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Class Information
Number: 438/944
Name: Semiconductor device manufacturing: process > Masking > Shadow
Description: Art collection under 942 involving the use of a mask not in contact with the semiconductor substrate so as to cast a shadow thereupon.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8691016 Deposition apparatus, and deposition method Apr. 8, 2014
8598038 Process for producing two interleaved patterns on a substrate Dec. 3, 2013
8574447 Inorganic rapid alternating process for silicon etch Nov. 5, 2013
8545631 Mask device, method of fabricating the same, and method of fabricating organic light emitting display device using the same Oct. 1, 2013
8348503 System for active array temperature sensing and cooling Jan. 8, 2013
8298855 Photoelectric conversion device, imaging device, and process for producing the photoelectric conversion device Oct. 30, 2012
8183082 Fabrication of organic solar array for applications in microelectromechanical systems and others May. 22, 2012
7977225 Reducing implant degradation in tilted implantations by shifting implantation masks Jul. 12, 2011
7833909 Method of manufacturing semiconductor device, and etching apparatus Nov. 16, 2010
7645708 Shadow mask deposition of materials using reconfigurable shadow masks Jan. 12, 2010
7638374 Method of fabricating vertical thin film transistor Dec. 29, 2009
7535104 Structure and method for bond pads of copper-metallized integrated circuits May. 19, 2009
7495347 Ion implantation with multiple concentration levels Feb. 24, 2009
7339248 Self-adjusting serial circuit of thin layers and method for production thereof Mar. 4, 2008
7316978 Method for forming recesses Jan. 8, 2008
7297581 SRAM formation using shadow implantation Nov. 20, 2007
7288426 Automatically adjusting serial connections of thick and thin layers and method for the production thereof Oct. 30, 2007
7250336 Method for fabricating a shadow mask in a trench of a microelectronic or micromechanical structure Jul. 31, 2007
7217656 Structure and method for bond pads of copper-metallized integrated circuits May. 15, 2007
7179748 Method for forming recesses Feb. 20, 2007
7132361 System for and method of forming via holes by multiple deposition events in a continuous inline shadow mask deposition process Nov. 7, 2006
7078328 Semiconductor processing methods of transferring patterns from patterned photoresists to materials, and structures comprising silicon nitride Jul. 18, 2006
6894368 Microelectronic device fabricating method, method of forming a pair of conductive device components of different base widths from a common deposited conductive layer, and integrated circuitry May. 17, 2005
6815318 Manufacturing method of semiconductor device Nov. 9, 2004
6787406 Systems and methods for forming dense n-channel and p-channel fins using shadow implanting Sep. 7, 2004
6774006 Microelectronic device fabricating method, and method of forming a pair of field effect transistor gate lines of different base widths from a common deposited conductive layer Aug. 10, 2004
6667215 Method of making transistors Dec. 23, 2003
6509626 Conductive device components of different base widths formed from a common conductive layer Jan. 21, 2003
6291135 Ionization technique to reduce defects on next generation lithography mask during exposure Sep. 18, 2001
6274198 Shadow mask deposition Aug. 14, 2001
6194268 Printing sublithographic images using a shadow mandrel and off-axis exposure Feb. 27, 2001
6117774 Method for manufacturing shadow mask and etching-resistant layer-coating apparatus Sep. 12, 2000
6050827 Method of manufacturing a thin-film transistor with reinforced drain and source electrodes Apr. 18, 2000
6049104 MOSFET device to reduce gate-width without increasing JFET resistance Apr. 11, 2000
6036772 Method for making semiconductor device Mar. 14, 2000
6022809 Composite shadow ring for an etch chamber and method of using Feb. 8, 2000
5994194 Self-aligned base ohmic metal for an HBT device cross-reference to related applications Nov. 30, 1999
5916822 Method of etching a substrate by means of chemical beams Jun. 29, 1999
5804487 Method of fabricating high .beta.HBT devices Sep. 8, 1998
5780329 Process for fabricating a moderate-depth diffused emitter bipolar transistor in a BICMOS device without using an additional mask Jul. 14, 1998
5741736 Process for forming a transistor with a nonuniformly doped channel Apr. 21, 1998
5739058 Method to control threshold voltage by modifying implant dosage using variable aperture dopant implants Apr. 14, 1998
5716759 Method and apparatus for producing integrated circuit devices Feb. 10, 1998
5693234 Method for producing at least one recess in a surface of a substrate apparatus for carrying out the said method and use of the product thus obtained Dec. 2, 1997
5665614 Method for making fully self-aligned submicron heterojunction bipolar transistor Sep. 9, 1997
5652179 Method of fabricating sub-micron gate electrode by angle and direct evaporation Jul. 29, 1997
5597740 Semiconductor display device and a method of fabricating the same Jan. 28, 1997
5561071 DNA and DNA technology for the construction of networks to be used in chip construction and chip production (DNA-chips) Oct. 1, 1996
5536677 Method of forming conductive bumps on a semiconductor device using a double mask structure Jul. 16, 1996

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