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Class Information
Number: 438/942
Name: Semiconductor device manufacturing: process > Masking
Description: Art collection involving the use of a structure having openings therein to affect selective processing of underlying regions laid bare by said openings.










Sub-classes under this class:

Class Number Class Name Patents
438/943 Movable 32
438/948 Radiation resist 173
438/944 Shadow 106
438/945 Special (e.g., metal, etc.) 244
438/946 Step and repeat 46
438/947 Subphotolithographic processing 367


Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8709267 Double patterning method using tilt-angle deposition Apr. 29, 2014
8703000 Slimming method of carbon-containing thin film and oxidation apparatus Apr. 22, 2014
8677929 Method and apparatus for masking solar cell substrates for deposition Mar. 25, 2014
8679975 Method for forming trenches in a semiconductor component Mar. 25, 2014
8664042 Method for fabrication of configurable systems Mar. 4, 2014
8658440 Nitride semiconductor crystal with surface texture Feb. 25, 2014
8652874 Large scale patterned growth of aligned one-dimensional nanostructures Feb. 18, 2014
8642428 Semiconductor device including line-type active region and method for manufacturing the same Feb. 4, 2014
8637363 Methods of manufacturing a semiconductor device having a node array Jan. 28, 2014
8598038 Process for producing two interleaved patterns on a substrate Dec. 3, 2013
8592258 Semiconductor package and method of attaching semiconductor dies to substrates Nov. 26, 2013
8557704 Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures Oct. 15, 2013
8513105 Flexible integration of logic blocks with transistors of different threshold voltages Aug. 20, 2013
8513131 Fin field effect transistor with variable channel thickness for threshold voltage tuning Aug. 20, 2013
8491799 Method for forming magnetic tunnel junction cell Jul. 23, 2013
8461005 Method of manufacturing doping patterns Jun. 11, 2013
8461054 Method of manufacturing liquid crystal display device Jun. 11, 2013
8450833 Spacer double patterning that prints multiple CD in front-end-of-line May. 28, 2013
8440569 Method of eliminating a lithography operation May. 14, 2013
8415257 Enhanced adhesion of PECVD carbon on dielectric materials by providing an adhesion interface Apr. 9, 2013
8377766 Method of making thin film transistor Feb. 19, 2013
8372295 Extensions of self-assembled structures to increased dimensions via a "bootstrap" self-templating method Feb. 12, 2013
8358010 Method for realizing a nanometric circuit architecture between standard electronic components and semiconductor device obtained with said method Jan. 22, 2013
8350365 Mitigation of well proximity effect in integrated circuits Jan. 8, 2013
8349645 Mask and film formation method using the same Jan. 8, 2013
8343861 Ion implantation method, method of producing solid-state imaging device, solid-state imaging device, and electronic apparatus Jan. 1, 2013
8336000 Method for determining position of auxiliary pattern, method for manufacturing photomask, and method for manufacturing semiconductor device Dec. 18, 2012
8298956 Method for fabricating fine pattern Oct. 30, 2012
8283256 Methods of forming microdevice substrates using double-sided alignment techniques Oct. 9, 2012
8263485 Method for fabricating semiconductor device Sep. 11, 2012
8258052 Method of manufacturing silicon carbide semiconductor device Sep. 4, 2012
8222154 Fin and finFET formation by angled ion implantation Jul. 17, 2012
8211803 Spacer process for on pitch contacts and related structures Jul. 3, 2012
8178972 Semiconductor device and manufacturing method therefor May. 15, 2012
8163189 Method for producing a nanoporous substrate Apr. 24, 2012
8153991 Direct write lithography system Apr. 10, 2012
8143170 Manufacturing method of semiconductor device Mar. 27, 2012
8138090 Method for forming fine patterns in semiconductor device Mar. 20, 2012
8138058 Substrate with marker, manufacturing method thereof, laser irradiation apparatus, laser irradiation method, light exposure apparatus, and manufacturing method of semiconductor device Mar. 20, 2012
8123961 Extensions of self-assembled structures to increased dimensions via a "bootstrap" self-templating method Feb. 28, 2012
8119528 Nanoscale electrodes for phase change memory devices Feb. 21, 2012
8101530 Lithography patterning method Jan. 24, 2012
8083958 Patterning method using a combination of photolithography and copolymer self-assemblying lithography techniques Dec. 27, 2011
8058169 Interconnection architecture for semiconductor device Nov. 15, 2011
8053288 Method of making device of a display Nov. 8, 2011
8039203 Integrated circuits and methods of design and manufacture thereof Oct. 18, 2011
8030222 Structures with increased photo-alignment margins Oct. 4, 2011
8026149 Substrate with marker, manufacturing method thereof, laser irradiation apparatus, laser irradiation method, light exposure apparatus, and manufacturing method of semiconductor device Sep. 27, 2011
8021935 Thin film device fabrication process using 3D template Sep. 20, 2011
8021993 Method of carrying out an exposure process for a liquid crystal display device Sep. 20, 2011

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