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Class Information
Number: 438/947
Name: Semiconductor device manufacturing: process > Masking > Subphotolithographic processing
Description: Art collection under 942 wherein the photolithos:graphic features formed on the substrate are of a dimension below the resolution limit of the photolithos:graphic process.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8703000 Slimming method of carbon-containing thin film and oxidation apparatus Apr. 22, 2014
8703608 Control of local environment for polysilicon conductors in integrated circuits Apr. 22, 2014
8691696 Methods for forming an integrated circuit with straightened recess profile Apr. 8, 2014
8691697 Self-aligned devices and methods of manufacture Apr. 8, 2014
8642428 Semiconductor device including line-type active region and method for manufacturing the same Feb. 4, 2014
8641914 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids Feb. 4, 2014
8637113 Methods of forming a non-volatile resistive oxide memory array Jan. 28, 2014
8629047 Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures Jan. 14, 2014
8592318 Pitch reduction using oxide spacer Nov. 26, 2013
8585915 Methods for fabricating sub-resolution alignment marks on semiconductor structures Nov. 19, 2013
8568604 CMOS gate structures fabricated by selective oxidation Oct. 29, 2013
8562844 Methods using block co-polymer self-assembly for sub-lithographic patterning Oct. 22, 2013
8557128 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Oct. 15, 2013
8557704 Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures Oct. 15, 2013
8557707 Focused ion beam deep nano-patterning apparatus and method Oct. 15, 2013
8546177 Methods of manufacturing phase-change memory device and semiconductor device Oct. 1, 2013
8518275 Graphoepitaxial self-assembly of arrays of downward facing half-cylinders Aug. 27, 2013
8486288 Pattern forming method Jul. 16, 2013
8461054 Method of manufacturing liquid crystal display device Jun. 11, 2013
8435416 Method for manufacturing porous structure and method for forming pattern May. 7, 2013
8409449 Registered structure formation via the application of directed thermal energy to diblock copolymer films Apr. 2, 2013
8404124 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Mar. 26, 2013
8384060 Resistive memory device Feb. 26, 2013
8358010 Method for realizing a nanometric circuit architecture between standard electronic components and semiconductor device obtained with said method Jan. 22, 2013
8334221 Methods of forming patterned photoresist layers over semiconductor substrates Dec. 18, 2012
8329512 Patterning method for high density pillar structures Dec. 11, 2012
8309278 Guided self-assembly of block copolymer line structures for integrated circuit interconnects Nov. 13, 2012
8273665 Nonvolatile memory device using semiconductor nanocrystals and method forming same Sep. 25, 2012
8247292 Nonvolative memory device using semiconductor nanocrystals and method of forming same Aug. 21, 2012
8241823 Method of fabrication of a semiconductor device having reduced pitch Aug. 14, 2012
8241969 Patterning method for high density pillar structures Aug. 14, 2012
8222159 Manufacturing method of semiconductor device Jul. 17, 2012
8222154 Fin and finFET formation by angled ion implantation Jul. 17, 2012
8207614 Methods for forming arrays of small, closely spaced features Jun. 26, 2012
8183152 Method of fabricating semiconductor device May. 22, 2012
8177990 Etching method, plasma processing system and storage medium May. 15, 2012
8168449 Template-registered diblock copolymer mask for MRAM device formation May. 1, 2012
8163189 Method for producing a nanoporous substrate Apr. 24, 2012
8158014 Multi-exposure lithography employing differentially sensitive photoresist layers Apr. 17, 2012
8129286 Reducing effective dielectric constant in semiconductor devices Mar. 6, 2012
8123960 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Feb. 28, 2012
8123962 Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces Feb. 28, 2012
8114723 Method of forming multi-high-density memory devices and architectures Feb. 14, 2012
8114468 Methods of forming a non-volatile resistive oxide memory array Feb. 14, 2012
8114306 Method of forming sub-lithographic features using directed self-assembly of polymers Feb. 14, 2012
8114301 Graphoepitaxial self-assembly of arrays of downward facing half-cylinders Feb. 14, 2012
8114300 Multi-layer method for formation of registered arrays of cylindrical pores in polymer films Feb. 14, 2012
8101526 Method of making diamond nanopillars Jan. 24, 2012
8097175 Method for selectively permeating a self-assembled block copolymer, method for forming metal oxide structures, method for forming a metal oxide pattern, and method for patterning a semiconduct Jan. 17, 2012
8088689 Method of fabricating semiconductor device Jan. 3, 2012

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