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Class Information
Number: 438/949
Name: Semiconductor device manufacturing: process > Masking > Radiation resist > Energy beam treating radiation resist on semiconductor
Description: Art collection under 948 involving the use of an energy beam to irradiate a radiation sensitive layer upon a semiconductor substrate.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8580675 Two-track cross-connect in double-patterned structure using rectangular via Nov. 12, 2013
8519403 Angled implantation for deep submicron device optimization Aug. 27, 2013
8329512 Patterning method for high density pillar structures Dec. 11, 2012
8232199 Method of fabricating semiconductor device comprises a photoresist pattern having a desired critical dimension Jul. 31, 2012
8222149 Method for photoresist pattern removal Jul. 17, 2012
8153991 Direct write lithography system Apr. 10, 2012
8088455 Laser treatment apparatus Jan. 3, 2012
8026178 Patterning method for high density pillar structures Sep. 27, 2011
8021993 Method of carrying out an exposure process for a liquid crystal display device Sep. 20, 2011
7977247 Field effect transistor device including an array of channel elements Jul. 12, 2011
7901974 Masked laser anneal during fabrication of backside illuminated image sensors Mar. 8, 2011
7888193 Semiconductor device with mushroom electrode and manufacture method thereof Feb. 15, 2011
7842591 Method of fabricating short-gate-length electrodes for integrated III-V compound semiconductor devices Nov. 30, 2010
RE41426 Manufacturing methods of liquid crystal displays Jul. 13, 2010
7727853 Processing method, manufacturing method of semiconductor device, and processing apparatus Jun. 1, 2010
7709310 Semiconductor device with mushroom electrode and manufacture method thereof May. 4, 2010
7563732 Method and apparatus for forming polycrystalline layer using laser crystallization Jul. 21, 2009
7491647 Etch with striation control Feb. 17, 2009
7384810 Image display device and method for manufacturing the same Jun. 10, 2008
7335542 Semiconductor device with mushroom electrode and manufacture method thereof Feb. 26, 2008
7329883 Electron beam lithography device and drawing method using electron beams Feb. 12, 2008
7316958 Masks for fabricating semiconductor devices and methods of forming mask patterns Jan. 8, 2008
RE39913 Method to control gate CD Nov. 6, 2007
7238624 System and method for manufacturing semiconductor devices using a vacuum chamber Jul. 3, 2007
7223643 Method of manufacturing a semiconductor device May. 29, 2007
7223645 Semiconductor device with mushroom electrode and manufacture method thereof May. 29, 2007
7223696 Methods for maskless lithography May. 29, 2007
7157319 Method of patterning a thin film transistor that includes simultaneously forming a gate electrode and a pixel electrode Jan. 2, 2007
7125757 Method of manufacturing an array substrate for a liquid crystal display device Oct. 24, 2006
7037791 Application of single exposure alternating aperture phase shift mask to form sub 0.18 micron polysilicon gates May. 2, 2006
7005363 Method of forming a semi-insulating region Feb. 28, 2006
6998316 Method for fabricating read only memory including a first and second exposures to a photoresist layer Feb. 14, 2006
6992015 Pattern formation method Jan. 31, 2006
RE38901 Manufacturing methods of liquid crystal displays Nov. 29, 2005
6946668 Electron beam lithography device and drawing method using electron beams Sep. 20, 2005
6946666 Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same Sep. 20, 2005
6933247 Method for forming a minute pattern and method for manufacturing a semiconductor device using the same Aug. 23, 2005
6913989 Method of exposing a semiconductor integrated circuit including device regions and global routing region Jul. 5, 2005
6908854 Method of forming a dual-layer resist and application thereof Jun. 21, 2005
6900141 Method of forming a resist pattern and fabricating tapered features May. 31, 2005
6900069 Method of fabricating surface-emission type light-emitting device, surface-emitting semiconductor laser, method of fabricating the same, optical module and optical transmission device May. 31, 2005
6869899 Lateral-only photoresist trimming for sub-80 nm gate stack Mar. 22, 2005
6841399 Method of manufacturing mask and method of manufacturing semiconductor integrated circuit device Jan. 11, 2005
6841465 Method of forming dual damascene pattern in semiconductor device Jan. 11, 2005
6841488 Pattern formation method Jan. 11, 2005
6828167 Method for manufacturing a thin film transistor for a liquid crystal display Dec. 7, 2004
6815347 Method of forming a reflective electrode Nov. 9, 2004
6800551 Chemical amplification type photoresist composition, method for producing a semiconductor device using the composition, and semiconductor substrate Oct. 5, 2004
6780781 Method for manufacturing an electronic device Aug. 24, 2004
6767773 Method of Production of a thin film type semiconductor device having a heat-retaining layer Jul. 27, 2004

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