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Class Information
Number: 438/948
Name: Semiconductor device manufacturing: process > Masking > Radiation resist
Description: Art collection under 942 involving the use of a radiation resist in a masking operation.

Sub-classes under this class:

Class Number Class Name Patents
438/949 Energy beam treating radiation resist on semiconductor 183
438/951 Lift-off 195
438/950 Multilayer mask including nonradiation sensitive layer 169
438/952 Utilizing antireflective layer 224

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8658050 Method to transfer lithographic patterns into inorganic substrates Feb. 25, 2014
8658440 Nitride semiconductor crystal with surface texture Feb. 25, 2014
8592318 Pitch reduction using oxide spacer Nov. 26, 2013
8580675 Two-track cross-connect in double-patterned structure using rectangular via Nov. 12, 2013
8519403 Angled implantation for deep submicron device optimization Aug. 27, 2013
8361829 On-chip radiation dosimeter Jan. 29, 2013
8329512 Patterning method for high density pillar structures Dec. 11, 2012
8222149 Method for photoresist pattern removal Jul. 17, 2012
8158014 Multi-exposure lithography employing differentially sensitive photoresist layers Apr. 17, 2012
8026178 Patterning method for high density pillar structures Sep. 27, 2011
7981706 Photoresist composition and method of manufacturing a display substrate using the same Jul. 19, 2011
7977247 Field effect transistor device including an array of channel elements Jul. 12, 2011
7943497 Method for manufacturing an SOI substrate May. 17, 2011
7871908 Method of manufacturing semiconductor device Jan. 18, 2011
7867884 Sample wafer fabrication method Jan. 11, 2011
7767592 Method for forming a mask pattern for ion-implantation Aug. 3, 2010
7696033 Method of fabricating complementary metal-oxide semiconductor (CMOS) thin film transistor (TFT) Apr. 13, 2010
7495347 Ion implantation with multiple concentration levels Feb. 24, 2009
7312159 Compositions for dissolution of low-k dielectric films, and methods of use Dec. 25, 2007
7238624 System and method for manufacturing semiconductor devices using a vacuum chamber Jul. 3, 2007
7105407 Method of fabricating semiconductor device Sep. 12, 2006
7083994 Method of manufacturing a semiconductor device with outline of cleave marking regions and alignment or registration features Aug. 1, 2006
7078319 Laser separated die with tapered sidewalls for improved light extraction Jul. 18, 2006
7008736 Semiconductor integrated circuit device fabrication method using a mask having a phase shifting film covering region and an opening region Mar. 7, 2006
6992015 Pattern formation method Jan. 31, 2006
6962878 Method to reduce photoresist mask line dimensions Nov. 8, 2005
6958292 Method of manufacturing integrated circuit Oct. 25, 2005
6924230 Method for forming a conductive layer Aug. 2, 2005
6908854 Method of forming a dual-layer resist and application thereof Jun. 21, 2005
6885078 Circuit isolation utilizing MeV implantation Apr. 26, 2005
6881688 Method of fabricating a vertically profiled electrode and semiconductor device comprising such an electrode Apr. 19, 2005
6872646 Method for manufacturing conductive pattern substrate Mar. 29, 2005
6855646 Plasma polymerized electron beam resist Feb. 15, 2005
6844270 Polymers and photoresist compositions for short wavelength imaging Jan. 18, 2005
6841465 Method of forming dual damascene pattern in semiconductor device Jan. 11, 2005
6828167 Method for manufacturing a thin film transistor for a liquid crystal display Dec. 7, 2004
6815347 Method of forming a reflective electrode Nov. 9, 2004
6812128 Method of manufacturing multilayer structured semiconductor device Nov. 2, 2004
6808984 Method for forming a contact opening Oct. 26, 2004
6803261 Photoelectric converter and fabrication method thereof Oct. 12, 2004
6780781 Method for manufacturing an electronic device Aug. 24, 2004
6750154 Gas assisted method for applying resist stripper and gas-resist stripper combinations Jun. 15, 2004
6734034 Transistor and associated driving device May. 11, 2004
6653244 Monolithic three-dimensional structures Nov. 25, 2003
6566178 Transistor and associated driving device May. 20, 2003
6562670 Poly-silicon thin film transistor and method for fabricating thereof May. 13, 2003
6518175 Process for reducing critical dimensions of contact holes, vias, and trench structures in integrated circuits Feb. 11, 2003
6514871 Gate etch process with extended CD trim capability Feb. 4, 2003
6479411 Method for forming high quality multiple thickness oxide using high temperature descum Nov. 12, 2002
6451504 Semiconductor processing method of promoting photoresist adhesion to an outer substrate layer predominately comprising silicon nitride Sep. 17, 2002

1 2 3 4

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