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Class Information
Number: 438/776
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > By reaction with substrate > Reaction with silicon semiconductive region (e.g., oxynitride formation, etc.) > Nitridation > Using electromagnetic or wave energy
Description: Processes wherein the nitridation is conducted using irradiation of electromagnetic or wave energy.

Sub-classes under this class:

Class Number Class Name Patents
438/777 Microwave gas energizing 81

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8685757 Method for fabricating magnetic tunnel junction Apr. 1, 2014
8647993 Methods for UV-assisted conformal film deposition Feb. 11, 2014
8609519 Combinatorial approach for screening of ALD film stacks Dec. 17, 2013
8568606 Substrate processing apparatus and substrate processing method using same Oct. 29, 2013
8546273 Methods and apparatus for forming nitrogen-containing layers Oct. 1, 2013
8547085 Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber Oct. 1, 2013
8507971 Apparatus and method for a memory array with shallow trench isolation regions between bit lines for increased process margins Aug. 13, 2013
8502286 Etch stop layers and methods of forming the same Aug. 6, 2013
8492291 Formation of gate dielectrics with uniform nitrogen distribution Jul. 23, 2013
8481433 Methods and apparatus for forming nitrogen-containing layers Jul. 9, 2013
8426868 Semiconductor device and method for manufacturing the same Apr. 23, 2013
8318586 Nitrogen-plasma surface treatment in a direct bonding method Nov. 27, 2012
8216889 Thin film transistor and method of fabricating the same Jul. 10, 2012
8183165 Plasma processing method May. 22, 2012
8173531 Structure and method to improve threshold voltage of MOSFETS including a high K dielectric May. 8, 2012
8153538 Process for annealing semiconductor wafers with flat dopant depth profiles Apr. 10, 2012
8101490 Method for manufacturing semiconductor device and apparatus for manufacturing same Jan. 24, 2012
8067293 Power semiconductor device and method of manufacturing the same Nov. 29, 2011
8038834 Method and system for controlling radical distribution Oct. 18, 2011
8021987 Method of modifying insulating film Sep. 20, 2011
7977255 Method and system for depositing a thin-film transistor Jul. 12, 2011
7960293 Method for forming insulating film and method for manufacturing semiconductor device Jun. 14, 2011
7932549 Carbon nanotube conductor for trench capacitors Apr. 26, 2011
7928018 Plasma processing method and method for manufacturing an electronic device Apr. 19, 2011
7910493 Semiconductor device manufacturing method, semiconductor device, plasma nitriding treatment method, control program and computer storage medium Mar. 22, 2011
7898584 Image sensors for reducing flicker and methods of manufacturing the same Mar. 1, 2011
7897518 Plasma processing method and computer storage medium Mar. 1, 2011
7811945 Selective plasma processing method Oct. 12, 2010
7795156 Producing method of semiconductor device Sep. 14, 2010
7781350 Method and system for controllable deposition of nanoparticles on a substrate Aug. 24, 2010
7767538 Method for manufacturing semiconductor device Aug. 3, 2010
7745809 Ultra high density phase change memory having improved emitter contacts, improved GST cell reliability and highly matched UHD GST cells using column mirco-trench strips Jun. 29, 2010
7727912 Method of light enhanced atomic layer deposition Jun. 1, 2010
7723241 Plasma processing method and computer storage medium May. 25, 2010
7723205 Semiconductor device, manufacturing method thereof, liquid crystal display device, RFID tag, light emitting device, and electronic device May. 25, 2010
7682973 Method of forming a carbon nanotube structure and method of manufacturing field emission device using the method of forming a carbon nanotube structure Mar. 23, 2010
7678672 Carbon nanotube fabrication from crystallography oriented catalyst Mar. 16, 2010
7655574 Method of modifying insulating film Feb. 2, 2010
7645647 Thin film transistor and method of fabricating the same Jan. 12, 2010
7611949 Method of fabricating metal-oxide-semiconductor transistor Nov. 3, 2009
7605008 Plasma ignition and complete faraday shielding of capacitive coupling for an inductively-coupled plasma Oct. 20, 2009
7589027 Method of manufacturing semiconductor device Sep. 15, 2009
7585773 Non-conformal stress liner for enhanced MOSFET performance Sep. 8, 2009
7485516 Method of ion implantation of nitrogen into semiconductor substrate prior to oxidation for offset spacer formation Feb. 3, 2009
7423312 Apparatus and method for a memory array with shallow trench isolation regions between bit lines for increased process margins Sep. 9, 2008
7413966 Method of fabricating polysilicon thin film transistor with catalyst Aug. 19, 2008
7410899 Defectivity and process control of electroless deposition in microelectronics applications Aug. 12, 2008
7345001 Gate dielectric having a flat nitrogen profile and method of manufacture therefor Mar. 18, 2008
7279429 Method to improve ignition in plasma etching or plasma deposition steps Oct. 9, 2007
7250375 Substrate processing method and material for electronic device Jul. 31, 2007

1 2 3

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