrier layer films Aug. 28, 2007
7208425 Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill Apr. 24, 2007
7172960 Multi-layer film stack for extinction of substrate reflections during patterning Feb. 6, 2007
7122418 Method of fabricating organic light emitting diode device Oct. 17, 2006
7112545 Passivation of material using ultra-fast pulsed laser Sep. 26, 2006
7112478 Insulated gate field effect transistor having passivated Schottky barriers to the channel Sep. 26, 2006
7075187 Coating material over electrodes to support organic synthesis Jul. 11, 2006
7045376 Method of passivating semiconductor device May. 16, 2006
7041574 Composite intermetal dielectric structure including low-k dielectric material May. 9, 2006
7037859 Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill May. 2, 2006
6972227 Semiconductor processing methods, and methods of forming a dynamic random access memory (DRAM) storage capacitor Dec. 6, 2005
6946404 Method for passivating a semiconductor substrate Sep. 20, 2005
6943125 Method for manufacturing semiconductor device Sep. 13, 2005
6939792 Low-k dielectric layer with overlying adhesion layer Sep. 6, 2005
6916737 Methods of manufacturing a semiconductor device Jul. 12, 2005
6913946 Method of making an ultimate low dielectric device Jul. 5, 2005
6905956 Multi-layer dielectric and method of forming same Jun. 14, 2005
6887773 Methods of incorporating germanium within CMOS process May. 3, 2005
6878567 Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates Apr. 12, 2005
6875681 Wafer passivation structure and method of fabrication Apr. 5, 2005
6872617 Semiconductor device manufacturing method Mar. 29, 2005
6803327 Cost effective polymide process to solve passivation extrusion or damage and SOG delminates Oct. 12, 2004
6794279 Passivating inorganic bottom anti-reflective coating (BARC) using rapid thermal anneal (RTA) with oxidizing gas Sep. 21, 2004

1 2 3 4 5 6

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