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Class Information
Number: 438/908
Name: Semiconductor device manufacturing: process > Continuous processing > Utilizing cluster apparatus
Description: Art collection wherein the continuous processing is conducted in an apparatus having a plurality of processing chambers having associated handling means to move the semiconductor substrate therebetween.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8691019 Process for cleaning a compound semiconductor wafer Apr. 8, 2014
8492253 Method of forming contacts for a back-contact solar cell Jul. 23, 2013
8278135 Highly pure film formation method for light emitting device using gas from evaporated electroluminescent source Oct. 2, 2012
8248584 Exposure apparatus and device manufacturing method Aug. 21, 2012
8227355 Method and apparatus of fabricating semiconductor device Jul. 24, 2012
8207069 Advanced mixing method for integrated tool having site-isolated reactors Jun. 26, 2012
8110509 Method of fabricating light emitting devices Feb. 7, 2012
8087380 Evaporative system for solar cell fabrication Jan. 3, 2012
8034190 Substrate processing apparatus and substrate processing method Oct. 11, 2011
7993820 Pattern manufacturing equipments, organic thin-film transistors and manufacturing methods for organic thin-film transistor Aug. 9, 2011
7947584 Suitably short wavelength light for laser annealing of silicon in DSA type systems May. 24, 2011
7888217 Method for fabricating a gate dielectric of a field effect transistor Feb. 15, 2011
7826032 Circulation system for high refractive index liquid in pattern forming apparatus Nov. 2, 2010
7763503 Thin film semiconductor device and method of manufacturing the same Jul. 27, 2010
7682987 Device for processing substrate and method of manufacturing semiconductor device Mar. 23, 2010
7572686 System for thin film deposition utilizing compensating forces Aug. 11, 2009
7432177 Post-ion implant cleaning for silicon on insulator substrate preparation Oct. 7, 2008
7358175 Serial thermal processor arrangement Apr. 15, 2008
7353379 Methods for configuring a plasma cluster tool Apr. 1, 2008
7313452 Substrate transfer controlling apparatus and substrate transferring method Dec. 25, 2007
7144813 Method and apparatus for thermally processing microelectronic workpieces Dec. 5, 2006
7132016 System for and method of manufacturing a large-area backplane by use of a small-area shadow mask Nov. 7, 2006
7097712 Apparatus for processing a semiconductor Aug. 29, 2006
7049154 Vapor phase growth method by controlling the heat output in the gas introduction region May. 23, 2006
6952622 Robot pre-positioning in a wafer processing system Oct. 4, 2005
RE38760 Controlled etching of oxides via gas phase reactions Jul. 19, 2005
6897100 Method for processing semiconductor device apparatus for processing a semiconductor and apparatus for processing semiconductor device May. 24, 2005
6865437 Robot pre-positioning in a wafer processing system Mar. 8, 2005
6843809 Vacuum/purge operation of loadlock chamber and method of transferring a wafer using said operation Jan. 18, 2005
6797617 Reduced cross-contamination between chambers in a semiconductor processing tool Sep. 28, 2004
6776805 Semiconductor manufacturing apparatus having a moisture measuring device Aug. 17, 2004
6772029 Wafer transfer control apparatus and method for transferring wafer Aug. 3, 2004
6750155 Methods to minimize moisture condensation over a substrate in a rapid cycle chamber Jun. 15, 2004
6743719 Method for forming a conductive copper structure Jun. 1, 2004
6693048 High-pressure anneal process for integrated circuits Feb. 17, 2004
6686230 Semiconducting devices and method of making thereof Feb. 3, 2004
6672358 Sample processing system Jan. 6, 2004
6657154 Semiconductor manufacturing apparatus and manufacturing method for thin film semiconductor device Dec. 2, 2003
6566175 Method of manufacturing gate insulated field effect transistors May. 20, 2003
6558962 Method of manufacturing semiconductor devices with use of wafer carrier having conditioning units May. 6, 2003
6541363 Antifuse manufacturing process Apr. 1, 2003
6506693 Multiple loadlock system Jan. 14, 2003
6497734 Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput Dec. 24, 2002
6496746 Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool Dec. 17, 2002
6482752 Substrate processing apparatus and method and a manufacturing method of a thin film semiconductor device Nov. 19, 2002
6448136 Method of manufacturing flash memory Sep. 10, 2002
6429139 Serial wafer handling mechanism Aug. 6, 2002
6426303 Processing system Jul. 30, 2002
6410455 Wafer processing system Jun. 25, 2002
6333259 Semiconductor device and apparatus and method for manufacturing the same Dec. 25, 2001

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