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Class Information
Number: 438/945
Name: Semiconductor device manufacturing: process > Masking > Special (e.g., metal, etc.)
Description: Art collection under 942 involving the use of a nonconventional mask.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7612980 |
Method and structure for electrostatic discharge protection of photomasks |
Nov. 3, 2009 |
| 7585424 |
Pattern reversal process for self aligned imprint lithography and device |
Sep. 8, 2009 |
| 7579202 |
Method for fabricating light emitting diode element |
Aug. 25, 2009 |
| 7569414 |
CMOS imager with integrated non-volatile memory |
Aug. 4, 2009 |
| 7563722 |
Method of making a textured surface |
Jul. 21, 2009 |
| 7517466 |
Method for manufacturing porous structure and method for forming pattern |
Apr. 14, 2009 |
| 7470606 |
Masking methods |
Dec. 30, 2008 |
| 7322287 |
Apparatus for fluid pressure imprint lithography |
Jan. 29, 2008 |
| 7282461 |
Phase-shifting mask and semiconductor device |
Oct. 16, 2007 |
| 7241683 |
Stabilized photoresist structure for etching process |
Jul. 10, 2007 |
| 7205184 |
Method of crystallizing silicon film and method of manufacturing thin film transistor liquid crystal display |
Apr. 17, 2007 |
| 7199059 |
Method for removing polymer as etching residue |
Apr. 3, 2007 |
| 7172960 |
Multi-layer film stack for extinction of substrate reflections during patterning |
Feb. 6, 2007 |
| 7157377 |
Method of making a semiconductor device using treated photoresist |
Jan. 2, 2007 |
| 7132361 |
System for and method of forming via holes by multiple deposition events in a continuous inline shadow mask deposition process |
Nov. 7, 2006 |
| 7119014 |
Method for fabricating a semiconductor device having a tapered-mesa side-wall film |
Oct. 10, 2006 |
| 7105431 |
Masking methods |
Sep. 12, 2006 |
| 7083994 |
Method of manufacturing a semiconductor device with outline of cleave marking regions and alignment or registration features |
Aug. 1, 2006 |
| 7029592 |
Coated beads and process utilizing such beads for forming an etch mask having a discontinuous regular pattern |
Apr. 18, 2006 |
| 6998350 |
Method for forming micro groove structure |
Feb. 14, 2006 |
| 6998333 |
Method for making nanoscale wires and gaps for switches and transistors |
Feb. 14, 2006 |
| 6958292 |
Method of manufacturing integrated circuit |
Oct. 25, 2005 |
| 6929959 |
Manufacturing method of CPP type magnetic sensor having current-squeezing path |
Aug. 16, 2005 |
| 6919272 |
Method for patterning densely packed metal segments in a semiconductor die and related structure |
Jul. 19, 2005 |
| 6905949 |
Semiconductor apparatus fabrication method forming a resist pattern, a film over the resist, and reflowing the resist |
Jun. 14, 2005 |
| 6905966 |
METHOD FOR ESTIMATING REMAINING FILM THICKNESS DISTRIBUTION, METHOD FOR DESIGNING PATTERNING MASK USING THE METHOD FOR ESTIMATING REMAINING FILM THICKNESS DISTRIBUTION, AND METHOD FOR MANUFACT |
Jun. 14, 2005 |
| 6881688 |
Method of fabricating a vertically profiled electrode and semiconductor device comprising such an electrode |
Apr. 19, 2005 |
| 6872650 |
Ball electrode forming method |
Mar. 29, 2005 |
| 6872646 |
Method for manufacturing conductive pattern substrate |
Mar. 29, 2005 |
| 6869899 |
Lateral-only photoresist trimming for sub-80 nm gate stack |
Mar. 22, 2005 |
| 6844235 |
Reticle repeater monitor wafer and method for verifying reticles |
Jan. 18, 2005 |
| 6828167 |
Method for manufacturing a thin film transistor for a liquid crystal display |
Dec. 7, 2004 |
| 6824698 |
Uniform emitter array for display devices, etch mask for the same, and methods for making the same |
Nov. 30, 2004 |
| 6794207 |
Method of manufacturing integrated circuit |
Sep. 21, 2004 |
| 6784070 |
Intra-cell mask alignment for improved overlay |
Aug. 31, 2004 |
| 6780781 |
Method for manufacturing an electronic device |
Aug. 24, 2004 |
| 6767824 |
Method of fabricating a gate structure of a field effect transistor using an alpha-carbon mask |
Jul. 27, 2004 |
| 6767821 |
Method for fabricating an interconnect line |
Jul. 27, 2004 |
| 6759351 |
Method for eliminating development related defects in photoresist masks |
Jul. 6, 2004 |
| 6759328 |
Masks and method for contact hole exposure |
Jul. 6, 2004 |
| 6750087 |
Thin film transistor array, fabrication method thereof, and liquid crystal display device employing the same |
Jun. 15, 2004 |
| 6734079 |
Microelectronic fabrication having sidewall passivated microelectronic capacitor structure fabricated therein |
May. 11, 2004 |
| 6727195 |
Method and system for decreasing the spaces between wordlines |
Apr. 27, 2004 |
| 6716736 |
Method for manufacturing an under-bump metallurgy layer |
Apr. 6, 2004 |
| 6712903 |
Mask for evaluating selective epitaxial growth process |
Mar. 30, 2004 |
| 6699779 |
Method for making nanoscale wires and gaps for switches and transistors |
Mar. 2, 2004 |
| 6686300 |
Sub-critical-dimension integrated circuit features |
Feb. 3, 2004 |
| 6676845 |
Coated beads and process utilizing such beads for forming an etch mask having a discontinuous regular pattern |
Jan. 13, 2004 |
| 6635494 |
Method of forming a two-dimensionally arrayed quantum device using a metalloprotein complex as a quantum-dot mask array |
Oct. 21, 2003 |
| 6630408 |
Self alignment process to fabricate attenuated shifting mask with chrome border |
Oct. 7, 2003 |
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