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Class Information
Number: 438/932
Name: Semiconductor device manufacturing: process > Boron nitride semiconductor
Description: Art collection involving the use of semiconducting boron nitride in semiconductor manufacture.

Patents under this class:

Patent Number Title Of Patent Date Issued
7470611 In situ deposition of a low K dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application Dec. 30, 2008
7459718 Field effect transistor Dec. 2, 2008
7101779 Method of forming barrier layers Sep. 5, 2006
7056842 Method and apparatus for non-aggressive plasma-enhanced vapor deposition of dielectric films Jun. 6, 2006
6960537 Incorporation of nitrogen into high k dielectric film Nov. 1, 2005
6617668 Methods and devices using group III nitride compound semiconductor Sep. 9, 2003
5624853 Method for forming heterojunction bipolar transistors Apr. 29, 1997
5476812 Semiconductor heterojunction structure Dec. 19, 1995
5444017 Method of making cBN semiconductor device having an ohmic electrode Aug. 22, 1995
5326424 Cubic boron nitride phosphide films Jul. 5, 1994
5298461 Method of forming ohmic contact electrodes for n-type semiconductor cubic boron nitride Mar. 29, 1994
5227318 Method of making a cubic boron nitride bipolar transistor Jul. 13, 1993
5225367 Method for manufacturing an electronic device Jul. 6, 1993
5196366 Method of manufacturing electric devices Mar. 23, 1993
5145741 Converting ceramic materials to electrical conductors and semiconductors Sep. 8, 1992
5139970 Electric device and manufacturing method of the same Aug. 18, 1992
5081053 Method for forming a transistor having cubic boron nitride layer Jan. 14, 1992
5057454 Process for producing ohmic electrode for p-type cubic system boron nitride Oct. 15, 1991
5011790 Method of manufacturing cubic boron nitride p-n junction body Apr. 30, 1991

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