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Class Information
Number: 438/798
Name: Semiconductor device manufacturing: process > Radiation or energy treatment modifying properties of semiconductor region of substrate (e.g., thermal, corpuscular, electromagnetic, etc.) > Ionized irradiation (e.g., corpuscular or plasma treatment, etc.)
Description: Process wherein ionized radiation is applied to the semiconductor to modify the properties thereof.

Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
8674359 TFT, array substrate for display apparatus including TFT, and methods of manufacturing TFT and array substrate Mar. 18, 2014
8673705 Method of producing thin film transistor and thin film transistor Mar. 18, 2014
8652952 Semiconductor structure made using improved multiple ion implantation process Feb. 18, 2014
8642135 Systems and methods for plasma doping microfeature workpieces Feb. 4, 2014
8623471 Plasma treatment system Jan. 7, 2014
8551805 Methods of manufacturing phase-change memory devices Oct. 8, 2013
8551892 Method for reducing dielectric constant of film using direct plasma of hydrogen Oct. 8, 2013
8546209 Replacement metal gate processing with reduced interlevel dielectric layer etch rate Oct. 1, 2013
8536071 Gasket with positioning feature for clamped monolithic showerhead electrode Sep. 17, 2013
8524591 Maintaining integrity of a high-K gate stack by passivation using an oxygen plasma Sep. 3, 2013
8492292 Methods of forming oxide layers on substrates Jul. 23, 2013
8476629 Enhanced wafer test line structure Jul. 2, 2013
8443756 Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses May. 21, 2013
8431496 Semiconductor device and manufacturing method thereof Apr. 30, 2013
8415252 Selective copper encapsulation layer deposition Apr. 9, 2013
8389068 Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation Mar. 5, 2013
8389395 Method for manufacturing semiconductor optical device Mar. 5, 2013
8372758 Combinatorial plasma enhanced deposition techniques Feb. 12, 2013
8338211 Systems and methods for charging solar cell layers Dec. 25, 2012
8338317 Method for processing a semiconductor wafer or die, and particle deposition device Dec. 25, 2012
8318611 Combinatorial plasma enhanced deposition techniques Nov. 27, 2012
8314012 Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device Nov. 20, 2012
8304033 Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles Nov. 6, 2012
8293620 Method of making multiple implantations in a substrate Oct. 23, 2012
8293626 Method for manufacturing semiconductor device Oct. 23, 2012
8278124 Assembly of ordered carbon shells on semiconducting nanomaterials Oct. 2, 2012
8278739 Crystalline semiconductor film, semiconductor device, and method for manufacturing thereof Oct. 2, 2012
8268664 Methods of manufacturing a semiconductor device; method of manufacturing a memory cell; semiconductor device; semiconductor processing device; integrated circuit having a memory cell Sep. 18, 2012
8253132 Bottom emission type organic electroluminescent panel Aug. 28, 2012
8252609 Curvature reduction for semiconductor wafers Aug. 28, 2012
8242498 Compound semiconductor substrate, semiconductor device, and processes for producing them Aug. 14, 2012
8231800 Plasma processing apparatus and method Jul. 31, 2012
8227359 Method for manufacturing group III nitride semiconductor layer, method for manufacturing group III nitride semiconductor light-emitting device, and group III nitride semiconductor light-emitti Jul. 24, 2012
8222124 Method for manufacturing SIMOX wafer and SIMOX wafer Jul. 17, 2012
8207013 Method of fabricating silicon nanowire solar cell device having upgraded metallurgical grade silicon substrate Jun. 26, 2012
8202811 Manufacturing apparatus for selectively removing one or more material layers by laser ablation Jun. 19, 2012
8198179 Method for producing group III nitride semiconductor light-emitting device Jun. 12, 2012
8183070 Array substrate for liquid crystal display device and method of fabricating the same May. 22, 2012
8169046 Light emitting diode with a temperature detecting pattern and manufacturing method thereof May. 1, 2012
8163572 Method for evaluating impurity distribution under gate electrode without damaging silicon substrate Apr. 24, 2012
8163654 Method for fabricating fine pattern in semiconductor device Apr. 24, 2012
8153535 Combinatorial plasma enhanced deposition techniques Apr. 10, 2012
8148273 Combinatorial plasma enhanced deposition techniques Apr. 3, 2012
8138573 On-chip heater and methods for fabrication thereof and use thereof Mar. 20, 2012
8110478 Method for manufacturing semiconductor substrate, display panel, and display device Feb. 7, 2012
8105925 Method for forming an insulated gate field effect device Jan. 31, 2012
8097959 Semiconductor device including first and second carriers Jan. 17, 2012
8093157 Advanced processing technique and system for preserving tungsten in a device structure Jan. 10, 2012
8093142 Plasma processing apparatus and plasma processing method Jan. 10, 2012
8080484 Method for manufacturing group III nitride semiconductor layer, method for manufacturing group III nitride semiconductor light-emitting device, and group III nitride semiconductor light-emitti Dec. 20, 2011

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