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Class Information
Number: 438/799
Name: Semiconductor device manufacturing: process > Radiation or energy treatment modifying properties of semiconductor region of substrate (e.g., thermal, corpuscular, electromagnetic, etc.) > By differential heating
Description: Process involving the nonuniform heating of a semiconductive substrate to modify the properties of semiconductor regions thereof.










Patents under this class:
1 2 3 4 5 6 7

Patent Number Title Of Patent Date Issued
8703626 Method, tool, and apparatus for manufacturing a semiconductor device Apr. 22, 2014
8691605 Crystallization processing for semiconductor applications Apr. 8, 2014
8664116 Heat treatment method for growing silicide Mar. 4, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8652974 Method and system for pre-heating of semiconductor material for laser annealing and gas immersion laser doping Feb. 18, 2014
8647959 Metal-insulator-metal capacitor alloying process Feb. 11, 2014
8629069 Semiconductor device and manufacturing method thereof Jan. 14, 2014
8603904 Semiconductor device and manufacturing method therefor Dec. 10, 2013
8586488 Configuring radiation sources to simultaneously irradiate a substrate Nov. 19, 2013
8575043 Semiconductor device and manufacturing method thereof Nov. 5, 2013
8569167 Methods for forming a semiconductor structure Oct. 29, 2013
8557721 Rapid thermal processing using energy transfer layers Oct. 15, 2013
8551893 Semiconductor device and manufacturing method thereof Oct. 8, 2013
8546271 Method of improving oxide growth rate of selective oxidation processes Oct. 1, 2013
8536072 Semiconductor process Sep. 17, 2013
8507368 Single-shot semiconductor processing system and method having various irradiation patterns Aug. 13, 2013
8507366 Rapid thermal processing system and sulfidation method thereof Aug. 13, 2013
8507302 Wall structures for a semiconductor wafer Aug. 13, 2013
8501638 Laser annealing scanning methods with reduced annealing non-uniformities Aug. 6, 2013
8490029 Method of fabricating a device using low temperature anneal processes, a device and design structure Jul. 16, 2013
8486813 Silicon wafer and fabrication method thereof Jul. 16, 2013
8476171 Heat treatment method of ZnTe single crystal substrate and ZnTe single crystal substrate Jul. 2, 2013
8466042 Method for manufacturing separated micromechanical components situated on a silicon substrate and components manufactured therefrom Jun. 18, 2013
8460465 Support ring for supporting a semiconductor wafer composed of monocrystalline silicon during a thermal treatment, method for the thermal treatment of such a semiconductor wafer, and thermally Jun. 11, 2013
8450219 Method of fabricating Al2O3 thin film layer May. 28, 2013
8440581 Systems and methods for non-periodic pulse sequential lateral solidification May. 14, 2013
8431495 Stencil mask profile Apr. 30, 2013
8389423 Semiconductor device manufacturing method Mar. 5, 2013
8372683 RTP heating system and method Feb. 12, 2013
8357620 Laser annealing method and laser annealing apparatus Jan. 22, 2013
8354351 Serial irradiation of a substrate by multiple radiation sources Jan. 15, 2013
8334194 Methods and apparatus for manufacturing semiconductor wafers Dec. 18, 2012
8324011 Implementation of temperature-dependent phase switch layer for improved temperature uniformity during annealing Dec. 4, 2012
8318529 Laser anneal for image sensors Nov. 27, 2012
8313965 Crystallization processing for semiconductor applications Nov. 20, 2012
8314369 Managing thermal budget in annealing of substrates Nov. 20, 2012
8309474 Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication Nov. 13, 2012
8288199 Semiconductor device and manufacturing method thereof Oct. 16, 2012
8278163 Semiconductor processing apparatus and semiconductor processing method Oct. 2, 2012
8268642 Method for removing electricity and method for manufacturing semiconductor device Sep. 18, 2012
8236709 Method of fabricating a device using low temperature anneal processes, a device and design structure Aug. 7, 2012
8153538 Process for annealing semiconductor wafers with flat dopant depth profiles Apr. 10, 2012
8138105 Rapid thermal processing using energy transfer layers Mar. 20, 2012
8119492 Dissolving precipates in alloy material in capacitor structure Feb. 21, 2012
8101529 Carbon nanotube resistor, semiconductor device, and manufacturing method thereof Jan. 24, 2012
8080485 Localized temperature control during rapid thermal anneal Dec. 20, 2011
8076252 Substrate processing method and substrate processing apparatus Dec. 13, 2011
8030132 Manufacturing method of semiconductor device including peeling step Oct. 4, 2011
8021912 Method of fabricating an image sensor having an annealing layer Sep. 20, 2011
8022444 Biosensor and method of manufacturing the same Sep. 20, 2011

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