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Class Information
Number: 438/907
Name: Semiconductor device manufacturing: process > Continuous processing
Description: Art collection involving carrying out process steps in semiconductor manufacture in a continual manner.

Sub-classes under this class:

Class Number Class Name Patents
438/908 Utilizing cluster apparatus 107

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8501499 Adaptive recipe selector Aug. 6, 2013
8492253 Method of forming contacts for a back-contact solar cell Jul. 23, 2013
8420554 Wafer support ring Apr. 16, 2013
8236596 Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing Aug. 7, 2012
8227355 Method and apparatus of fabricating semiconductor device Jul. 24, 2012
8207069 Advanced mixing method for integrated tool having site-isolated reactors Jun. 26, 2012
8163631 Methods for discretized processing and process sequence integration of regions of a substrate Apr. 24, 2012
8058154 Methods for discretized processing and process sequence integration of regions of a substrate Nov. 15, 2011
7993820 Pattern manufacturing equipments, organic thin-film transistors and manufacturing methods for organic thin-film transistor Aug. 9, 2011
7638377 Semiconductor device and manufacturing method thereof Dec. 29, 2009
7482286 Method for forming dielectric or metallic films Jan. 27, 2009
7432177 Post-ion implant cleaning for silicon on insulator substrate preparation Oct. 7, 2008
7410826 Apparatus for manufacturing an electronic device, method of manufacturing an electronic device, and program for manufacturing an electronic device Aug. 12, 2008
7358175 Serial thermal processor arrangement Apr. 15, 2008
7354525 Specimen surface processing apparatus and surface processing method Apr. 8, 2008
7353379 Methods for configuring a plasma cluster tool Apr. 1, 2008
7313452 Substrate transfer controlling apparatus and substrate transferring method Dec. 25, 2007
7199022 Manufacturing method of semiconductor device Apr. 3, 2007
7157293 Method for making a semiconductor light emitting device Jan. 2, 2007
7157386 Photoresist application over hydrophobic surfaces Jan. 2, 2007
7155360 Process variation detector and process variation detecting method Dec. 26, 2006
7144813 Method and apparatus for thermally processing microelectronic workpieces Dec. 5, 2006
7135418 Optimal operation of conformal silica deposition reactors Nov. 14, 2006
7132016 System for and method of manufacturing a large-area backplane by use of a small-area shadow mask Nov. 7, 2006
7097712 Apparatus for processing a semiconductor Aug. 29, 2006
7098077 Semiconductor chip singulation method Aug. 29, 2006
7098150 Method for novel deposition of high-k MSiON dielectric films Aug. 29, 2006
7078272 Wafer scale integration packaging and method of making and using the same Jul. 18, 2006
7037842 Method and apparatus for dissolving a gas into a liquid for single wet wafer processing May. 2, 2006
7018855 Process controls for improved wafer uniformity using integrated or standalone metrology Mar. 28, 2006
6951803 Method to prevent passivation layer peeling in a solder bump formation process Oct. 4, 2005
6952622 Robot pre-positioning in a wafer processing system Oct. 4, 2005
6946354 Substrate and manufacturing method therefor Sep. 20, 2005
6946411 Method and system for improving the efficiency of a mechanical alignment tool Sep. 20, 2005
6943066 Active matrix backplane for controlling controlled elements and method of manufacture thereof Sep. 13, 2005
6930046 Single workpiece processing system Aug. 16, 2005
6927177 Chemical mechanical electropolishing system Aug. 9, 2005
6924214 Method for calculating a time-related fill level signal Aug. 2, 2005
6884701 Process for fabricating semiconductor device Apr. 26, 2005
6872662 Method for detecting the endpoint of a chemical mechanical polishing (CMP) process Mar. 29, 2005
6838359 Suppression of n-type autodoping in low-temperature Si and SiGe epitaxy Jan. 4, 2005
6787377 Determining method of thermal processing condition Sep. 7, 2004
6777355 Manufacturing apparatus and manufacturing method for semiconductor device Aug. 17, 2004
6767846 Method of securing a substrate in a semiconductor processing machine Jul. 27, 2004
6743733 Process for producing a semiconductor device including etching using a multi-step etching treatment having different gas compositions in each step Jun. 1, 2004
6734102 Plasma treatment for copper oxide reduction May. 11, 2004
6670290 Manufacturing apparatus and manufacturing method for semiconductor device Dec. 30, 2003
6648974 Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction Nov. 18, 2003
6642141 In-situ silicon nitride and silicon based oxide deposition with graded interface for damascene application Nov. 4, 2003
6594536 Method and computer program for using tool performance data for dynamic dispatch of wafer processing to increase quantity of output Jul. 15, 2003

1 2 3

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