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Class Information
Number: 438/940
Name: Semiconductor device manufacturing: process > Laser ablative material removal
Description: Art collection involving the removal of material from a semiconductor substrate by laser ablation.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7419912 |
Laser patterning of light emitting devices |
Sep. 2, 2008 |
| 7396706 |
Synchronization technique for forming a substantially stable laser output pulse profile having different wavelength peaks |
Jul. 8, 2008 |
| 7348261 |
Wafer scale thin film package |
Mar. 25, 2008 |
| 7338843 |
Method for producing an electronic component, especially a memory chip |
Mar. 4, 2008 |
| 7316936 |
Laser decapsulation method |
Jan. 8, 2008 |
| 7285428 |
Production method of electron source and image display |
Oct. 23, 2007 |
| 7241669 |
Method of forming a scribe line on a passive electronic component substrate |
Jul. 10, 2007 |
| 7227172 |
Group-III-element nitride crystal semiconductor device |
Jun. 5, 2007 |
| 7135405 |
Method to form an interconnect |
Nov. 14, 2006 |
| 7122489 |
Manufacturing method of composite sheet material using ultrafast laser pulses |
Oct. 17, 2006 |
| 7115503 |
Method and apparatus for processing thin metal layers |
Oct. 3, 2006 |
| 7115514 |
Semiconductor manufacturing using optical ablation |
Oct. 3, 2006 |
| 6998220 |
Method for the production of thin layer chip resistors |
Feb. 14, 2006 |
| 6995035 |
Method of making a top-emitting OLED device having improved power distribution |
Feb. 7, 2006 |
| 6967125 |
Quad flat no lead (QFN) grid array package, method of making and memory module and computer system including same |
Nov. 22, 2005 |
| 6894747 |
Manufacturing method for reflector, reflector, and liquid crystal display |
May. 17, 2005 |
| 6887804 |
Passivation processing over a memory link |
May. 3, 2005 |
| 6881687 |
Method for laser cleaning of a substrate surface using a solid sacrificial film |
Apr. 19, 2005 |
| 6878567 |
Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates |
Apr. 12, 2005 |
| 6872649 |
Method of manufacturing transparent conductor film and compound semiconductor light-emitting device with the film |
Mar. 29, 2005 |
| 6790689 |
Curved waveguide ring laser |
Sep. 14, 2004 |
| 6753253 |
Method of making wiring and logic corrections on a semiconductor device by use of focused ion beams |
Jun. 22, 2004 |
| 6734083 |
Dicing method and dicing apparatus for dicing plate-like workpiece |
May. 11, 2004 |
| 6720240 |
Silicon based nanospheres and nanowires |
Apr. 13, 2004 |
| 6667243 |
Etch damage repair with thermal annealing |
Dec. 23, 2003 |
| 6667252 |
Method of manufacturing compound semiconductor substrate |
Dec. 23, 2003 |
| 6617249 |
Method for making thin film bulk acoustic resonators (FBARS) with different frequencies on a single substrate and apparatus embodying the method |
Sep. 9, 2003 |
| 6602790 |
Method for patterning a multilayered conductor/substrate structure |
Aug. 5, 2003 |
| 6541369 |
Method and apparatus for reducing fixed charges in a semiconductor device |
Apr. 1, 2003 |
| 6527967 |
Thin piece forming method |
Mar. 4, 2003 |
| 6472295 |
Method and apparatus for laser ablation of a target material |
Oct. 29, 2002 |
| 6468902 |
Semiconductor device and its manufacturing method |
Oct. 22, 2002 |
| 6461929 |
Method for the fine tuning of a passive electronic component |
Oct. 8, 2002 |
| 6413839 |
Semiconductor device separation using a patterned laser projection |
Jul. 2, 2002 |
| 6400037 |
Method of marking on metallic layer, metallic layer with marks thereon and semiconductor device having the metallic layer |
Jun. 4, 2002 |
| 6383893 |
Method of forming a crack stop structure and diffusion barrier in integrated circuits |
May. 7, 2002 |
| 6348362 |
Manufacturing method of photovoltaic device |
Feb. 19, 2002 |
| 6333485 |
Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed beam |
Dec. 25, 2001 |
| 6303469 |
Thin microelectronic substrates and methods of manufacture |
Oct. 16, 2001 |
| 6168910 |
Method for removing residue and method for production of printed board having hole |
Jan. 2, 2001 |
| 6162651 |
Method and system for accurately marking the backside of the die for fault location isolation |
Dec. 19, 2000 |
| 6159832 |
Precision laser metallization |
Dec. 12, 2000 |
| 6143117 |
Process for transferring a thin-film structure to a temporary carrier |
Nov. 7, 2000 |
| 6107178 |
Methods for etching fuse openings in a semiconductor device |
Aug. 22, 2000 |
| 6063695 |
Simplified process for the fabrication of deep clear laser marks using a photoresist mask |
May. 16, 2000 |
| 6048741 |
Top-surface-metallurgy plate-up bonding and rewiring for multilayer devices |
Apr. 11, 2000 |
| 6043165 |
Methods of forming electrically interconnected lines using ultraviolet radiation as an organic compound cleaning agent |
Mar. 28, 2000 |
| 6037103 |
Method for forming hole in printed board |
Mar. 14, 2000 |
| 6019796 |
Method of manufacturing a thin film transistor with reduced parasitic capacitance and reduced feed-through voltage |
Feb. 1, 2000 |
| 5989989 |
Die and cube reroute process |
Nov. 23, 1999 |
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