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Class Information
Number: 438/795
Name: Semiconductor device manufacturing: process > Radiation or energy treatment modifying properties of semiconductor region of substrate (e.g., thermal, corpuscular, electromagnetic, etc.)
Description: Process of radiating a semiconductor substrate with a form of energy to change some characteristic thereof.

Sub-classes under this class:

Class Number Class Name Patents
438/799 By differential heating 314
438/796 Compound semiconductor 261
438/798 Ionized irradiation (e.g., corpuscular or plasma treatment, etc.) 484

Patents under this class:

Patent Number Title Of Patent Date Issued
8709916 Laser processing method and apparatus Apr. 29, 2014
8709904 Method for producing semiconductor substrate, semiconductor substrate, method for manufacturing electronic device, and reaction apparatus Apr. 29, 2014
8703582 Laser processing method Apr. 22, 2014
8703549 Semiconductor device and manufacturing method thereof Apr. 22, 2014
8703410 Substrate having a mark formed on a surface thereof by a CO.sub.2 laser beam Apr. 22, 2014
8691621 Thiol bond formation concurrent with silver nanoparticle ink thermal treatment Apr. 8, 2014
8686320 Heat treatment apparatus emitting flash of light Apr. 1, 2014
8685826 Method for manufacturing nano-crystalline silicon material from chloride chemistries for the semiconductor integrated circuits Apr. 1, 2014
8685269 Laser processing method Apr. 1, 2014
8674359 TFT, array substrate for display apparatus including TFT, and methods of manufacturing TFT and array substrate Mar. 18, 2014
8673745 Method of cutting object to be processed Mar. 18, 2014
8669496 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Mar. 11, 2014
8669166 Methods of thinning and/or dicing semiconducting substrates having integrated circuit products formed thereon Mar. 11, 2014
8664116 Heat treatment method for growing silicide Mar. 4, 2014
8658937 Method and apparatus for processing substrate edges Feb. 25, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8654537 Printed circuit board with integral radio-frequency shields Feb. 18, 2014
8652974 Method and system for pre-heating of semiconductor material for laser annealing and gas immersion laser doping Feb. 18, 2014
8642488 Multi-step system and method for curing a dielectric film Feb. 4, 2014
8629068 Multi-station sequential curing of dielectric films Jan. 14, 2014
8628990 Image device and methods of forming the same Jan. 14, 2014
8624210 Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Jan. 7, 2014
8624153 Laser processing method and device Jan. 7, 2014
8617967 Vertically oriented nanostructure and fabricating method thereof Dec. 31, 2013
8610294 Laser processing method and semiconductor device obtained by using the processing method Dec. 17, 2013
8608853 Thermal reactor with improved gas flow distribution Dec. 17, 2013
8603857 Thin film transistor fabricating method Dec. 10, 2013
8603850 Method for manufacturing solar cell using silicon powder Dec. 10, 2013
8598051 Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate Dec. 3, 2013
8598050 Laser annealing method and apparatus Dec. 3, 2013
8592727 Heat treatment apparatus emitting flash of light Nov. 26, 2013
8592243 Method for forming buffer layer in dye-sensitized solar cell Nov. 26, 2013
8590173 System for filter drying using microwave energy Nov. 26, 2013
8586488 Configuring radiation sources to simultaneously irradiate a substrate Nov. 19, 2013
8586402 Method for the precision processing of substrates Nov. 19, 2013
8580700 Method for manufacturing semiconductor device Nov. 12, 2013
8575043 Semiconductor device and manufacturing method thereof Nov. 5, 2013
8574929 Method to form a 3D semiconductor device and structure Nov. 5, 2013
8569187 Thermal processing apparatus Oct. 29, 2013
8569167 Methods for forming a semiconductor structure Oct. 29, 2013
8569155 Flash lamp annealing crystallization for large area thin films Oct. 29, 2013
8557720 Substrate processing apparatus and method of manufacturing a semiconductor device Oct. 15, 2013
8557715 Marking CO.sub.2 laser-transparent materials by using absorption-material-assisted laser processing Oct. 15, 2013
8557669 MOSFET device with localized stressor Oct. 15, 2013
8551865 Method of cutting an object to be processed Oct. 8, 2013
8551441 Control of crystallographic texture and grain size in bulk thermoelectric materials through constrained deformation Oct. 8, 2013
8546920 Semiconductor-on-insulator (SOI) structures including gradient nitrided buried oxide (BOX) Oct. 1, 2013
8546277 Heating plastics via infrared radiation Oct. 1, 2013
8546248 Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same Oct. 1, 2013
8541319 Laser processing method Sep. 24, 2013

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