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Class Information
Number: 438/914
Name: Semiconductor device manufacturing: process > Doping
Description: Art collection involving the doping of a semiconductor substrate with conductivity modifying impurities.

Sub-classes under this class:

Class Number Class Name Patents
438/915 Amphoteric doping 19
438/916 Autodoping control or utilization 37
438/919 Compensation doping 92
438/920 Controlling diffusion profile by oxidation 58
438/917 Deep level dopants (e.g., gold (au), chromium (cr), iron (fe), nickel (ni), etc.) 29
438/922 Diffusion along grain boundaries 18
438/923 Diffusion through a layer 82
438/925 Fluid growth doping control (e.g., delta doping, etc.) 112
438/921 Nonselective diffusion 5
438/918 Special or nonstandard dopant 79
438/924 To facilitate selective etching 103

Patents under this class:
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Patent Number Title Of Patent Date Issued
8642135 Systems and methods for plasma doping microfeature workpieces Feb. 4, 2014
8497194 Methods of forming doped regions in semiconductor substrates Jul. 30, 2013
8481412 Method of and apparatus for active energy assist baking Jul. 9, 2013
8470627 Method for manufacturing semiconductor light emitting device Jun. 25, 2013
8329567 Methods of forming doped regions in semiconductor substrates Dec. 11, 2012
8293629 High full-well capacity pixel with graded photodetector implant Oct. 23, 2012
8288256 Enhancing transistor characteristics by a late deep implantation in combination with a diffusion-free anneal process Oct. 16, 2012
8273642 Method of fabricating an NMOS transistor Sep. 25, 2012
8268729 Smooth and vertical semiconductor fin structure Sep. 18, 2012
8207051 Semiconductor surface modification Jun. 26, 2012
8017488 Manufacturing method of a NOR flash memory with phosphorous and arsenic ion implantations Sep. 13, 2011
7980198 Doping apparatus, doping method, and method for fabricating thin film transistor Jul. 19, 2011
7846822 Methods for controlling dopant concentration and activation in semiconductor structures Dec. 7, 2010
7816279 Semiconductor device and method for manufacturing the same Oct. 19, 2010
7795143 Substrate processing apparatus and manufacturing method of semiconductor device Sep. 14, 2010
7750405 Low-cost high-performance planar back-gate CMOS Jul. 6, 2010
7728347 ZnO layer and semiconductor light emitting device Jun. 1, 2010
7713761 Doping apparatus, doping method, and method for fabricating thin film transistor May. 11, 2010
7560367 Method for thermal processing with a RTP process using temperature spaces in radiation equilibrium Jul. 14, 2009
7368317 Method of producing an N-type diamond with high electrical conductivity May. 6, 2008
7361540 Method of reducing noise disturbing a signal in an electronic device Apr. 22, 2008
7341787 Process for producing highly doped semiconductor wafers, and dislocation-free highly doped semiconductor wafers Mar. 11, 2008
7314794 Low-cost high-performance planar back-gate CMOS Jan. 1, 2008
7250312 Doping method and method for fabricating thin film transistor Jul. 31, 2007
7232744 Method for implanting dopants within a substrate by tilting the substrate relative to the implant source Jun. 19, 2007
7176484 Use of an energy source to convert precursors into patterned semiconductors Feb. 13, 2007
7148131 Method for implanting ions in a semiconductor Dec. 12, 2006
6977204 Method for forming contact plug having double doping distribution in semiconductor device Dec. 20, 2005
6872643 Implant damage removal by laser thermal annealing Mar. 29, 2005
6872628 Method of manufacturing semiconductor device Mar. 29, 2005
6815318 Manufacturing method of semiconductor device Nov. 9, 2004
6812079 Method for a junction field effect transistor with reduced gate capacitance Nov. 2, 2004
6797596 Sacrificial deposition layer as screening material for implants into a wafer during the manufacture of a semiconductor device Sep. 28, 2004
6794277 Method of doping semiconductor layer, method of manufacturing thin film semiconductor device, and thin film semiconductor device Sep. 21, 2004
6716690 Uniformly doped source/drain junction in a double-gate MOSFET Apr. 6, 2004
6645839 Method for improving a doping profile for gas phase doping Nov. 11, 2003
6616786 Process for applying an ink-only label to a polymeric surface Sep. 9, 2003
6602768 MOS-gated power device with doped polysilicon body and process for forming same Aug. 5, 2003
6555451 Method for making shallow diffusion junctions in semiconductors using elemental doping Apr. 29, 2003
6503841 Oxide etch Jan. 7, 2003
6498079 Method for selective source diffusion Dec. 24, 2002
6486064 Shallow junction formation Nov. 26, 2002
6444550 Laser tailoring retrograde channel profile in surfaces Sep. 3, 2002
6432783 Method for doping a semiconductor device through a mask Aug. 13, 2002
6313398 Ga-doped multi-crytsalline silicon, Ga-doped multi-crystalline silicon wafer and method for producing the same Nov. 6, 2001
6180561 Complexing agent for thermal color proofing Jan. 30, 2001
6001770 Slipping layer for dye-donor element used in thermal dye transfer Dec. 14, 1999
5985728 Silicon on insulator process with recovery of a device layer from an etch stop layer Nov. 16, 1999
5972743 Precursor compositions for ion implantation of antimony and ion implantation process utilizing same Oct. 26, 1999
5895259 Polysilicon diffusion doping method employing a deposited doped oxide layer with a highly uniform thickness Apr. 20, 1999

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