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Class Information
Number: 438/903
Name: Semiconductor device manufacturing: process > Catalyst aided deposition
Description: Art collection involving the use of a catalyst to facilitate material deposition.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8497144 Method for manufacturing light emitting chip having buffer layer with nitride semiconductor in carbon nano tube structure Jul. 30, 2013
8350391 Sheet structure, semiconductor device and method of growing carbon structure Jan. 8, 2013
8258060 Sheet structure, semiconductor device and method of growing carbon structure Sep. 4, 2012
8148708 Resistive memory device and method of fabricating the same Apr. 3, 2012
7994017 Method of manufacturing silicon carbide self-aligned epitaxial MOSFET for high powered device applications Aug. 9, 2011
7888271 Method of manufacturing silicon nano-structure Feb. 15, 2011
7842539 Zinc oxide semiconductor and method of manufacturing the same Nov. 30, 2010
7601639 Method for conditioning a microelectronics device deposition chamber Oct. 13, 2009
7582507 Catalyst support substrate, method for growing carbon nanotubes using the same, and the transistor using carbon nanotubes Sep. 1, 2009
7521361 Method for manufacturing wiring substrate Apr. 21, 2009
7446044 Carbon nanotube switches for memory, RF communications and sensing applications, and methods of making the same Nov. 4, 2008
7410911 Method for stabilizing high pressure oxidation of a semiconductor device Aug. 12, 2008
7241690 Method for conditioning a microelectronics device deposition chamber Jul. 10, 2007
7183131 Process for producing a nanoelement arrangement, and nanoelement arrangement Feb. 27, 2007
7044821 Method of manufacturing a plasma display panel by decomposing impurities in exhaust gas with a catalyst May. 16, 2006
6992000 Method of plating nonconductor product Jan. 31, 2006
6955996 Method for stabilizing high pressure oxidation of a semiconductor device Oct. 18, 2005
6949478 Oxide film forming method Sep. 27, 2005
6936906 Integration of barrier layer and seed layer Aug. 30, 2005
6844260 Insitu post atomic layer deposition destruction of active species Jan. 18, 2005
6780664 Nanotube tip for atomic force microscope Aug. 24, 2004
6774052 Method of making nanotube permeable base transistor Aug. 10, 2004
6653212 Method and apparatus for thin-film deposition, and method of manufacturing thin-film semiconductor device Nov. 25, 2003
6596651 Method for stabilizing high pressure oxidation of a semiconductor device Jul. 22, 2003
6495458 Method for producing low carbon/oxygen conductive layers Dec. 17, 2002
6451694 Control of abnormal growth in dichloro silane (DCS) based CVD polycide WSix films Sep. 17, 2002
6423649 Method and apparatus for stabilizing high pressure oxidation of a semiconductor device Jul. 23, 2002
6294404 Semiconductor integrated circuit having function of reducing a power consumption and semiconductor integrated circuit system comprising this semiconductor integrated circuit Sep. 25, 2001
6291364 Method and apparatus for stabilizing high pressure oxidation of a semiconductor device Sep. 18, 2001
6126989 Copper electroless deposition on a titanium-containing surface Oct. 3, 2000
5792705 Optimized planarization process for SOG filled vias Aug. 11, 1998
5508228 Compliant electrically connective bumps for an adhesive flip chip integrated circuit device and methods for forming same Apr. 16, 1996
5470800 Method for forming an interlayer film Nov. 28, 1995
5366919 Method of making a memory cell of a semiconductor memory device Nov. 22, 1994
5360768 Method of forming oxide film Nov. 1, 1994
5290721 Method of making a stacked semiconductor nonvolatile memory device Mar. 1, 1994
5231056 Tungsten silicide (WSi.sub.x) deposition process for semiconductor manufacture Jul. 27, 1993
5198389 Method of metallizing contact holes in a semiconductor device Mar. 30, 1993
5063169 Selectively plating conductive pillars in manufacturing a semiconductor device Nov. 5, 1991
4897150 Method of direct write desposition of a conductor on a semiconductor Jan. 30, 1990
4873119 Catalytic deposition of semiconductors Oct. 10, 1989
4843030 Semiconductor processing by a combination of photolytic, pyrolytic and catalytic processes Jun. 27, 1989
4822749 Self-aligned metallization for semiconductor device and process using selectively deposited tungsten Apr. 18, 1989
4784963 Method for light-induced photolytic deposition simultaneously independently controlling at least two different frequency radiations during the process Nov. 15, 1988
4735921 Nitridation of silicon and other semiconductors using alkali metal catalysts Apr. 5, 1988
4701347 Method for growing patterned metal layers Oct. 20, 1987
4696702 Method of depositing wide bandgap amorphous semiconductor materials Sep. 29, 1987
4696834 Silicon-containing coatings and a method for their preparation Sep. 29, 1987
4681640 Laser-induced chemical vapor deposition of germanium and doped-germanium films Jul. 21, 1987
4631804 Technique for reducing substrate warpage springback using a polysilicon subsurface strained layer Dec. 30, 1986

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