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Class Information
Number: 438/906
Name: Semiconductor device manufacturing: process > Cleaning of wafer as interim step
Description: Art collection involving cleaning a semiconductive wafer as a step between other processing steps.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8703605 High yield and high throughput method for the manufacture of integrated circuit devices of improved integrity, performance and reliability Apr. 22, 2014
8664012 Combined silicon oxide etch and contamination removal process Mar. 4, 2014
8664092 Method for cleaning silicon wafer, and method for producing epitaxial wafer using the cleaning method Mar. 4, 2014
8652943 Method of processing substrate Feb. 18, 2014
8598023 Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor device Dec. 3, 2013
8591809 Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same Nov. 26, 2013
8575039 Surface treating method and film depositing method Nov. 5, 2013
8545640 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus Oct. 1, 2013
8529707 Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein Sep. 10, 2013
8529783 Method for backside polymer reduction in dry-etch process Sep. 10, 2013
8501636 Method for fabricating silicon dioxide layer Aug. 6, 2013
8500913 Methods for treating surfaces, and methods for removing one or more materials from surfaces Aug. 6, 2013
8486201 Method for drying a semiconductor wafer Jul. 16, 2013
8475666 Method for making toughening agent materials Jul. 2, 2013
8470095 Process and installation for surface preparation by dielectric barrier discharge Jun. 25, 2013
8466071 Method for etching single wafer Jun. 18, 2013
8455372 Method for cleaning and passivating gallium arsenide surface autologous oxide and depositing AL203 dielectric Jun. 4, 2013
8440573 Method and apparatus for pattern collapse free wet processing of semiconductor devices May. 14, 2013
8419964 Apparatus and method for edge bevel removal of copper from silicon wafers Apr. 16, 2013
8404052 Method for cleaning the surface of a silicon substrate Mar. 26, 2013
8387674 Chip on wafer bonder Mar. 5, 2013
8377219 Method for cleaning a semiconductor wafer composed of silicon directly after a process of polishing of the semiconductor wafer Feb. 19, 2013
8367545 System and method for monitoring copper barrier layer preclean process Feb. 5, 2013
8357615 Method of manufacturing semiconductor device Jan. 22, 2013
8303723 Liquid processing apparatus, liquid processing method, and storage medium Nov. 6, 2012
8293646 Semiconductor device manufacturing method and substrate processing apparatus Oct. 23, 2012
8278186 Wafer cleaning method and wafer bonding method using the same Oct. 2, 2012
8268085 Methods for forming metal gate transistors Sep. 18, 2012
8268735 Semiconductor device manufacturing method and method for reducing microroughness of semiconductor surface Sep. 18, 2012
8263468 Thin body semiconductor devices Sep. 11, 2012
8236109 Component cleaning method and storage medium Aug. 7, 2012
8236485 Photoresist removal Aug. 7, 2012
8232123 Organic light emitting diode display with improved on-current, and method for manufacturing the same Jul. 31, 2012
8207060 High yield and high throughput method for the manufacture of integrated circuit devices of improved integrity, performance and reliability Jun. 26, 2012
8187389 Method of removing resist and apparatus therefor May. 29, 2012
8183156 Method of etching a material surface May. 22, 2012
8183157 Method of forming capacitors, and methods of utilizing silicon dioxide-containing masking structures May. 22, 2012
8173934 Dry cleaning apparatus and method May. 8, 2012
8153527 Method for reducing sidewall etch residue Apr. 10, 2012
8153518 Method for fabricating metal interconnection of semiconductor device Apr. 10, 2012
8153524 Providing superior electromigration performance and reducing deterioration of sensitive low-k dielectrics in metallization systems of semiconductor devices Apr. 10, 2012
8129275 Process for manufacturing semiconductor integrated circuit device Mar. 6, 2012
8101025 Method for controlling corrosion of a substrate Jan. 24, 2012
8097538 Method of manufacturing semiconductor device Jan. 17, 2012
8093137 Method of manufacturing semiconductor wafer Jan. 10, 2012
8092760 Scanning arm for semiconductor wafer pollutant measurement apparatus and scanning device using the same Jan. 10, 2012
8083862 Method and system for monitoring contamination on a substrate Dec. 27, 2011
8034190 Substrate processing apparatus and substrate processing method Oct. 11, 2011
8021565 Surface treatment method, etching method, and method for manufacturing electronic device Sep. 20, 2011
8007594 Method for manufacturing semiconductor device Aug. 30, 2011

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