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Class Information
Number: 438/8
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition > Optical characteristic sensed > Chemical etching
Description: Process having a step of chemically etching the semiconductor substrate in conjunction with the sensing of an optical property of the process or of the semiconductor device.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618831 |
Method of monitoring the manufacture of interferometric modulators |
Nov. 17, 2009 |
| 7620511 |
Method for determining plasma characteristics |
Nov. 17, 2009 |
| 7602032 |
Memory having cap structure for magnetoresistive junction and method for structuring the same |
Oct. 13, 2009 |
| 7582490 |
Controlled fabrication of gaps in electrically conducting structures |
Sep. 1, 2009 |
| 7579309 |
Methods for characterizing defects on silicon surfaces and etching composition and treatment process therefor |
Aug. 25, 2009 |
| 7556972 |
Detection and characterization of SiCOH-based dielectric materials during device fabrication |
Jul. 7, 2009 |
| 7527704 |
Method for preparing film structure comprising ferroelectric single crystal layer |
May. 5, 2009 |
| 7508531 |
System and method for measuring germanium concentration for manufacturing control of BiCMOS films |
Mar. 24, 2009 |
| 7497958 |
Methods of forming capacitors |
Mar. 3, 2009 |
| 7482177 |
Method for manufacturing optical device, and optical device wafer |
Jan. 27, 2009 |
| 7476556 |
Systems and methods for plasma processing of microfeature workpieces |
Jan. 13, 2009 |
| 7438392 |
Microfluidic substrates having improved fluidic channels |
Oct. 21, 2008 |
| 7439068 |
Plasma monitoring method, plasma processing method, method of manufacturing semiconductor device, and plasma processing system |
Oct. 21, 2008 |
| 7402510 |
Etchant and method for forming bumps |
Jul. 22, 2008 |
| 7399711 |
Method for controlling a recess etch process |
Jul. 15, 2008 |
| 7393700 |
Low temperature methods of etching semiconductor substrates |
Jul. 1, 2008 |
| 7387455 |
Substrate processing device, substrate processing method, and developing device |
Jun. 17, 2008 |
| 7368397 |
Method for monitoring edge bead removal process of copper metal interconnection |
May. 6, 2008 |
| 7353379 |
Methods for configuring a plasma cluster tool |
Apr. 1, 2008 |
| 7319530 |
System and method for measuring germanium concentration for manufacturing control of BiCMOS films |
Jan. 15, 2008 |
| 7314766 |
Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus |
Jan. 1, 2008 |
| 7312161 |
Advanced process control for low variation treatment in immersion processing |
Dec. 25, 2007 |
| 7285781 |
Characterizing resist line shrinkage due to CD-SEM inspection |
Oct. 23, 2007 |
| 7282448 |
Substrate and method of forming substrate for fluid ejection device |
Oct. 16, 2007 |
| 7258838 |
Solid state molecular probe device |
Aug. 21, 2007 |
| 7257502 |
Determining metrology sampling decisions based on fabrication simulation |
Aug. 14, 2007 |
| 7247507 |
Method for forming LOCOS layer in semiconductor device |
Jul. 24, 2007 |
| 7229843 |
Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing device |
Jun. 12, 2007 |
| 7214550 |
Method to produce thin film resistor using dry etch |
May. 8, 2007 |
| 7189332 |
Apparatus and method for detecting an endpoint in a vapor phase etch |
Mar. 13, 2007 |
| 7183213 |
Chemical mechanical polishing pad and chemical mechanical polishing method |
Feb. 27, 2007 |
| 7176041 |
PAA-based etchant, methods of using same, and resultant structures |
Feb. 13, 2007 |
| 7165560 |
Etching method, etching apparatus, and method for manufacturing semiconductor device |
Jan. 23, 2007 |
| 7153710 |
Etching method, method of manufacturing semiconductor device, and semiconductor device |
Dec. 26, 2006 |
| 7148073 |
Methods and systems for preparing a copper containing substrate for analysis |
Dec. 12, 2006 |
| 7125729 |
Method for opening the plastic housing of an electronic module |
Oct. 24, 2006 |
| 7087440 |
Monitoring of nitrided oxide gate dielectrics by determination of a wet etch |
Aug. 8, 2006 |
| 7087498 |
Method for controlling trench depth in shallow trench isolation features |
Aug. 8, 2006 |
| 7077971 |
Methods for detecting the endpoint of a photoresist stripping process |
Jul. 18, 2006 |
| 7067333 |
Method and apparatus for implementing competing control models |
Jun. 27, 2006 |
| 7041226 |
Methods for improving flow through fluidic channels |
May. 9, 2006 |
| 7033904 |
Semiconductor device, semiconductor substrate and fabrication process of a semiconductor device |
Apr. 25, 2006 |
| 7029593 |
Method for controlling CD during an etch process |
Apr. 18, 2006 |
| 7030018 |
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool |
Apr. 18, 2006 |
| 7026173 |
Method and apparatus for detecting end point |
Apr. 11, 2006 |
| 7011979 |
Detecting pinholes in vertical cavity surface-emitting laser passivation |
Mar. 14, 2006 |
| 7001784 |
Method to control spacer width |
Feb. 21, 2006 |
| 6979577 |
Method and apparatus for manufacturing semiconductor device |
Dec. 27, 2005 |
| 6958247 |
Method of electroplating copper over a patterned dielectric layer to enhance process uniformity of a subsequent CMP process |
Oct. 25, 2005 |
| 6955987 |
Comparison of chemical-mechanical polishing processes |
Oct. 18, 2005 |
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