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Class Information
Number: 438/799
Name: Semiconductor device manufacturing: process > Radiation or energy treatment modifying properties of semiconductor region of substrate (e.g., thermal, corpuscular, electromagnetic, etc.) > By differential heating
Description: Process involving the nonuniform heating of a semiconductive substrate to modify the properties of semiconductor regions thereof.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615502 |
Laser anneal of vertically oriented semiconductor structures while maintaining a dopant profile |
Nov. 10, 2009 |
| 7611970 |
Wafer processing method |
Nov. 3, 2009 |
| 7598160 |
Method for manufacturing thin film semiconductor |
Oct. 6, 2009 |
| 7592274 |
Method for fabricating semiconductor element |
Sep. 22, 2009 |
| 7589027 |
Method of manufacturing semiconductor device |
Sep. 15, 2009 |
| 7585790 |
Method for forming semiconductor device |
Sep. 8, 2009 |
| 7585791 |
Laser irradiation method, laser irradiation apparatus and method for manufacturing semiconductor device |
Sep. 8, 2009 |
| 7585793 |
Method for applying a high temperature heat treatment to a semiconductor wafer |
Sep. 8, 2009 |
| 7579285 |
Atomic layer deposition method for depositing a layer |
Aug. 25, 2009 |
| 7569503 |
Contact doping and annealing systems and processes for nanowire thin films |
Aug. 4, 2009 |
| 7557050 |
Method of manufacturing polysilicon thin film and method of manufacturing thin film transistor having the same |
Jul. 7, 2009 |
| 7521378 |
Low temperature process for polysilazane oxidation/densification |
Apr. 21, 2009 |
| 7521383 |
Manufacturing method of semiconductor device |
Apr. 21, 2009 |
| 7510959 |
Method of manufacturing a semiconductor device having damascene structures with air gaps |
Mar. 31, 2009 |
| 7510986 |
Production method for semiconductor device |
Mar. 31, 2009 |
| 7507648 |
Methods of fabricating crystalline silicon film and thin film transistors |
Mar. 24, 2009 |
| 7485551 |
Semiconductor-on-insulator type heterostructure and method of fabrication |
Feb. 3, 2009 |
| 7485575 |
Method of manufacturing semiconductor device |
Feb. 3, 2009 |
| 7479465 |
Transfer of stress to a layer |
Jan. 20, 2009 |
| 7479466 |
Method of heating semiconductor wafer to improve wafer flatness |
Jan. 20, 2009 |
| 7476597 |
Methods and systems for laser assisted wirebonding |
Jan. 13, 2009 |
| 7473656 |
Method for fast and local anneal of anti-ferromagnetic (AF) exchange-biased magnetic stacks |
Jan. 6, 2009 |
| 7466907 |
Annealing process and device of semiconductor wafer |
Dec. 16, 2008 |
| 7465977 |
Method for producing a packaged integrated circuit |
Dec. 16, 2008 |
| 7465645 |
Method of detaching a layer from a wafer using a localized starting area |
Dec. 16, 2008 |
| 7439196 |
Method for manufacturing pattern formed structure |
Oct. 21, 2008 |
| 7439198 |
Method for fabricating a buried metallic layer in a semiconductor body and semiconductor component having a buried metallic layer |
Oct. 21, 2008 |
| 7410355 |
Method for the heat treatment of substrates |
Aug. 12, 2008 |
| 7402533 |
Masking without photolithography during the formation of a semiconductor device |
Jul. 22, 2008 |
| 7402517 |
Method and apparatus for selective deposition of materials to surfaces and substrates |
Jul. 22, 2008 |
| 7402445 |
Method of forming micro-structures and nano-structures |
Jul. 22, 2008 |
| 7381632 |
Semiconductor thin film crystallization device and semiconductor thin film crystallization method |
Jun. 3, 2008 |
| 7357963 |
Apparatus and method of crystallizing amorphous silicon |
Apr. 15, 2008 |
| 7358200 |
Gas-assisted rapid thermal processing |
Apr. 15, 2008 |
| 7332448 |
Manufacturing method of semiconductor device and semiconductor manufacturing device |
Feb. 19, 2008 |
| 7326658 |
Method for preparing nitrogen-doped annealed wafer and nitrogen-doped and annealed wafer |
Feb. 5, 2008 |
| 7309617 |
MRAM memory cell with a reference layer and method for fabricating |
Dec. 18, 2007 |
| 7300856 |
Process for detaching layers of material |
Nov. 27, 2007 |
| 7294586 |
Method of processing a substrate, heating apparatus, and method of forming a pattern |
Nov. 13, 2007 |
| 7282456 |
Self-repair and enhancement of nanostructures by liquification under guiding conditions |
Oct. 16, 2007 |
| 7276175 |
Semiconductor device fabrication method |
Oct. 2, 2007 |
| 7235427 |
Method for treating substrates for microelectronics and substrates obtained by said method |
Jun. 26, 2007 |
| 7232774 |
Polycrystalline silicon layer with nano-grain structure and method of manufacture |
Jun. 19, 2007 |
| 7208696 |
Method of forming a polycrystalline silicon layer |
Apr. 24, 2007 |
| 7202145 |
Strained Si formed by anneal |
Apr. 10, 2007 |
| 7138344 |
Method for minimizing slip line faults on a semiconductor wafer surface |
Nov. 21, 2006 |
| 7122482 |
Methods for fabricating patterned features utilizing imprint lithography |
Oct. 17, 2006 |
| 7122409 |
Semiconductor device and a method of manufacturing the same |
Oct. 17, 2006 |
| 7115503 |
Method and apparatus for processing thin metal layers |
Oct. 3, 2006 |
| 7101814 |
Masking without photolithography during the formation of a semiconductor device |
Sep. 5, 2006 |
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