Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Engineering
Class Information
Number: 438/791
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Insulative material deposited upon semiconductive substrate > Silicon nitride formation
Description: Processes wherein the deposited material is a compound of silicon and nitrogen.










Sub-classes under this class:

Class Number Class Name Patents
438/794 Organic reactant 81
438/792 Utilizing electromagnetic or wave energy (e.g., photo-induced deposition, plasma, etc.) 384


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12

Patent Number Title Of Patent Date Issued
8679989 Method of manufacturing semiconductor device including removal of deposits from process chamber and supply portion Mar. 25, 2014
8669185 Method of tailoring conformality of Si-containing film Mar. 11, 2014
8659020 Epitaxial silicon wafer and method for manufacturing same Feb. 25, 2014
8647993 Methods for UV-assisted conformal film deposition Feb. 11, 2014
8637362 Memory array with ultra-thin etched pillar surround gate access transistors and buried data/bit lines Jan. 28, 2014
8629067 Dielectric film growth with radicals produced using flexible nitrogen/hydrogen ratio Jan. 14, 2014
8609551 Method for manufacturing semiconductor device and substrate processing apparatus Dec. 17, 2013
8609556 Thin film deposition apparatus with an expanding thermal plasma source and method for depositing a thin film using the same Dec. 17, 2013
8610182 Semiconductor device and method for manufacturing the same Dec. 17, 2013
8586487 Low temperature plasma enhanced chemical vapor deposition of conformal silicon carbon nitride and silicon nitride films Nov. 19, 2013
8569186 Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device Oct. 29, 2013
8557716 Semiconductor device manufacturing method and substrate processing apparatus Oct. 15, 2013
8557719 Method for fabricating semiconductor device Oct. 15, 2013
8524591 Maintaining integrity of a high-K gate stack by passivation using an oxygen plasma Sep. 3, 2013
8524619 Method for fabricating semiconductor device including performing oxygen plasma treatment Sep. 3, 2013
8497191 Selective epitaxial growth method using halogen containing gate sidewall mask Jul. 30, 2013
8490029 Method of fabricating a device using low temperature anneal processes, a device and design structure Jul. 16, 2013
8470678 Tensile stress enhancement of nitride film for stressed channel field effect transistor fabrication Jun. 25, 2013
8450207 Method of fabricating a cell contact and a digit line for a semiconductor device May. 28, 2013
8450813 Fin transistor structure and method of fabricating the same May. 28, 2013
8445381 Oxide-nitride stack gate dielectric May. 21, 2013
8445973 Fin transistor structure and method of fabricating the same May. 21, 2013
8440580 Method of fabricating silicon nitride gap-filling layer May. 14, 2013
8426288 Method for improving capacitance uniformity in a MIM device Apr. 23, 2013
8426302 Method of manufacturing semiconductor device Apr. 23, 2013
8420477 Method for fabricating a gate dielectric layer and for fabricating a gate structure Apr. 16, 2013
8415258 Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus Apr. 9, 2013
8410003 Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus Apr. 2, 2013
8367563 Methods for a gate replacement process Feb. 5, 2013
8367562 Method for uniform nanoscale film deposition Feb. 5, 2013
8357574 Method of fabricating epitaxial structures Jan. 22, 2013
8350334 Stress film forming method and stress film structure Jan. 8, 2013
8343867 Method for main spacer trim-back Jan. 1, 2013
8329596 Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device Dec. 11, 2012
8324119 Enhancing deposition uniformity of a channel semiconductor alloy by an in situ etch process Dec. 4, 2012
8304352 Method of manufacturing a semiconductor device Nov. 6, 2012
8283237 Fabrication of through-silicon vias on silicon wafers Oct. 9, 2012
8283263 Integrated circuit system including nitride layer technology Oct. 9, 2012
8273669 Method of forming a passivated densified nanoparticle thin film on a substrate Sep. 25, 2012
8263489 Process for the deposition of an anti-reflection film on a substrate Sep. 11, 2012
8252653 Method of forming a non-volatile memory having a silicon nitride charge trap layer Aug. 28, 2012
8247331 Method for forming insulating film and method for manufacturing semiconductor device Aug. 21, 2012
8236709 Method of fabricating a device using low temperature anneal processes, a device and design structure Aug. 7, 2012
8227305 Memory array with ultra-thin etched pillar surround gate access transistors and buried data/bit lines Jul. 24, 2012
8227357 Methods of fabricating silicon oxide layers using inorganic silicon precursors and methods of fabricating semiconductor devices including the same Jul. 24, 2012
8216905 Stress engineering to reduce dark current of CMOS image sensors Jul. 10, 2012
8216950 Capacitive element fabrication method Jul. 10, 2012
8211783 Method for manufacturing semiconductor device including a patterned SiOC film as a mask Jul. 3, 2012
8202806 Method to avoid threshold voltage shift in thicker dielectric films Jun. 19, 2012
8178436 Adhesion and electromigration performance at an interface between a dielectric and metal May. 15, 2012

1 2 3 4 5 6 7 8 9 10 11 12










 
 
  Recently Added Patents
Printer
Methods for predicting cardiac toxicity
Processing color and panchromatic pixels
Method for producing lactamates by way of thin film evaporation
Food safety printer
DNA promoters and anthrax vaccines
Dental plier
  Randomly Featured Patents
Virtual impactor
Modules for membrane aeration
Montage for an electronic market
Picture coding apparatus, picture decoding apparatus and the methods
Fabricating compound semiconductor by varying ratio of stagnant layer thickness and mean free path of seed material
Broadband wireless system and network architecture providing broadband/narrowband service with optimal static and dynamic bandwidth/channel allocation
Fabricating method of liquid crystal display panel
Plant disease and insect damage control composition and plant disease and insect damage prevention method
Recording and reproducing apparatus for reproducing time-base compressed signals dependent on the time-base compression implemented
Wheelchair suspension