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Class Information
Number: 438/909
Name: Semiconductor device manufacturing: process > Controlled atmosphere
Description: Art collection involving use of a regulated gaseous environment (e.g., inert gases, specifically proportioned mixtures, etc.).

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8657942 Trap device Feb. 25, 2014
8597401 Exhausting method and gas processing apparatus Dec. 3, 2013
8575039 Surface treating method and film depositing method Nov. 5, 2013
8485126 Coating apparatus including a glove part and a controller for stopping coating Jul. 16, 2013
8216950 Capacitive element fabrication method Jul. 10, 2012
8198103 Addition of ballast hydrocarbon gas to doped polysilicon etch masked by resist Jun. 12, 2012
8119547 Method of manufacturing a semiconductor integrated circuit device including elimination of static charge of a treated wafer Feb. 21, 2012
8025736 Semiconductor device fabrication equipment for performing PEOX process and method including cleaning the equipment with remotely produced plasma Sep. 27, 2011
8012886 Leadframe treatment for enhancing adhesion of encapsulant thereto Sep. 6, 2011
7993820 Pattern manufacturing equipments, organic thin-film transistors and manufacturing methods for organic thin-film transistor Aug. 9, 2011
7968459 Ion implantation combined with in situ or ex situ heat treatment for improved field effect transistors Jun. 28, 2011
7943510 Methods of processing a substrate and forming a micromagnetic device May. 17, 2011
7857880 Semiconductor manufacturing facility utilizing exhaust recirculation Dec. 28, 2010
7851233 E-chuck for automated clamped force adjustment and calibration Dec. 14, 2010
7622782 Pressure sensors and methods of making the same Nov. 24, 2009
7611579 Systems and methods for synthesis of extended length nanostructures Nov. 3, 2009
7569484 Plasma and electron beam etching device and method Aug. 4, 2009
7514306 Method for manufacturing semiconductor device Apr. 7, 2009
7399708 Method of treating a composite spin-on glass/anti-reflective material prior to cleaning Jul. 15, 2008
7390758 Method of manufacturing a semiconductor integrated circuit device with elimination of static charge Jun. 24, 2008
7329308 Air handling and chemical filtration system and method Feb. 12, 2008
7172981 Semiconductor integrated circuit device manufacturing method including static charge elimination Feb. 6, 2007
7163849 Fabrication method of semiconductor integrated circuit device Jan. 16, 2007
7135418 Optimal operation of conformal silica deposition reactors Nov. 14, 2006
7118683 Methods of etching silicon-oxide-containing compositions Oct. 10, 2006
7109129 Optimal operation of conformal silica deposition reactors Sep. 19, 2006
7090716 Single phase fluid imprint lithography method Aug. 15, 2006
7064084 Oxide film forming method Jun. 20, 2006
7049154 Vapor phase growth method by controlling the heat output in the gas introduction region May. 23, 2006
6977225 Chemical vapor deposition of titanium from titanium tetrachloride and hydrocarbon reactants Dec. 20, 2005
6962878 Method to reduce photoresist mask line dimensions Nov. 8, 2005
6933236 Method for forming pattern using argon fluoride photolithography Aug. 23, 2005
6933249 Method of fabricating semiconductor device Aug. 23, 2005
6929985 Air filter, method of manufacturing air filter, local facility, clean room, treating agent, and method of manufacturing filter medium Aug. 16, 2005
6903030 System and method for heat treating semiconductor Jun. 7, 2005
6890866 Method for manufacturing semiconductor device May. 10, 2005
6867152 Properties of a silica thin film produced by a rapid vapor deposition (RVD) process Mar. 15, 2005
6841056 Apparatus and method for treating a substrate electrochemically while reducing metal corrosion Jan. 11, 2005
6838359 Suppression of n-type autodoping in low-temperature Si and SiGe epitaxy Jan. 4, 2005
6833306 Deuterium treatment of semiconductor device Dec. 21, 2004
6809035 Hot plate annealing Oct. 26, 2004
6787377 Determining method of thermal processing condition Sep. 7, 2004
6782907 Gas recirculation flow control method and apparatus for use in vacuum system Aug. 31, 2004
6689699 Method for manufacturing a semiconductor device using recirculation of a process gas Feb. 10, 2004
6670282 Method and apparatus for producing silicon carbide crystal Dec. 30, 2003
6642078 Method for manufacturing diode subassemblies used in rectifier assemblies of engine driven generators Nov. 4, 2003
6559053 Method of passivating an oxide surface subjected to a conductive material anneal May. 6, 2003
6524952 Method of forming a titanium silicide layer on a substrate Feb. 25, 2003
6521477 Vacuum package fabrication of integrated circuit components Feb. 18, 2003
6497734 Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput Dec. 24, 2002

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