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Class Information
Number: 438/800
Name: Semiconductor device manufacturing: process > Miscellaneous
Description: Process not provided for above.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8663532 Masking techniques and contact imprint reticles for dense semiconductor fabrication Mar. 4, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8658532 Method and material for forming a double exposure lithography pattern Feb. 25, 2014
8627243 Methods for optimizing conductor patterns for ECP and CMP in semiconductor processing Jan. 7, 2014
8592107 Method and apparatus of providing overlay Nov. 26, 2013
8524611 Method and apparatus for inline deposition of materials on a non-planar surface Sep. 3, 2013
8480319 Coating and developing apparatus, coating and developing method and non-transitory tangible medium Jul. 9, 2013
8475666 Method for making toughening agent materials Jul. 2, 2013
8470721 Magnetic processing of operating electronic materials Jun. 25, 2013
8455375 Glass plate for display panels, process for producing it, and process for producing TFT panel Jun. 4, 2013
8449805 Masking techniques and contact imprint reticles for dense semiconductor fabrication May. 28, 2013
8452455 Control device and control method of plasma processing system, and storage medium storing control program May. 28, 2013
8415260 Chip identification for organic laminate packaging and methods of manufacture Apr. 9, 2013
8415261 Capping before barrier-removal IC fabrication method Apr. 9, 2013
8409359 Substrate processing apparatus, substrate processing method and storage medium Apr. 2, 2013
8367565 Methods and systems of transferring, docking and processing substrates Feb. 5, 2013
8368106 Gradient composite material and method of manufacturing the same Feb. 5, 2013
8354331 Multiplying pattern density by single sidewall imaging transfer Jan. 15, 2013
8349283 Metal recovery method, metal recovery apparatus, gas exhaust system and film forming device using same Jan. 8, 2013
8342761 Coating/developing apparatus and coating/developing method Jan. 1, 2013
8329360 Method and apparatus of providing overlay Dec. 11, 2012
8324120 Interfering excitations in FQHE fluids Dec. 4, 2012
8318032 Method to pattern metallized substrates using a high intensity light source Nov. 27, 2012
8313536 Functional member having surface cleanliness Nov. 20, 2012
8314027 Wafer electroless plating system and associated methods Nov. 20, 2012
8293545 Critical dimension for trench and vias Oct. 23, 2012
8293663 CCD sensors with multiple contact patterns Oct. 23, 2012
8273670 Load lock design for rapid wafer heating Sep. 25, 2012
8268394 Fabrication of metamaterials Sep. 18, 2012
8268734 Methods and systems of transferring, docking and processing substrates Sep. 18, 2012
8207069 Advanced mixing method for integrated tool having site-isolated reactors Jun. 26, 2012
8207058 Electron beam induced deposition of interface to carbon nanotube Jun. 26, 2012
8193103 CCD sensors with multiple contact patterns Jun. 5, 2012
8183496 Method of forming a pattern on a work piece, method of shaping a beam of electromagnetic radiation for use in said method, and aperture for shaping a beam of electromagnetic radiation May. 22, 2012
8163469 Coating and developing apparatus, coating and developing method, and storage medium Apr. 24, 2012
8133823 Method for picking up semiconductor chips from a wafer table and method for mounting semiconductor chips on a substrate Mar. 13, 2012
8119547 Method of manufacturing a semiconductor integrated circuit device including elimination of static charge of a treated wafer Feb. 21, 2012
8110510 Low temperature synthesis of nanowires in solution Feb. 7, 2012
8110511 Methods and systems of transferring a substrate to minimize heat loss Feb. 7, 2012
8093103 Multiple chip module and package stacking method for storage devices Jan. 10, 2012
8084375 Hot edge ring with sloped upper surface Dec. 27, 2011
8080481 Method of manufacturing a nanowire device Dec. 20, 2011
8027528 Method for calculating height of chuck top and program storage medium for storing same method Sep. 27, 2011
8017430 Structured silicon anode Sep. 13, 2011
8004018 Fabrication method of electronic devices based on aligned high aspect ratio nanoparticle networks Aug. 23, 2011
7989797 Connectible nanotube circuit Aug. 2, 2011
7968474 Methods for nanowire alignment and deposition Jun. 28, 2011
7960297 Load lock design for rapid wafer heating Jun. 14, 2011
7955946 Methods of determining x-y spatial orientation of a semiconductor substrate comprising an integrated circuit, methods of positioning a semiconductor substrate comprising an integrated circuit, Jun. 7, 2011
7948096 Semiconductor using specific contact angle for immersion lithography May. 24, 2011

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