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Class Information
Number: 438/957
Name: Semiconductor device manufacturing: process > Making metal-insulator-metal device
Description: Art collection involving the construction of a metal-insulator-metal device (e.g., MOMOM, etc.).


Patents under this class:
1 2

Patent Number Title Of Patent Date Issued
7598137 Method for manufacturing semiconductor device including MIM capacitor Oct. 6, 2009
7564116 Printed circuit board with embedded capacitors therein and manufacturing process thereof Jul. 21, 2009
7563672 Methods of fabricating integrated circuit devices including metal-insulator-metal capacitors Jul. 21, 2009
7553738 Method of fabricating a microelectronic device including embedded thin film capacitor by over-etching thin film capacitor bottom electrode and microelectronic device made according to the meth Jun. 30, 2009
7473979 Semiconductor integrated circuit devices having high-Q wafer back-side capacitors Jan. 6, 2009
7462535 Semiconductor device with analog capacitor and method of fabricating the same Dec. 9, 2008
7442626 Rectangular contact used as a low voltage fuse element Oct. 28, 2008
7439199 Capacitive element, method of manufacture of the same, and semiconductor device Oct. 21, 2008
7407897 Capacitor of analog semiconductor device having multi-layer dielectric film and method of manufacturing the same Aug. 5, 2008
7378719 Low leakage MIM capacitor May. 27, 2008
7332401 Method of fabricating an electrode structure for use in an integrated circuit Feb. 19, 2008
7332439 Metal gate transistors with epitaxial source and drain regions Feb. 19, 2008
7329955 Metal-insulator-metal (MIM) capacitor Feb. 12, 2008
7321495 Capacitor and method for manufacturing the same Jan. 22, 2008
7317221 High density MIM capacitor structure and fabrication process Jan. 8, 2008
7312514 High-permittivity insulation film, thin film capacity element, thin film multilayer capacitor, and production method of thin film capacity element Dec. 25, 2007
7279382 Methods of manufacturing semiconductor devices having capacitors Oct. 9, 2007
7244656 Thin film circuit board device and method for manufacturing the same Jul. 17, 2007
7232736 Semiconductor devices with capacitors of metal/insulator/metal structure and methods for forming the same Jun. 19, 2007
7205634 MIM structure and fabrication process with improved capacitance reliability Apr. 17, 2007
7183649 Methods and procedures for engineering of composite conductive films by atomic layer deposition Feb. 27, 2007
7176064 Memory cell comprising a semiconductor junction diode crystallized adjacent to a silicide Feb. 13, 2007
7176052 Capacitor, circuit board, method of formation of capacitor, and method of production of circuit board Feb. 13, 2007
7151036 Precision high-frequency capacitor formed on semiconductor substrate Dec. 19, 2006
7135758 Surface mount solder method and apparatus for decoupling capacitance and process of making Nov. 14, 2006
7098083 High impedance antifuse Aug. 29, 2006
7081659 Semiconductor apparatus having a built-in electric coil and a method of making the semiconductor apparatus Jul. 25, 2006
7060556 Drain extended MOS transistors with multiple capacitors and methods of fabrication Jun. 13, 2006
7005377 Bimetal layer manufacturing method Feb. 28, 2006
6995071 Methods of forming MIM type capacitor structures using low temperature plasma processing Feb. 7, 2006
6967115 Device transfer techniques for thin film optoelectronic devices Nov. 22, 2005
6964908 Metal-insulator-metal capacitor and method of fabricating same Nov. 15, 2005
6933205 Integrated circuit device and method of manufacturing the same Aug. 23, 2005
6927474 Method of programming an antifuse Aug. 9, 2005
6911363 Semiconductor device and manufacturing method thereof Jun. 28, 2005
6897105 Method of forming metal oxide gate structures and capacitor electrodes May. 24, 2005
6887716 Process for producing high quality PZT films for ferroelectric memory integrated circuits May. 3, 2005
6818498 Capacitance element and method of manufacturing the same Nov. 16, 2004
6809398 Metal-to-metal antifuse structure and fabrication method Oct. 26, 2004
6800920 RF passive circuit and RF amplifier with via-holes Oct. 5, 2004
6787412 Dielectric element and method for fabricating the same Sep. 7, 2004
6777270 Resistive memory for data storage devices Aug. 17, 2004
6774459 Capacitor layout technique for reduction of fixed pattern noise in a CMOS sensor Aug. 10, 2004
6762108 Method of forming a metal-insulator-metal capacitor for dual damascene interconnect processing and the device so formed Jul. 13, 2004
6753590 High impedance antifuse Jun. 22, 2004
6750114 One-mask metal-insulator-metal capacitor and method for forming same Jun. 15, 2004
6677220 Antifuse structure and method of making Jan. 13, 2004
6674131 Semiconductor power device for high-temperature applications Jan. 6, 2004
6639299 Semiconductor device having a chip size package including a passive element Oct. 28, 2003
6624462 Dielectric film and method of fabricating the same Sep. 23, 2003

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