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Class Information
Number: 438/951
Name: Semiconductor device manufacturing: process > Masking > Radiation resist > Lift-off
Description: Art collection under 948 involving the selective removal of a deposited layer by striping off the radiation resist and portions of the deposited layer residing thereupon.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8652965 Production method for thick film metal electrode and production method for thick film resist Feb. 18, 2014
8557682 Multi-layer mask for substrate dicing by laser and plasma etch Oct. 15, 2013
8349737 Manufacturing method of array substrate using lift-off method Jan. 8, 2013
8178376 Method for fabricating LED chip comprising reduced mask count and lift-off processing May. 15, 2012
8173468 Method for fabricating LED chip comprising reduced mask count and lift-off processing May. 8, 2012
8173467 Method for fabricating LED chip comprising reduced mask count and lift-off processing May. 8, 2012
8173466 Method for fabricating LED chip comprising reduced mask count and lift-off processing May. 8, 2012
8173465 Method for fabricating LED chip comprising reduced mask count and lift-off processing May. 8, 2012
8143148 Self-aligned multi-dielectric-layer lift off process for laser diode stripes Mar. 27, 2012
8124523 Fabrication method of a semiconductor device and a semiconductor device Feb. 28, 2012
7981817 Method for manufacturing semiconductor device using multiple ion implantation masks Jul. 19, 2011
7927901 Method for fabricating LED chip comprising reduced mask count and lift-off processing Apr. 19, 2011
7915074 Thin film transistor array panel and manufacturing method thereof Mar. 29, 2011
7888193 Semiconductor device with mushroom electrode and manufacture method thereof Feb. 15, 2011
7858412 Thin-film transistor substrate and method of fabricating the same Dec. 28, 2010
7851244 Methods for forming metal layers for a MEMS device integrated circuit Dec. 14, 2010
7790605 Formation of interconnects through lift-off processing Sep. 7, 2010
7776668 Stripper solution and method for manufacturing liquid crystal display using the same Aug. 17, 2010
7700482 Patterned material layer, method of forming the same, microdevice, and method of manufacturing the same Apr. 20, 2010
7696088 Manufacturing methods of metal wire, electrode and TFT array substrate Apr. 13, 2010
7695982 Refurbishing a wafer having a low-k dielectric layer Apr. 13, 2010
7648902 Manufacturing method of redistribution circuit structure Jan. 19, 2010
7638374 Method of fabricating vertical thin film transistor Dec. 29, 2009
7588965 Stencil and method for depositing material onto a substrate Sep. 15, 2009
7553751 Method of forming solder bump with reduced surface defects Jun. 30, 2009
7547590 Method for forming an array substrate including forming a transparent conductive layer on a photoresist and laser ablating Jun. 16, 2009
7531454 Method and apparatus of fabricating liquid crystal display device May. 12, 2009
7462521 Dual-gate device and method Dec. 9, 2008
7354781 Method of manufacturing field emission device Apr. 8, 2008
7316784 Method of patterning transparent conductive film, thin film transistor substrate using the same and fabricating method thereof Jan. 8, 2008
7315344 Liquid crystal display device and method of fabricating the same Jan. 1, 2008
7220612 Liquid crystal display device and fabricating method thereof May. 22, 2007
7132358 Method of forming solder bump with reduced surface defects Nov. 7, 2006
7129590 Stencil and method for depositing material onto a substrate Oct. 31, 2006
7078279 Manufacturing method of a thin film transistor array substrate Jul. 18, 2006
7067426 Semiconductor processing methods Jun. 27, 2006
7067398 Method of producing electronic circuit and electronic circuit Jun. 27, 2006
7022541 Patterned growth of single-walled carbon nanotubes from elevated wafer structures Apr. 4, 2006
7008810 Method for fabricating at least one mesa or ridge structure or at least one electrically pumped region in a layer or layer sequence Mar. 7, 2006
6989327 Forming a contact in a thin-film device Jan. 24, 2006
6887719 Magnetoresistive random access memory (MRAM) cell patterning May. 3, 2005
6884630 Two-step magnetic tunnel junction stack deposition Apr. 26, 2005
6881688 Method of fabricating a vertically profiled electrode and semiconductor device comprising such an electrode Apr. 19, 2005
6784081 Gate structure forming method of field effect transistor Aug. 31, 2004
6750150 Method for reducing dimensions between patterns on a photoresist Jun. 15, 2004
6737202 Method of fabricating a tiered structure using a multi-layered resist stack and use May. 18, 2004
6670228 Method of fabricating a polysilicon capacitor utilizing FET and bipolar base polysilicon layers Dec. 30, 2003
6605519 Method for thin film lift-off processes using lateral extended etching masks and device Aug. 12, 2003
6541309 Fabricating a molecular electronic device having a protective barrier layer Apr. 1, 2003
6340635 Resist pattern, process for the formation of the same, and process for the formation of wiring pattern Jan. 22, 2002

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