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Class Information
Number: 438/8
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition > Optical characteristic sensed > Chemical etching
Description: Process having a step of chemically etching the semiconductor substrate in conjunction with the sensing of an optical property of the process or of the semiconductor device.

Sub-classes under this class:

Class Number Class Name Patents
438/9 Plasma etching 404

Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8685825 Replacement source/drain finFET fabrication Apr. 1, 2014
8652971 Cavity process etch undercut monitor Feb. 18, 2014
8647892 Inline process control structures Feb. 11, 2014
8581411 Semiconductor device Nov. 12, 2013
8580585 Method and system for controlled isotropic etching on a plurality of etch systems Nov. 12, 2013
8563335 Method of controlling polishing using in-situ optical monitoring and fourier transform Oct. 22, 2013
8562848 End point detecting method of metal etching and device thereof Oct. 22, 2013
8557612 Method for fabricating micro and nanostructures in a material Oct. 15, 2013
8557613 Methods for designing, fabricating, and predicting shape formations in a material Oct. 15, 2013
8546152 Enhanced endpoint detection in non-volatile memory fabrication processes Oct. 1, 2013
8538572 Methods for constructing an optimal endpoint algorithm Sep. 17, 2013
8518285 Substrate section for flexible display device, method of manufacturing the substrate section, and method of manufacturing organic light emitting display device including the substrate Aug. 27, 2013
8518721 Dopant marker for precise recess control Aug. 27, 2013
8369978 Adjusting polishing rates by using spectrographic monitoring of a substrate during processing Feb. 5, 2013
8334190 Single step CMP for polishing three or more layer film stacks Dec. 18, 2012
8309371 System and method for creating a flat wavefront using a photonic crystal Nov. 13, 2012
8304262 Wiggling control for pseudo-hardmask Nov. 6, 2012
8292693 Using optical metrology for wafer to wafer feed back process control Oct. 23, 2012
8282744 Substrate processing apparatus, substrate processing method, substrate processing program, and computer readable recording medium having substrate processing program therein Oct. 9, 2012
8274107 Exposure system, semiconductor device, and method for fabricating the semiconductor device Sep. 25, 2012
8241923 Method for correcting mask pattern and method for manufacturing acceleration sensor and angular velocity sensor by using the method for correcting the mask pattern Aug. 14, 2012
8241940 Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing Aug. 14, 2012
8220142 Method of forming a housing component Jul. 17, 2012
8202739 Dopant marker for precise recess control Jun. 19, 2012
8187897 Fabricating product chips and die with a feature pattern that contains information relating to the product chip May. 29, 2012
8175736 Method and system for performing a chemical oxide removal process May. 8, 2012
8163571 Multi-step deposition control Apr. 24, 2012
8158017 Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations Apr. 17, 2012
8161424 Method and apparatus for modeling chemically amplified resists Apr. 17, 2012
8144328 Methods and apparatus for normalizing optical emission spectra Mar. 27, 2012
8138089 Method and apparatus for measurement and control of photomask to substrate alignment Mar. 20, 2012
8133746 Method for semiconductor gate hardmask removal and decoupling of implants Mar. 13, 2012
8117744 Process for forming an isolated electrically conductive contact through a metal package Feb. 21, 2012
8114685 Method of manufacturing material to be etched Feb. 14, 2012
8114774 Semiconductor device, and semiconductor device obtained by such a method Feb. 14, 2012
8105851 Nitride film wet stripping Jan. 31, 2012
8088298 Spectra based endpointing for chemical mechanical polishing Jan. 3, 2012
8088293 Methods of forming reticles configured for imprint lithography Jan. 3, 2012
8071397 Semiconductor fabricating apparatus with function of determining etching processing state Dec. 6, 2011
8039092 Pattern formed body and method for manufacturing same Oct. 18, 2011
8021563 Etch depth determination for SGT technology Sep. 20, 2011
8019458 Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures Sep. 13, 2011
7993936 System and method for controlling an electrochemical etch process Aug. 9, 2011
7989968 Method and apparatus for measurement and control of photomask to substrate alignment Aug. 2, 2011
7981700 Semiconductor oxidation apparatus and method of producing semiconductor element Jul. 19, 2011
7972969 Method and apparatus for thinning a substrate Jul. 5, 2011
7972873 Material removing processes in device formation and the devices formed thereby Jul. 5, 2011
7947607 Apparatus and associated method for making a virtual ground array structure that uses inversion bit lines May. 24, 2011
7935636 Method of fabricating semiconductor device May. 3, 2011
7935549 Seminconductor device May. 3, 2011

1 2 3 4 5 6 7

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