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Class Information
Number: 438/943
Name: Semiconductor device manufacturing: process > Masking > Movable
Description: Art collection under 942 involving the use of a mask movable with respect to the semiconductor substrate.

Patents under this class:

Patent Number Title Of Patent Date Issued
8598038 Process for producing two interleaved patterns on a substrate Dec. 3, 2013
8461054 Method of manufacturing liquid crystal display device Jun. 11, 2013
8330128 Implant mask with moveable hinged mask segments Dec. 11, 2012
7981817 Method for manufacturing semiconductor device using multiple ion implantation masks Jul. 19, 2011
7968459 Ion implantation combined with in situ or ex situ heat treatment for improved field effect transistors Jun. 28, 2011
7642108 LED including photonic crystal structure Jan. 5, 2010
7579228 Disposable organic spacers Aug. 25, 2009
7494828 Substrate holder and device manufacturing method Feb. 24, 2009
6897164 Aperture masks for circuit fabrication May. 24, 2005
6809035 Hot plate annealing Oct. 26, 2004
6759328 Masks and method for contact hole exposure Jul. 6, 2004
6716736 Method for manufacturing an under-bump metallurgy layer Apr. 6, 2004
6667215 Method of making transistors Dec. 23, 2003
6548115 System and method for providing coating of substrates Apr. 15, 2003
6406988 Method of forming fine pitch interconnections employing magnetic masks Jun. 18, 2002
6248659 Method for forming an interconnect structure Jun. 19, 2001
6087274 Nanoscale X-Y-Z translation of nanochannel glass replica-based masks for making complex structures during patterning Jul. 11, 2000
6046066 Method of forming cantilever structure in microelectromanical system Apr. 4, 2000
5698063 Intermediate workpiece employing a mask for etching an aperture aligned with the crystal planes in the workpiece substrate Dec. 16, 1997
5627100 Method for the making of surface-emitting laser diodes with mechanical mask, the apertures having inclined flanks May. 6, 1997
5532188 Global planarization of multiple layers Jul. 2, 1996
5518963 Method for forming metal interconnection of semiconductor device May. 21, 1996
5494839 Dual photo-resist process for fabricating high density DRAM Feb. 27, 1996
5466636 Method of forming borderless contacts using a removable mandrel Nov. 14, 1995
5466636 Method of forming borderless contacts using a removable mandrel Nov. 14, 1995
5420067 Method of fabricatring sub-half-micron trenches and holes May. 30, 1995
5336630 Method of making semiconductor memory device Aug. 9, 1994
5174201 Thick film mask separation detection system Dec. 29, 1992
5147812 Fabrication method for a sub-micron geometry semiconductor device Sep. 15, 1992
5023191 Method of producing a semiconductor device using a single mask method for providing multiple masking patterns Jun. 11, 1991
4397078 Method and apparatus for measuring a gap distance between a mask and a wafer to be used in fabrication of semiconductor integrated circuits Aug. 9, 1983
4335161 Thin film transistors, thin film transistor arrays, and a process for preparing the same Jun. 15, 1982
4140610 Method of producing a PN junction type solar battery Feb. 20, 1979

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