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Class Information
Number: 438/949
Name: Semiconductor device manufacturing: process > Masking > Radiation resist > Energy beam treating radiation resist on semiconductor
Description: Art collection under 948 involving the use of an energy beam to irradiate a radiation sensitive layer upon a semiconductor substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7563732 |
Method and apparatus for forming polycrystalline layer using laser crystallization |
Jul. 21, 2009 |
| 7491647 |
Etch with striation control |
Feb. 17, 2009 |
| 7384810 |
Image display device and method for manufacturing the same |
Jun. 10, 2008 |
| 7335542 |
Semiconductor device with mushroom electrode and manufacture method thereof |
Feb. 26, 2008 |
| 7329883 |
Electron beam lithography device and drawing method using electron beams |
Feb. 12, 2008 |
| 7316958 |
Masks for fabricating semiconductor devices and methods of forming mask patterns |
Jan. 8, 2008 |
| RE39913 |
Method to control gate CD |
Nov. 6, 2007 |
| 7238624 |
System and method for manufacturing semiconductor devices using a vacuum chamber |
Jul. 3, 2007 |
| 7223643 |
Method of manufacturing a semiconductor device |
May. 29, 2007 |
| 7223645 |
Semiconductor device with mushroom electrode and manufacture method thereof |
May. 29, 2007 |
| 7223696 |
Methods for maskless lithography |
May. 29, 2007 |
| 7157319 |
Method of patterning a thin film transistor that includes simultaneously forming a gate electrode and a pixel electrode |
Jan. 2, 2007 |
| 7125757 |
Method of manufacturing an array substrate for a liquid crystal display device |
Oct. 24, 2006 |
| 7037791 |
Application of single exposure alternating aperture phase shift mask to form sub 0.18 micron polysilicon gates |
May. 2, 2006 |
| 7005363 |
Method of forming a semi-insulating region |
Feb. 28, 2006 |
| 6998316 |
Method for fabricating read only memory including a first and second exposures to a photoresist layer |
Feb. 14, 2006 |
| 6992015 |
Pattern formation method |
Jan. 31, 2006 |
| RE38901 |
Manufacturing methods of liquid crystal displays |
Nov. 29, 2005 |
| 6946668 |
Electron beam lithography device and drawing method using electron beams |
Sep. 20, 2005 |
| 6946666 |
Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same |
Sep. 20, 2005 |
| 6933247 |
Method for forming a minute pattern and method for manufacturing a semiconductor device using the same |
Aug. 23, 2005 |
| 6913989 |
Method of exposing a semiconductor integrated circuit including device regions and global routing region |
Jul. 5, 2005 |
| 6908854 |
Method of forming a dual-layer resist and application thereof |
Jun. 21, 2005 |
| 6900141 |
Method of forming a resist pattern and fabricating tapered features |
May. 31, 2005 |
| 6900069 |
Method of fabricating surface-emission type light-emitting device, surface-emitting semiconductor laser, method of fabricating the same, optical module and optical transmission device |
May. 31, 2005 |
| 6869899 |
Lateral-only photoresist trimming for sub-80 nm gate stack |
Mar. 22, 2005 |
| 6841399 |
Method of manufacturing mask and method of manufacturing semiconductor integrated circuit device |
Jan. 11, 2005 |
| 6841465 |
Method of forming dual damascene pattern in semiconductor device |
Jan. 11, 2005 |
| 6841488 |
Pattern formation method |
Jan. 11, 2005 |
| 6828167 |
Method for manufacturing a thin film transistor for a liquid crystal display |
Dec. 7, 2004 |
| 6815347 |
Method of forming a reflective electrode |
Nov. 9, 2004 |
| 6800551 |
Chemical amplification type photoresist composition, method for producing a semiconductor device using the composition, and semiconductor substrate |
Oct. 5, 2004 |
| 6780781 |
Method for manufacturing an electronic device |
Aug. 24, 2004 |
| 6767773 |
Method of Production of a thin film type semiconductor device having a heat-retaining layer |
Jul. 27, 2004 |
| 6767799 |
Laser beam irradiation method |
Jul. 27, 2004 |
| 6764964 |
Method for forming patterns of a semiconductor device |
Jul. 20, 2004 |
| 6759351 |
Method for eliminating development related defects in photoresist masks |
Jul. 6, 2004 |
| 6746904 |
Electronic devices comprising thin film transistors |
Jun. 8, 2004 |
| 6737338 |
Pattern forming method for a display device |
May. 18, 2004 |
| 6716741 |
Method of patterning dielectric layer with low dielectric constant |
Apr. 6, 2004 |
| RE38466 |
Manufacturing method of active matrix substrate, active matrix substrate and liquid crystal display device |
Mar. 16, 2004 |
| 6664194 |
Photoexposure method for facilitating photoresist stripping |
Dec. 16, 2003 |
| 6653244 |
Monolithic three-dimensional structures |
Nov. 25, 2003 |
| 6583037 |
Method for fabricating gate of semiconductor device |
Jun. 24, 2003 |
| 6576113 |
Method of electroplating of high aspect ratio metal structures into semiconductors |
Jun. 10, 2003 |
| 6556702 |
Method and apparatus that determines charged particle beam shape codes |
Apr. 29, 2003 |
| 6534425 |
Mask design and method for controlled profile fabrication |
Mar. 18, 2003 |
| 6524876 |
Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same |
Feb. 25, 2003 |
| 6518196 |
Method of manufacturing semiconductor device |
Feb. 11, 2003 |
| 6451663 |
Method of manufacturing a cylindrical storage node in a semiconductor device |
Sep. 17, 2002 |
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