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Class Information
Number: 438/781
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > Insulative material deposited upon semiconductive substrate > Depositing organic material (e.g., polymer, etc.) > Subsequent heating modifying organic coating composition
Description: Processes including a subsequent thermal treatment step altering the chemical composition of the organic coating composition.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8703880 Curable composition, cured product, and method for using of curable composition Apr. 22, 2014
8691709 Method of forming metal carbide barrier layers for fluorocarbon films Apr. 8, 2014
8685865 Method of forming patterns of semiconductor device Apr. 1, 2014
8679987 Deposition of an amorphous carbon layer with high film density and high etch selectivity Mar. 25, 2014
8674052 Carbazole novolak resin Mar. 18, 2014
8673793 Method for automatic offset calculation for deposition of an aligned metal pattern onto selective emitter pattern and subsequent monitoring of alignment Mar. 18, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8652965 Production method for thick film metal electrode and production method for thick film resist Feb. 18, 2014
8642444 Method of manufacturing bonded substrate, bonded substrate, method of manufacturing solid-state imaging apparatus, solid-state imaging apparatus, and camera Feb. 4, 2014
8642409 Semiconductor device and method of manufacturing the same Feb. 4, 2014
8623745 Composition for forming gate insulating film for thin-film transistor Jan. 7, 2014
8623741 Homogeneous porous low dielectric constant materials Jan. 7, 2014
8618536 Organic light-emitting element, display panel, display device, and manufacturing method for organic light-emitting element Dec. 31, 2013
8603922 Semiconductor device, display, electronic apparatus and method of manufacturing a semiconductor device Dec. 10, 2013
8603923 Dipping solution for use in production of siliceous film and process for producing siliceous film using the dipping solution Dec. 10, 2013
8592261 Method for designing semiconductor device Nov. 26, 2013
8574953 Low temperature melt-processing of organic-inorganic hybrid Nov. 5, 2013
8575040 Low temperature process for polysilazane oxidation/densification Nov. 5, 2013
8563443 Method of depositing dielectric film by ALD using precursor containing silicon, hydrocarbon, and halogen Oct. 22, 2013
8530268 Organic light-emitting display device and method of manufacturing the same Sep. 10, 2013
8530003 Polybenzoxazole precursor, photosensitive resin composition using the same, and manufacturing method of semiconductor device Sep. 10, 2013
8530361 Process for producing silicon and oxide films from organoaminosilane precursors Sep. 10, 2013
8524615 Method of forming hardened porous dielectric layer and method of fabricating semiconductor device having hardened porous dielectric layer Sep. 3, 2013
8518738 Blended polymer FETs Aug. 27, 2013
8518837 Method of producing nanopatterned articles using surface-reconstructed block copolymer films Aug. 27, 2013
8513142 Method of manufacturing non-photosensitive polyimide passivation layer Aug. 20, 2013
8507665 Template derivative for forming ultra-low dielectric layer and method of forming ultra-low dielectric layer using the same Aug. 13, 2013
8502334 Image sensor and method for manufacturing the same Aug. 6, 2013
8492192 Composition for forming an organic semiconducting device Jul. 23, 2013
8492293 High density selective deposition of carbon nanotubes onto a substrate Jul. 23, 2013
8470720 Film forming apparatus and film forming method Jun. 25, 2013
8465991 Carbon containing low-k dielectric constant recovery using UV treatment Jun. 18, 2013
8455373 Ink-jet print ink and organic thin film transistor using thereof Jun. 4, 2013
8455366 Use of an organic planarizing mask for cutting a plurality of gate lines Jun. 4, 2013
8431464 Process for producing silicic coating, silicic coating and semiconductor device Apr. 30, 2013
8394727 High density selective deposition of carbon nanotubes onto a substrate Mar. 12, 2013
8394728 Film deposition method and manufacturing method of semiconductor device Mar. 12, 2013
8382997 Method for high aspect ratio patterning in a spin-on layer Feb. 26, 2013
8378489 Semiconductor device and manufacturing method therefor Feb. 19, 2013
8377818 Aftertreatment method for amorphous carbon film Feb. 19, 2013
8365385 Processing apparatus and method Feb. 5, 2013
8367556 Use of an organic planarizing mask for cutting a plurality of gate lines Feb. 5, 2013
8361909 Method for manufacturing memory element Jan. 29, 2013
8354339 Methods to form self-aligned permanent on-chip interconnect structures Jan. 15, 2013
8354350 Template derivative for forming ultra-low dielectric layer and method of forming ultra-low dielectric layer using the same Jan. 15, 2013
8349629 Semiconductor light-emitting element and method of manufacturing same Jan. 8, 2013
8350246 Structure of porous low-k layer and interconnect structure Jan. 8, 2013
8298965 Volatile precursors for deposition of C-linked SiCOH dielectrics Oct. 30, 2012
8293658 Reactive site deactivation against vapor deposition Oct. 23, 2012
8288252 Method for recovering damaged components in lower region of low dielectric insulating film Oct. 16, 2012

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