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Class Information
Number: 438/935
Name: Semiconductor device manufacturing: process > Gas flow control
Description: Art collection involving gas flow manipulation in conjunction with semiconductor manufacture.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8658449 Semiconductor layer, method of manufacturing the same, laser diode, and method of manufacturing the same Feb. 25, 2014
8530329 Methods of fabricating semiconductor devices having various isolation regions Sep. 10, 2013
8469046 Method for parallel operation of reactors that generate moisture Jun. 25, 2013
8461062 Substrate processing apparatus and method for manufacturing semiconductor device Jun. 11, 2013
8389389 Semiconductor layer manufacturing method, semiconductor layer manufacturing apparatus, and semiconductor device manufactured using such method and apparatus Mar. 5, 2013
8367566 Method for manufacturing semiconductor device and method for processing substrate Feb. 5, 2013
8340827 Methods for controlling time scale of gas delivery into a processing chamber Dec. 25, 2012
8291935 Flexible gas mixing manifold Oct. 23, 2012
8048687 Processing method for recovering a damaged low-k film of a substrate and storage medium Nov. 1, 2011
7927907 Method of making silicon solar cells containing .mu.C silicon layers Apr. 19, 2011
7910494 Thermal processing furnace, gas delivery system therefor, and methods for delivering a process gas thereto Mar. 22, 2011
7829475 Baking method of quartz products, computer program and storage medium Nov. 9, 2010
7829353 Pulsed mass flow delivery system and method Nov. 9, 2010
7576018 Method for flexing a substrate during processing Aug. 18, 2009
7494941 Manufacturing method of semiconductor device, and substrate processing apparatus Feb. 24, 2009
7479443 Germanium deposition Jan. 20, 2009
7426939 Rotatable valve Sep. 23, 2008
7354874 Variable exhaust static pressure management apparatus Apr. 8, 2008
7253032 Method of flattening a crystallized semiconductor film surface by using a plate Aug. 7, 2007
7200498 System for remediating cross contamination in semiconductor manufacturing processes Apr. 3, 2007
7135418 Optimal operation of conformal silica deposition reactors Nov. 14, 2006
7086410 Substrate processing apparatus and substrate processing method Aug. 8, 2006
7026183 Long-wavelength semiconductor light emitting device and its manufacturing method Apr. 11, 2006
7018728 Boron phosphide-based semiconductor device and production method thereof Mar. 28, 2006
7008880 Method for fabricating semiconductor integrated circuit device Mar. 7, 2006
6949450 Method for integrated in-situ cleaning and subsequent atomic layer deposition within a single processing chamber Sep. 27, 2005
6921707 Low temperature metal oxide coating formation Jul. 26, 2005
6905963 Fabrication of B-doped silicon film by LPCVD method using BCI3 and SiH4 gases Jun. 14, 2005
6867152 Properties of a silica thin film produced by a rapid vapor deposition (RVD) process Mar. 15, 2005
6858508 SOI annealing method Feb. 22, 2005
6846747 Method for etching vias Jan. 25, 2005
6844260 Insitu post atomic layer deposition destruction of active species Jan. 18, 2005
6809015 Method for heat treatment of silicon wafers and silicon wafer Oct. 26, 2004
6806211 Device and method for processing substrate Oct. 19, 2004
6787377 Determining method of thermal processing condition Sep. 7, 2004
6720274 Method for fabricating a semiconductor device and a substrate processing apparatus Apr. 13, 2004
6716287 Processing chamber with flow-restricting ring Apr. 6, 2004
6706585 Chemical vapor deposition process for fabricating layered superlattice materials Mar. 16, 2004
6689677 CMOS circuit of GaAs/Ge on Si substrate Feb. 10, 2004
6686281 Method for fabricating a semiconductor device and a substrate processing apparatus Feb. 3, 2004
6645879 Method of forming a silicon oxide layer of a semiconductor device and method of forming a wiring having the same Nov. 11, 2003
6596641 Chemical vapor deposition methods Jul. 22, 2003
6596650 Method for fabricating semiconductor integrated circuit device Jul. 22, 2003
6573184 Apparatus and method for depositing thin film on wafer using atomic layer deposition Jun. 3, 2003
6569780 Method for fabricating semiconductor integrated circuit device May. 27, 2003
6553332 Method for evaluating process chambers used for semiconductor manufacturing Apr. 22, 2003
6518202 Method for fabricating semiconductor integrated circuit device Feb. 11, 2003
6422264 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply appar Jul. 23, 2002
6337224 Method of producing silicon thin-film photoelectric transducer and plasma CVD apparatus used for the method Jan. 8, 2002
6333272 Gas distribution apparatus for semiconductor processing Dec. 25, 2001

1 2 3 4

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