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Class Information
Number: 438/933
Name: Semiconductor device manufacturing: process > Germanium or silicon or ge-si on iii-v
Description: Art collection involving the formation of a hetero-interface between germanium or silicon or an alloy thereof with a III-V compound semiconductor.


Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
7611974 Multilayer structure and fabrication thereof Nov. 3, 2009
7592619 Epitaxy layer and method of forming the same Sep. 22, 2009
7592213 Tensile strained NMOS transistor using group III-N source/drain regions Sep. 22, 2009
7554138 Method of manufacturing a strained semiconductor layer, method of manufacturing a semiconductor device and semiconductor substrate suitable for use in such a method including having a thin del Jun. 30, 2009
7553774 Method of fabricating semiconductor optical device Jun. 30, 2009
7544585 Structure of strained silicon on insulator and method of manufacturing the same Jun. 9, 2009
7521365 Selective epitaxy process with alternating gas supply Apr. 21, 2009
7510932 Semiconductor devices having a field effect transistor and methods of fabricating the same Mar. 31, 2009
7501329 Wafer gettering using relaxed silicon germanium epitaxial proximity layers Mar. 10, 2009
7501331 Low-temperature metal-induced crystallization of silicon-germanium films Mar. 10, 2009
7498229 Transistor and in-situ fabrication process Mar. 3, 2009
7495250 Integrated circuit structures having a boron- and carbon-doped etch-stop and methods, devices and systems related thereto Feb. 24, 2009
7491612 Field effect transistor with a heterostructure and associated production method Feb. 17, 2009
7470580 Fabrication method of a semiconductor device Dec. 30, 2008
7470972 Complementary metal oxide semiconductor integrated circuit using uniaxial compressive stress and biaxial compressive stress Dec. 30, 2008
7442657 Producing stress-relaxed crystalline layer on a substrate Oct. 28, 2008
7435605 Method for fabricating a component having an electrical contact region Oct. 14, 2008
7432559 Silicide formation on SiGe Oct. 7, 2008
7393735 Structure for and method of fabricating a high-mobility field-effect transistor Jul. 1, 2008
7378305 Semiconductor integrated circuit and fabrication process thereof May. 27, 2008
7361574 Single-crystal silicon-on-glass from film transfer Apr. 22, 2008
7358112 Method of growing a semiconductor layer Apr. 15, 2008
7348284 Non-planar pMOS structure with a strained channel region and an integrated strained CMOS flow Mar. 25, 2008
7344933 Method of forming device having a raised extension region Mar. 18, 2008
7338886 Implantation-less approach to fabricating strained semiconductor on isolation wafers Mar. 4, 2008
7327036 Method for depositing a group III-nitride material on a silicon substrate and device therefor Feb. 5, 2008
7256107 Damascene process for use in fabricating semiconductor structures having micro/nano gaps Aug. 14, 2007
7241670 Method to form relaxed SiGe layer with high Ge content using co-implantation of silicon with boron or helium and hydrogen Jul. 10, 2007
7238622 Wafer bonded virtual substrate and method for forming the same Jul. 3, 2007
7232737 Treatment of a removed layer of silicon-germanium Jun. 19, 2007
7229865 Methods of making semiconductor-on-insulator thin film transistor constructions Jun. 12, 2007
7220632 Method of forming a semiconductor device and an optical device and structure thereof May. 22, 2007
7211521 Capping layer for crystallizing germanium, and substrate having thin crystallized germanium layer May. 1, 2007
7208357 Template layer formation Apr. 24, 2007
7202122 Cobalt silicidation process for substrates with a silicon--germanium layer Apr. 10, 2007
7202503 III-V and II-VI compounds as template materials for growing germanium containing film on silicon Apr. 10, 2007
7199015 Rare earth-oxides, rare earth-nitrides, rare earth-phosphides and ternary alloys with silicon Apr. 3, 2007
7192868 Method of obtaining release-standing micro structures and devices by selective etch removal of protective and sacrificial layer using the same Mar. 20, 2007
7186664 Methods and structures for metal interconnections in integrated circuits Mar. 6, 2007
7179727 Formation of lattice-tuning semiconductor substrates Feb. 20, 2007
7169226 Defect reduction by oxidation of silicon Jan. 30, 2007
7163854 Fabrication method of a semiconductor device Jan. 16, 2007
7163903 Method for making a semiconductor structure using silicon germanium Jan. 16, 2007
7148130 Semiconductor device and method of manufacturing the same Dec. 12, 2006
7148096 Method of manufacturing a semiconductor device having a gate electrode containing polycrystalline silicon-germanium Dec. 12, 2006
7138650 Semiconductor substrate, field-effect transistor, and their manufacturing method of the same Nov. 21, 2006
7129168 Method of estimating substrate temperature Oct. 31, 2006
7094671 Transistor with shallow germanium implantation region in channel Aug. 22, 2006
7081410 Controlling threading dislocation densities in Ge on Si using graded GeSi layers and planarization Jul. 25, 2006
7078300 Thin germanium oxynitride gate dielectric for germanium-based devices Jul. 18, 2006

1 2 3 4 5 6


 
 
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