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Class Information
Number: 438/945
Name: Semiconductor device manufacturing: process > Masking > Special (e.g., metal, etc.)
Description: Art collection under 942 involving the use of a nonconventional mask.

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8685858 Formation of metal nanospheres and microspheres Apr. 1, 2014
8598038 Process for producing two interleaved patterns on a substrate Dec. 3, 2013
8575021 Substrate processing including a masking layer Nov. 5, 2013
8563433 Process to form via hole in semiconductor wafer Oct. 22, 2013
8557128 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Oct. 15, 2013
8486741 Process for etching trenches in an integrated optical device Jul. 16, 2013
8324003 Method for manufacturing a thin film transistor array panel Dec. 4, 2012
8258052 Method of manufacturing silicon carbide semiconductor device Sep. 4, 2012
8232214 Liquid crystal display device and method of fabricating the same Jul. 31, 2012
8232122 Method for fabricating light emitting diode chip Jul. 31, 2012
8123960 Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers Feb. 28, 2012
8030199 Transistor fabrication method Oct. 4, 2011
8026155 Method for producing semiconductor device Sep. 27, 2011
7981817 Method for manufacturing semiconductor device using multiple ion implantation masks Jul. 19, 2011
7977247 Field effect transistor device including an array of channel elements Jul. 12, 2011
7857982 Methods of etching features into substrates Dec. 28, 2010
7855148 Methods of isolating array features during pitch doubling processes and semiconductor device structures having isolated array features Dec. 21, 2010
7816238 GaN substrate, substrate with epitaxial layer, semiconductor device, and method of manufacturing GaN substrate Oct. 19, 2010
7767507 Polycrystalline silicon thin film, fabrication method thereof, and thin film transistor without directional dependency on active channels fabricated using the same Aug. 3, 2010
7718498 Semiconductor device and method of producing same May. 18, 2010
7709390 Methods of isolating array features during pitch doubling processes and semiconductor device structures having isolated array features May. 4, 2010
7700473 Gated semiconductor device and method of fabricating same Apr. 20, 2010
7678693 Exposure method for upper layer of hole of semiconductor device Mar. 16, 2010
7670949 Semiconductor device and method of manufacturing semiconductor device Mar. 2, 2010
7635652 Mask with hydrophobic surface Dec. 22, 2009
7612980 Method and structure for electrostatic discharge protection of photomasks Nov. 3, 2009
7585424 Pattern reversal process for self aligned imprint lithography and device Sep. 8, 2009
7579202 Method for fabricating light emitting diode element Aug. 25, 2009
7569414 CMOS imager with integrated non-volatile memory Aug. 4, 2009
7563722 Method of making a textured surface Jul. 21, 2009
7517466 Method for manufacturing porous structure and method for forming pattern Apr. 14, 2009
7470606 Masking methods Dec. 30, 2008
7322287 Apparatus for fluid pressure imprint lithography Jan. 29, 2008
7282461 Phase-shifting mask and semiconductor device Oct. 16, 2007
7241683 Stabilized photoresist structure for etching process Jul. 10, 2007
7205184 Method of crystallizing silicon film and method of manufacturing thin film transistor liquid crystal display Apr. 17, 2007
7199059 Method for removing polymer as etching residue Apr. 3, 2007
7172960 Multi-layer film stack for extinction of substrate reflections during patterning Feb. 6, 2007
7157377 Method of making a semiconductor device using treated photoresist Jan. 2, 2007
7132361 System for and method of forming via holes by multiple deposition events in a continuous inline shadow mask deposition process Nov. 7, 2006
7119014 Method for fabricating a semiconductor device having a tapered-mesa side-wall film Oct. 10, 2006
7105431 Masking methods Sep. 12, 2006
7083994 Method of manufacturing a semiconductor device with outline of cleave marking regions and alignment or registration features Aug. 1, 2006
7029592 Coated beads and process utilizing such beads for forming an etch mask having a discontinuous regular pattern Apr. 18, 2006
6998350 Method for forming micro groove structure Feb. 14, 2006
6998333 Method for making nanoscale wires and gaps for switches and transistors Feb. 14, 2006
6958292 Method of manufacturing integrated circuit Oct. 25, 2005
6929959 Manufacturing method of CPP type magnetic sensor having current-squeezing path Aug. 16, 2005
6919272 Method for patterning densely packed metal segments in a semiconductor die and related structure Jul. 19, 2005
6905949 Semiconductor apparatus fabrication method forming a resist pattern, a film over the resist, and reflowing the resist Jun. 14, 2005

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