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Class Information
Number: 438/950
Name: Semiconductor device manufacturing: process > Masking > Radiation resist > Multilayer mask including nonradiation sensitive layer
Description: Art collection under 948 involving the use of a multilayer mask having both radiation sensitive and nonradiation sensitive components.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8658050 Method to transfer lithographic patterns into inorganic substrates Feb. 25, 2014
8652965 Production method for thick film metal electrode and production method for thick film resist Feb. 18, 2014
8557682 Multi-layer mask for substrate dicing by laser and plasma etch Oct. 15, 2013
8519403 Angled implantation for deep submicron device optimization Aug. 27, 2013
8486741 Process for etching trenches in an integrated optical device Jul. 16, 2013
8420542 Method of patterned image reversal Apr. 16, 2013
8420499 Concave-convex pattern forming method and magnetic tunnel junction element forming method Apr. 16, 2013
7964510 Method for forming pattern of a semiconductor device Jun. 21, 2011
7955975 Semiconductor element and display device using the same Jun. 7, 2011
7935636 Method of fabricating semiconductor device May. 3, 2011
7902071 Method for forming active and gate runner trenches Mar. 8, 2011
7892977 Hard mask patterns of a semiconductor device and a method for forming the same Feb. 22, 2011
7846825 Method of forming a contact hole and method of manufacturing a semiconductor device having the same Dec. 7, 2010
7846849 Frequency tripling using spacer mask having interposed regions Dec. 7, 2010
7842591 Method of fabricating short-gate-length electrodes for integrated III-V compound semiconductor devices Nov. 30, 2010
7767592 Method for forming a mask pattern for ion-implantation Aug. 3, 2010
7718530 Method for manufacturing semiconductor device May. 18, 2010
7709396 Integral patterning of large features along with array using spacer mask patterning process flow May. 4, 2010
7709310 Semiconductor device with mushroom electrode and manufacture method thereof May. 4, 2010
7687225 Optical coatings Mar. 30, 2010
7687408 Method for integrated circuit fabrication using pitch multiplication Mar. 30, 2010
7592265 Method of trimming a hard mask layer, method for fabricating a gate in a MOS transistor, and a stack for fabricating a gate in a MOS transistor Sep. 22, 2009
7589030 Liquid crystal display device and fabricating method thereof Sep. 15, 2009
7550392 Semiconductor device and method of manufacturing the same Jun. 23, 2009
7544619 Method of fabricating semiconductor device Jun. 9, 2009
7510973 Method for forming fine pattern in semiconductor device Mar. 31, 2009
7435536 Method to align mask patterns Oct. 14, 2008
7419894 Gate electrode and manufacturing method thereof, and semiconductor device and manufacturing method thereof Sep. 2, 2008
7407824 Guard ring for improved matching Aug. 5, 2008
7384874 Method of forming hardmask pattern of semiconductor device Jun. 10, 2008
7358140 Pattern density control using edge printing processes Apr. 15, 2008
7335542 Semiconductor device with mushroom electrode and manufacture method thereof Feb. 26, 2008
7288476 Controlled dry etch of a film Oct. 30, 2007
7282440 Integrated circuit contact Oct. 16, 2007
7253012 Guard ring for improved matching Aug. 7, 2007
7238624 System and method for manufacturing semiconductor devices using a vacuum chamber Jul. 3, 2007
7223703 Method of forming patterns May. 29, 2007
7223645 Semiconductor device with mushroom electrode and manufacture method thereof May. 29, 2007
7183150 Resist protect oxide structure of sub-micron salicide process Feb. 27, 2007
7176074 Manufacturing method of thin film transistor array substrate Feb. 13, 2007
7172960 Multi-layer film stack for extinction of substrate reflections during patterning Feb. 6, 2007
7074631 Light emitting device methods Jul. 11, 2006
7071121 Patterned ceramic films and method for producing the same Jul. 4, 2006
7033960 Multi-chamber deposition of silicon oxynitride film for patterning Apr. 25, 2006
7015136 Method for preventing formation of photoresist scum Mar. 21, 2006
7008856 Method for fabricating AND-type flash memory cell Mar. 7, 2006
6958292 Method of manufacturing integrated circuit Oct. 25, 2005
6929959 Manufacturing method of CPP type magnetic sensor having current-squeezing path Aug. 16, 2005
6914003 Method for manufacturing magnetic random access memory Jul. 5, 2005
6869899 Lateral-only photoresist trimming for sub-80 nm gate stack Mar. 22, 2005

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