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Class Information
Number: 438/946
Name: Semiconductor device manufacturing: process > Masking > Step and repeat
Description: Art collection under 942 wherein the processing of the semiconductor substrate is affected by the sequential treatment of laterally arranged regions.

Patents under this class:

Patent Number Title Of Patent Date Issued
8598038 Process for producing two interleaved patterns on a substrate Dec. 3, 2013
8450833 Spacer double patterning that prints multiple CD in front-end-of-line May. 28, 2013
8358010 Method for realizing a nanometric circuit architecture between standard electronic components and semiconductor device obtained with said method Jan. 22, 2013
8313998 Method for manufacturing semiconductor device Nov. 20, 2012
8311070 Nitride semiconductor laser device Nov. 13, 2012
8222159 Manufacturing method of semiconductor device Jul. 17, 2012
7867402 Method for realizing a multispacer structure, use of said structure as a mold and circuital architectures obtained from said mold Jan. 11, 2011
7749902 Methods of manufacturing semiconductor device Jul. 6, 2010
7736921 Method for manufacturing electroluminescent element Jun. 15, 2010
7670949 Semiconductor device and method of manufacturing semiconductor device Mar. 2, 2010
7494828 Substrate holder and device manufacturing method Feb. 24, 2009
7461446 Method for repairing photoresist layer defects using index matching overcoat Dec. 9, 2008
7446057 Fabrication method Nov. 4, 2008
7425508 Liquid crystal display device and fabricating method thereof, and thin film patterning method applied thereto Sep. 16, 2008
7396781 Method and apparatus for adjusting feature size and position Jul. 8, 2008
7361530 Method of fabricating a semiconductor integrated circuit that includes patterning a semiconductor substrate with a first photomask that uses metal for blocking light and patterning the same su Apr. 22, 2008
7288476 Controlled dry etch of a film Oct. 30, 2007
7214614 System for controlling metal formation processes using ion implantation May. 8, 2007
7205222 Method of fabricating a semiconductor integrated circuit that includes patterning a semiconductor substrate with a first photomask that uses metal for blocking light and patterning the same su Apr. 17, 2007
7195950 Forming a plurality of thin-film devices Mar. 27, 2007
7153778 Methods of forming openings, and methods of forming container capacitors Dec. 26, 2006
7119014 Method for fabricating a semiconductor device having a tapered-mesa side-wall film Oct. 10, 2006
7083994 Method of manufacturing a semiconductor device with outline of cleave marking regions and alignment or registration features Aug. 1, 2006
6979604 Method for forming pattern on substrate and method for fabricating liquid crystal display using the same Dec. 27, 2005
6887722 Method for exposing a semiconductor wafer May. 3, 2005
6727175 Method of controlling metal formation processes using ion implantation, and system for performing same Apr. 27, 2004
6727195 Method and system for decreasing the spaces between wordlines Apr. 27, 2004
6645856 Method for manufacturing a semiconductor device using half-tone phase-shift mask to transfer a pattern onto a substrate Nov. 11, 2003
6638441 Method for pitch reduction Oct. 28, 2003
6571371 Method and apparatus for using latency time as a run-to-run control parameter May. 27, 2003
6509247 Semiconductor device and alignment method Jan. 21, 2003
6403413 Manufacturing method of semiconductor integrated circuit device having a capacitor Jun. 11, 2002
6341006 Projection exposure apparatus Jan. 22, 2002
6303983 Apparatus for manufacturing resin-encapsulated semiconductor devices Oct. 16, 2001
6228743 Alignment method for semiconductor device May. 8, 2001
6063688 Fabrication of deep submicron structures and quantum wire transistors using hard-mask transistor width definition May. 16, 2000
6048785 Semiconductor fabrication method of combining a plurality of fields defined by a reticle image using segment stitching Apr. 11, 2000
5902717 Method of fabricating semiconductor device using half-tone phase shift mask May. 11, 1999
5834364 Method of implementing of a reference sample for use in a device for characterizing implanted doses Nov. 10, 1998
5716889 Method of arranging alignment marks Feb. 10, 1998
5656526 Method of fabricating a display device Aug. 12, 1997
5334282 Electron beam lithography system and method Aug. 2, 1994
5302491 Method of encoding identification information on circuit dice using step and repeat lithography Apr. 12, 1994
5175128 Process for fabricating an integrated circuit by a repetition of exposure of a semiconductor pattern Dec. 29, 1992
4869998 Intergrated circuit substrates Sep. 26, 1989

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