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Class Information
Number: 438/782
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Insulative material deposited upon semiconductive substrate > With substrate handling during coating (e.g., immersion, spinning, etc.)
Description: Processes wherein the semiconductor substrate is handled or manipulated in conjunction with the coating operation.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8691336 Coating treatment method, non-transitory computer storage medium and coating treatment apparatus Apr. 8, 2014
8691609 Gas sensor materials and methods for preparation thereof Apr. 8, 2014
8669131 Methods and materials for forming gas sensor structures Mar. 11, 2014
8656858 Device and method for chemically and electrolytically treating work pieces using a conveyor system to transport work pieces between treatment tanks Feb. 25, 2014
8652571 Spin coating method and spin coating apparatus Feb. 18, 2014
8629055 Manufacturing method of semiconductor device Jan. 14, 2014
8629066 Liner formation in 3DIC structures Jan. 14, 2014
8603923 Dipping solution for use in production of siliceous film and process for producing siliceous film using the dipping solution Dec. 10, 2013
8580340 Substrate processing apparatus and substrate processing method Nov. 12, 2013
8574674 Coating treatment method, computer-readable storage medium, and coating treatment apparatus Nov. 5, 2013
8563443 Method of depositing dielectric film by ALD using precursor containing silicon, hydrocarbon, and halogen Oct. 22, 2013
8551563 Coating method Oct. 8, 2013
8524614 III-V compound semiconductor material passivation with crystalline interlayer Sep. 3, 2013
8507390 Methods and devices for forming nanostructure monolayers and devices including such monolayers Aug. 13, 2013
8501274 Coating treatment method, computer storage medium, and coating treatment apparatus Aug. 6, 2013
8496991 Coating treatment method Jul. 30, 2013
8487313 Emissive device and electronic apparatus Jul. 16, 2013
8461025 Protective film forming method and apparatus Jun. 11, 2013
8455366 Use of an organic planarizing mask for cutting a plurality of gate lines Jun. 4, 2013
8414972 Coating treatment method, coating treatment apparatus, and computer-readable storage medium Apr. 9, 2013
8372480 Coater/developer, method of coating and developing resist film, and computer readable storing medium Feb. 12, 2013
8367556 Use of an organic planarizing mask for cutting a plurality of gate lines Feb. 5, 2013
8357619 Film formation method for forming silicon-containing insulating film Jan. 22, 2013
8354349 Semiconductor device having sealing film and manufacturing method thereof Jan. 15, 2013
8354141 Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium Jan. 15, 2013
8349629 Semiconductor light-emitting element and method of manufacturing same Jan. 8, 2013
8334222 Semiconductor wafer processing method and apparatus Dec. 18, 2012
8318247 Coating treatment method, coating treatment apparatus, and computer-readable storage medium Nov. 27, 2012
8304018 Coating method Nov. 6, 2012
8287954 Apparatus and method of forming an applied film Oct. 16, 2012
8282999 Spin-on film processing using acoustic radiation pressure Oct. 9, 2012
8278195 Plasma CVD apparatus Oct. 2, 2012
8252703 Methods for forming roughened surfaces and applications thereof Aug. 28, 2012
8242004 Semiconductor device and method of fabricating the same Aug. 14, 2012
8236705 Deposition of viscous material Aug. 7, 2012
8232216 Semiconductor manufacturing apparatus and method for manufacturing a semiconductor Jul. 31, 2012
8153523 Method of etching a layer of a semiconductor device using an etchant layer Apr. 10, 2012
8143128 Multilayer dielectric defect method Mar. 27, 2012
8123997 Low temperature melt-processing of organic-inorganic hybrid Feb. 28, 2012
8114786 Heat treatment method, heat treatment apparatus and substrate processing apparatus Feb. 14, 2012
8115208 Image display system and manufacturing method thereof Feb. 14, 2012
RE43045 Multi-chamber MOCVD growth apparatus for high performance/high throughput Dec. 27, 2011
8080483 Double gyroid structure nanoporous films and nanowire networks Dec. 20, 2011
8053376 One-step synthesis and patterning of aligned polymer nanowires on a substrate Nov. 8, 2011
8053338 Plasma CVD apparatus Nov. 8, 2011
8048725 Method of forming pattern and method of producing electronic element Nov. 1, 2011
8012886 Leadframe treatment for enhancing adhesion of encapsulant thereto Sep. 6, 2011
8003522 Method for forming trenches with wide upper portion and narrow lower portion Aug. 23, 2011
8003547 Method of manufacturing semiconductor device Aug. 23, 2011
7977254 Method of forming a gate insulator in group III-V nitride semiconductor devices Jul. 12, 2011

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