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Class Information
Number: 438/924
Name: Semiconductor device manufacturing: process > Doping > To facilitate selective etching
Description: Art collection under 914 involving doping selected regions of the semiconductor substrate to alter the etchibility of the doped regions.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8557691 Method of fabricating semiconductor device having buried wiring and related device Oct. 15, 2013
8557612 Method for fabricating micro and nanostructures in a material Oct. 15, 2013
8329570 Method of manufacturing semiconductor device Dec. 11, 2012
8163654 Method for fabricating fine pattern in semiconductor device Apr. 24, 2012
8021986 Method for producing a transistor with metallic source and drain Sep. 20, 2011
8019458 Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures Sep. 13, 2011
7887711 Method for etching chemically inert metal oxides Feb. 15, 2011
7867913 Method for fabricating fine pattern in semiconductor device Jan. 11, 2011
7807489 Light-emitting device with a protection layer to prevent the inter-diffusion of zinc (Zn) atoms Oct. 5, 2010
7799664 Method for selective epitaxial growth of source/drain areas Sep. 21, 2010
7794610 Optical components and production thereof Sep. 14, 2010
7662715 Thin film transistor array panel and method for manufacturing the same Feb. 16, 2010
7585424 Pattern reversal process for self aligned imprint lithography and device Sep. 8, 2009
7566660 Semiconductor device and method for manufacturing the same Jul. 28, 2009
7563711 Method of forming a carbon nanotube-based contact to semiconductor Jul. 21, 2009
7553771 Method of forming pattern of semiconductor device Jun. 30, 2009
7553758 Method of fabricating interconnections of microelectronic device using dual damascene process Jun. 30, 2009
7429534 Etching a nitride-based heterostructure Sep. 30, 2008
7396726 Methods of fabricating surrounded-channel transistors with directionally etched gate or insulator formation regions Jul. 8, 2008
7279383 Liquid crystal display device and method of fabricating the same Oct. 9, 2007
7247578 Method of varying etch selectivities of a film Jul. 24, 2007
7144820 Method of manufacturing a layer sequence and a method of manufacturing an integrated circuit Dec. 5, 2006
7074684 Elevated source drain disposable spacer CMOS Jul. 11, 2006
7049241 Method for forming a trench in a layer or a layer stack on a semiconductor wafer May. 23, 2006
6773991 Method of fabricating EEPROM having tunnel window area Aug. 10, 2004
6638781 Semiconductor device and method of fabricating the same Oct. 28, 2003
6553332 Method for evaluating process chambers used for semiconductor manufacturing Apr. 22, 2003
6498079 Method for selective source diffusion Dec. 24, 2002
6326300 Dual damascene patterned conductor layer formation method Dec. 4, 2001
6300156 Process for fabricating micromechanical devices Oct. 9, 2001
6287961 Dual damascene patterned conductor layer formation method without etch stop layer Sep. 11, 2001
6251802 Methods of forming carbon-containing layers Jun. 26, 2001
6136717 Method for producing a via hole to a doped region Oct. 24, 2000
5928969 Method for controlled selective polysilicon etching Jul. 27, 1999
5817174 Semiconductor substrate and method of treating semiconductor substrate Oct. 6, 1998
5811345 Planarization of shallow- trench- isolation without chemical mechanical polishing Sep. 22, 1998
5683546 Method of etching silicon substrate at different etching rates for different planes of the silicon to form an air bridge Nov. 4, 1997
5674758 Silicon on insulator achieved using electrochemical etching Oct. 7, 1997
5643803 Production method of a semiconductor dynamic sensor Jul. 1, 1997
5593906 Method of processing a polysilicon film on a single-crystal silicon substrate Jan. 14, 1997
5565060 Methods and compositions for the selective etching of silicon Oct. 15, 1996
5518966 Method for wet etching polysilicon May. 21, 1996
5500385 Method for manufacturing a silicon capacitor by thinning Mar. 19, 1996
5492596 Method of making a micromechanical silicon-on-glass tuning fork gyroscope Feb. 20, 1996
5445718 Electrochemical etch-stop on n-type silicon by injecting holes from a shallow p-type layer Aug. 29, 1995
5436174 Method of forming trenches in monocrystalline silicon carbide Jul. 25, 1995
5431777 Methods and compositions for the selective etching of silicon Jul. 11, 1995
5395802 Process for making semiconductor acceleration sensor having anti-etching layer Mar. 7, 1995
5358908 Method of creating sharp points and other features on the surface of a semiconductor substrate Oct. 25, 1994
5356829 Silicon device including a pn-junction acting as an etch-stop in a silicon substrate Oct. 18, 1994

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