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Class Information
Number: 438/954
Name: Semiconductor device manufacturing: process > Making oxide-nitride-oxide device
Description: Art collection involving construction of a device having a layered dielectric structure composed of a nitride layer interposed between outer oxide layers.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618853 |
Field effect transistors with dielectric source drain halo regions and reduced miller capacitance |
Nov. 17, 2009 |
| 7611948 |
Methods of forming non-volatile memory device |
Nov. 3, 2009 |
| 7592232 |
Method for manufacturing semiconductor device |
Sep. 22, 2009 |
| 7566660 |
Semiconductor device and method for manufacturing the same |
Jul. 28, 2009 |
| 7560386 |
Method of manufacturing nonvolatile semiconductor memory device |
Jul. 14, 2009 |
| 7538385 |
Memory device and fabrication method thereof |
May. 26, 2009 |
| 7528038 |
Non-volatile two-transistor semiconductor memory cell and method for producing the same |
May. 5, 2009 |
| 7510935 |
Method of manufacturing a charge-trapping dielectric and method of manufacturing a sonos-type non-volatile semiconductor device |
Mar. 31, 2009 |
| 7482236 |
Structure and method for a sidewall SONOS memory device |
Jan. 27, 2009 |
| 7482623 |
Organic semiconductor film and organic semiconductor device |
Jan. 27, 2009 |
| 7452775 |
Non-volatile memory device and manufacturing method and operating method thereof |
Nov. 18, 2008 |
| 7405119 |
Structure and method for a sidewall SONOS memory device |
Jul. 29, 2008 |
| 7374635 |
Forming method and forming system for insulation film |
May. 20, 2008 |
| 7338850 |
Method for manufacturing device isolation film of semiconductor device |
Mar. 4, 2008 |
| 7323384 |
Method of manufacturing semiconductor device |
Jan. 29, 2008 |
| 7303959 |
Bottom-gate SONOS-type cell having a silicide gate |
Dec. 4, 2007 |
| 7288452 |
Method for manufacturing semiconductor device |
Oct. 30, 2007 |
| 7262103 |
Method for forming a salicide in semiconductor device |
Aug. 28, 2007 |
| 7250337 |
Method for fabricating a nonvolatile sonos memory device |
Jul. 31, 2007 |
| 7223658 |
Flash memory structure and method for fabricating the same |
May. 29, 2007 |
| 7223659 |
Memory device and fabrication method thereof |
May. 29, 2007 |
| 7205186 |
System and method for suppressing oxide formation |
Apr. 17, 2007 |
| 7202128 |
Method of forming a memory device having improved erase speed |
Apr. 10, 2007 |
| 7199007 |
Non-volatile memory device having a nitride barrier to reduce the fast erase effect |
Apr. 3, 2007 |
| 7192894 |
High performance CMOS transistors using PMD liner stress |
Mar. 20, 2007 |
| 7183143 |
Method for forming nitrided tunnel oxide layer |
Feb. 27, 2007 |
| 7183158 |
Method of fabricating a non-volatile memory |
Feb. 27, 2007 |
| 7179709 |
Method of fabricating non-volatile memory device having local SONOS gate structure |
Feb. 20, 2007 |
| 7172940 |
Method of fabricating an embedded non-volatile memory device |
Feb. 6, 2007 |
| 7166185 |
Forming system for insulation film |
Jan. 23, 2007 |
| 7163860 |
Method of formation of gate stack spacer and charge storage materials having reduced hydrogen content in charge trapping dielectric flash memory device |
Jan. 16, 2007 |
| 7154142 |
Non-volatile memory device and manufacturing method and operating method thereof |
Dec. 26, 2006 |
| 7144774 |
Method of fabricating non-volatile memory |
Dec. 5, 2006 |
| 7118967 |
Protection of charge trapping dielectric flash memory devices from UV-induced charging in BEOL processing |
Oct. 10, 2006 |
| 7109084 |
Flash memory device and method for fabricating the same |
Sep. 19, 2006 |
| 7102192 |
Semiconductor nonvolatile memory cell array |
Sep. 5, 2006 |
| 7098107 |
Protective layer in memory device and method therefor |
Aug. 29, 2006 |
| 7098147 |
Semiconductor memory device and method for manufacturing semiconductor device |
Aug. 29, 2006 |
| 7091551 |
Four-bit FinFET NVRAM memory device |
Aug. 15, 2006 |
| 7091088 |
UV-blocking etch stop layer for reducing UV-induced charging of charge storage layer in memory devices in BEOL processing |
Aug. 15, 2006 |
| 7087487 |
Method for fabricating nonvolatile memory device and method for fabricating semiconductor device |
Aug. 8, 2006 |
| 7084454 |
Nonvolatile integrated semiconductor memory |
Aug. 1, 2006 |
| 7074677 |
Memory with improved charge-trapping dielectric layer |
Jul. 11, 2006 |
| 7067434 |
Hydrogen free integration of high-k gate dielectrics |
Jun. 27, 2006 |
| 7060594 |
Memory device and method of manufacturing including deuterated oxynitride charge trapping structure |
Jun. 13, 2006 |
| 7060563 |
Local SONOS-type structure having two-piece gate and self-aligned ONO and method for manufacturing the same |
Jun. 13, 2006 |
| 7053446 |
Memory wordline spacer |
May. 30, 2006 |
| 7049195 |
Methods of fabricating non-volatile memory devices |
May. 23, 2006 |
| 7033957 |
ONO fabrication process for increasing oxygen content at bottom oxide-substrate interface in flash memory devices |
Apr. 25, 2006 |
| 7033890 |
ONO formation method |
Apr. 25, 2006 |
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