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Class Information
Number: 438/911
Name: Semiconductor device manufacturing: process > Differential oxidation and etching
Description: Art collection involving differential oxidation combined with an etching process.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8557612 Method for fabricating micro and nanostructures in a material Oct. 15, 2013
8435861 Method of manufacturing a semiconductor device having different kinds of insulating films with different thicknesses May. 7, 2013
8163626 Enhancing NAND flash floating gate performance Apr. 24, 2012
7972933 Method of selective nitridation Jul. 5, 2011
7915176 Device comprising a field of tips used in biotechnology applications Mar. 29, 2011
7902021 Method for separately optimizing spacer width for two or more transistor classes using a recess spacer integration Mar. 8, 2011
7786016 Methods of uniformly removing silicon oxide and a method of removing a sacrificial oxide Aug. 31, 2010
7687353 Ion implantation method for high voltage device Mar. 30, 2010
7687370 Method of forming a semiconductor isolation trench Mar. 30, 2010
7425480 Semiconductor device and method of manufacture thereof Sep. 16, 2008
7303946 Method of manufacturing a semiconductor device using an oxidation process Dec. 4, 2007
7208325 Refreshing wafers having low-k dielectric materials Apr. 24, 2007
6890832 Radiation hardening method for shallow trench isolation in CMOS May. 10, 2005
6844225 Self-aligned mask formed utilizing differential oxidation rates of materials Jan. 18, 2005
6784115 Method of simultaneously implementing differential gate oxide thickness using fluorine bearing impurities Aug. 31, 2004
6777333 Method for fabricating semiconductor device Aug. 17, 2004
6759263 Method of patterning a layer of magnetic material Jul. 6, 2004
6610211 Method of processing internal surfaces of a chemical vapor deposition reactor Aug. 26, 2003
6555484 Method for controlling the oxidation of implanted silicon Apr. 29, 2003
6455440 Method for preventing polysilicon stringer in memory device Sep. 24, 2002
6368986 Use of selective ozone TEOS oxide to create variable thickness layers and spacers Apr. 9, 2002
6344416 Deliberate semiconductor film variation to compensate for radial processing differences, determine optimal device characteristics, or produce small productions Feb. 5, 2002
6335288 Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD Jan. 1, 2002
6239478 Semiconductor structure for a MOS transistor May. 29, 2001
6225167 Method of generating multiple oxide thicknesses by one oxidation step using NH3 nitridation followed by re-oxidation May. 1, 2001
6211058 Semiconductor device with multiple contact sizes Apr. 3, 2001
6087243 Method of forming trench isolation with high integrity, ultra thin gate oxide Jul. 11, 2000
6063670 Gate fabrication processes for split-gate transistors May. 16, 2000
6052261 Method for manufacturing magnetoresistance head Apr. 18, 2000
6043128 Semiconductor device handling multi-level voltages Mar. 28, 2000
6015736 Method and system for gate stack reoxidation control Jan. 18, 2000
5994216 Method of forming a reduced size contact in a dielectric layer by using bird's beak of oxidized polysilicon to create an etching mask Nov. 30, 1999
5972757 Method of forming a self aligned through-hole on a diffused layer Oct. 26, 1999
5922621 Quantum semiconductor device and a fabrication process thereof Jul. 13, 1999
5824601 Carboxylic acid etching solution and method Oct. 20, 1998
5798303 Etching method for use in fabrication of semiconductor devices Aug. 25, 1998
5707888 Oxide formed in semiconductor substrate by implantation of substrate with a noble gas prior to oxidation Jan. 13, 1998
5705027 Method of removing etching residues Jan. 6, 1998
5700628 Dry microlithography process Dec. 23, 1997
5686346 Method for enhancing field oxide thickness at field oxide perimeters Nov. 11, 1997
5679600 Double locos for submicron isolation Oct. 21, 1997
5674776 Semiconductor processing methods of forming field oxidation regions on a semiconductor substrate Oct. 7, 1997
5670412 Semiconductor processing methods of forming field oxidation regions on a semiconductor substrate Sep. 23, 1997
5654215 Method for fabrication of a non-symmetrical transistor Aug. 5, 1997
5650351 Method to form a capacitor having multiple pillars for advanced DRAMS Jul. 22, 1997
5627099 Method of manufacturing semiconductor device May. 6, 1997
5624861 Method of manufacturing semiconductor device Apr. 29, 1997
5612246 Method for manufacturing semiconductor substrate having buck transistor and SOI transistor areas Mar. 18, 1997
5595922 Process for thickening selective gate oxide regions Jan. 21, 1997
5578518 Method of manufacturing a trench isolation having round corners Nov. 26, 1996

1 2 3 4

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