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Class Information
Number: 438/795
Name: Semiconductor device manufacturing: process > Radiation or energy treatment modifying properties of semiconductor region of substrate (e.g., thermal, corpuscular, electromagnetic, etc.)
Description: Process of radiating a semiconductor substrate with a form of energy to change some characteristic thereof.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622378 |
Multi-step system and method for curing a dielectric film |
Nov. 24, 2009 |
| 7622399 |
Method of forming low-k dielectrics using a rapid curing process |
Nov. 24, 2009 |
| 7622403 |
Semiconductor processing system with ultra low-K dielectric |
Nov. 24, 2009 |
| 7618882 |
Method for manufacturing semiconductor device and laser irradiation apparatus |
Nov. 17, 2009 |
| 7618904 |
Method of manufacturing a semiconductor device |
Nov. 17, 2009 |
| 7615721 |
Laser processing method and laser processing apparatus |
Nov. 10, 2009 |
| 7615424 |
Laser irradiation apparatus and method for manufacturing semiconductor device using the laser irradiation apparatus |
Nov. 10, 2009 |
| 7615502 |
Laser anneal of vertically oriented semiconductor structures while maintaining a dopant profile |
Nov. 10, 2009 |
| 7611977 |
Process of phosphorus diffusion for manufacturing solar cell |
Nov. 3, 2009 |
| 7608527 |
Laser irradiation method and method for manufacturing crystalline semiconductor film |
Oct. 27, 2009 |
| 7608853 |
Semiconductor light emitting diode that uses silicon nano dot and method of manufacturing the same |
Oct. 27, 2009 |
| 7605050 |
Method of bonding a polymer surface to a conducting or semiconducting surface and application of the same |
Oct. 20, 2009 |
| 7605063 |
Photoresist stripping chamber and methods of etching photoresist on substrates |
Oct. 20, 2009 |
| 7605350 |
System for two-step resist soft bake to prevent ILD outgassing during semiconductor processing |
Oct. 20, 2009 |
| 7601616 |
Wafer laser processing method |
Oct. 13, 2009 |
| 7598160 |
Method for manufacturing thin film semiconductor |
Oct. 6, 2009 |
| 7592274 |
Method for fabricating semiconductor element |
Sep. 22, 2009 |
| 7588803 |
Multi step ebeam process for modifying dielectric materials |
Sep. 15, 2009 |
| 7589032 |
Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment |
Sep. 15, 2009 |
| 7585686 |
Method and apparatus for processing a wafer |
Sep. 8, 2009 |
| 7585714 |
Method for manufacturing semiconductor device, semiconductor device, and laser irradiation apparatus |
Sep. 8, 2009 |
| 7585791 |
Laser irradiation method, laser irradiation apparatus and method for manufacturing semiconductor device |
Sep. 8, 2009 |
| 7585792 |
Relaxation of a strained layer using a molten layer |
Sep. 8, 2009 |
| 7579287 |
Surface treatment method, manufacturing method of semiconductor device, and manufacturing method of capacitive element |
Aug. 25, 2009 |
| 7576341 |
Lithography systems and methods for operating the same |
Aug. 18, 2009 |
| 7569503 |
Contact doping and annealing systems and processes for nanowire thin films |
Aug. 4, 2009 |
| 7569497 |
Method and apparatus for forming insulating layer |
Aug. 4, 2009 |
| 7566625 |
Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method |
Jul. 28, 2009 |
| 7566669 |
Laser irradiation apparatus and laser irradiation method |
Jul. 28, 2009 |
| 7563732 |
Method and apparatus for forming polycrystalline layer using laser crystallization |
Jul. 21, 2009 |
| 7560367 |
Method for thermal processing with a RTP process using temperature spaces in radiation equilibrium |
Jul. 14, 2009 |
| 7560397 |
Laser irradiation method and method of manufacturing a semiconductor device |
Jul. 14, 2009 |
| 7556712 |
Laser cleaning of backside of wafer for photolithographic processing |
Jul. 7, 2009 |
| 7553777 |
Silicon wafer laser processing method and laser beam processing machine |
Jun. 30, 2009 |
| 7553778 |
Method for producing a semiconductor device including crystallizing an amphorous semiconductor film |
Jun. 30, 2009 |
| 7550398 |
Semiconductor device and method of fabricating the same |
Jun. 23, 2009 |
| 7547647 |
Method of making a structure |
Jun. 16, 2009 |
| 7541299 |
Method and apparatus for thermally processing microelectronic workpieces |
Jun. 2, 2009 |
| 7538048 |
Laser beam processing machine |
May. 26, 2009 |
| 7534628 |
Method for forming semiconductor device and method for forming photovoltaic device |
May. 19, 2009 |
| 7532378 |
Laser irradiation apparatus, method of laser irradiation, and method for manufacturing semiconductor device |
May. 12, 2009 |
| 7531469 |
Dosimetry using optical emission spectroscopy/residual gas analyzer in conjunction with ion current |
May. 12, 2009 |
| 7531390 |
Crystallizing method, thin-film transistor manufacturing method, thin-film transistor, and display device |
May. 12, 2009 |
| 7528057 |
Laser annealing method and laser annealing device |
May. 5, 2009 |
| 7528079 |
Method of changing an energy attenuation factor of a linear light in order to crystallize a semiconductor film |
May. 5, 2009 |
| 7521697 |
Method for fabricating semiconductor device and equipment for fabricating the same |
Apr. 21, 2009 |
| 7521381 |
Method for producing silicon wafer and silicon wafer |
Apr. 21, 2009 |
| 7521382 |
High resistivity silicon structure and a process for the preparation thereof |
Apr. 21, 2009 |
| 7521712 |
Thin film semiconductor device |
Apr. 21, 2009 |
| 7517777 |
Method of manufacturing semiconductor device and semiconductor device formed by the method |
Apr. 14, 2009 |
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