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Class Information
Number: 438/940
Name: Semiconductor device manufacturing: process > Laser ablative material removal
Description: Art collection involving the removal of material from a semiconductor substrate by laser ablation.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8610294 Laser processing method and semiconductor device obtained by using the processing method Dec. 17, 2013
8604497 Radiation-emitting thin-film semiconductor chip Dec. 10, 2013
8551792 Dicing a semiconductor wafer Oct. 8, 2013
8551869 Roughening method and method for manufacturing light-emitting diode having roughened surface Oct. 8, 2013
8536024 Processing method for a workpiece, dividing method for a workpiece, and laser processing apparatus Sep. 17, 2013
8481342 Method of manufacturing semiconductor device, semiconductor device and semiconductor composite device Jul. 9, 2013
8409902 Ablation of film stacks in solar cell fabrication processes Apr. 2, 2013
8399331 Laser processing for high-efficiency thin crystalline silicon solar cell fabrication Mar. 19, 2013
RE43980 Laser decapsulation method Feb. 5, 2013
8334162 System and method for tracking and removing coating from an edge of a substrate Dec. 18, 2012
8334153 Semiconductor light emitting device and method of fabricating semiconductor light emitting device Dec. 18, 2012
8314014 Laser processing apparatus and laser processing method Nov. 20, 2012
8252667 Laser processing method for semiconductor wafer Aug. 28, 2012
8241945 Solar cells and methods of fabrication thereof Aug. 14, 2012
8227287 Partially transmitted imaged laser beam for scribing solar cell structures Jul. 24, 2012
8211731 Ablation of film stacks in solar cell fabrication processes Jul. 3, 2012
8211719 Method of processing substrate and method of manufacturing substrate for use in liquid ejection head Jul. 3, 2012
8207055 Method for generating an electrode layer pattern in an organic functional device Jun. 26, 2012
8202811 Manufacturing apparatus for selectively removing one or more material layers by laser ablation Jun. 19, 2012
8173552 Method of fabricating an identification mark utilizing a liquid film assisted by a laser May. 8, 2012
8148183 Method for manufacturing semiconductor light emitting device Apr. 3, 2012
8080467 Silicon-based visible and near-infrared optoelectric devices Dec. 20, 2011
8017022 Selective electroless plating for electronic substrates Sep. 13, 2011
7998840 Wafer laser processing method and apparatus Aug. 16, 2011
7977212 Method for manufacturing a photovoltaic module Jul. 12, 2011
7968389 Fabrication methods of thin film transistor substrates Jun. 28, 2011
7964430 Silicon layer on a laser transparent conductive oxide layer suitable for use in solar cell applications Jun. 21, 2011
7919352 Electrical connection in OLED devices Apr. 5, 2011
RE42193 Laser decapsulation method Mar. 1, 2011
7887712 Laser machining system and method Feb. 15, 2011
7879685 System and method for creating electric isolation between layers comprising solar cells Feb. 1, 2011
7795154 Method for manufacturing semiconductor device that uses laser ablation, to selectively remove one or more material layers Sep. 14, 2010
7754999 Laser micromachining and methods of same Jul. 13, 2010
7732264 Fabrication methods of thin film transistor substrates Jun. 8, 2010
7732258 Lead frame and method for fabricating semiconductor package employing the same Jun. 8, 2010
7696013 Connecting microsized devices using ablative films Apr. 13, 2010
7696012 Wafer dividing method Apr. 13, 2010
7682970 Maskless nanofabrication of electronic components Mar. 23, 2010
7679030 Energy-efficient, laser-based method and system for processing target material Mar. 16, 2010
7671295 Processing a memory link with a set of at least two laser pulses Mar. 2, 2010
7662672 Manufacturing process of leadframe-based BGA packages Feb. 16, 2010
7625810 Wafer processing method Dec. 1, 2009
7615499 Method for oxidizing a layer, and associated holding devices for a substrate Nov. 10, 2009
7582848 Energy-efficient, laser-based method and system for processing target material Sep. 1, 2009
7521383 Manufacturing method of semiconductor device Apr. 21, 2009
7482551 Processing a memory link with a set of at least two laser pulses Jan. 27, 2009
7465977 Method for producing a packaged integrated circuit Dec. 16, 2008
7449347 Repairing method of a thin film transistor array Nov. 11, 2008
7442629 Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate Oct. 28, 2008
7442644 Method for manufacturing nitride semiconductor wafer or nitride semiconductor device; nitride semiconductor wafer or nitride semiconductor device made by the same; and laser irradiating appara Oct. 28, 2008

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