Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Engineering
Class Information
Number: 438/770
Name: Semiconductor device manufacturing: process > Coating of substrate containing semiconductor region or of semiconductor substrate > By reaction with substrate > Reaction with silicon semiconductive region (e.g., oxynitride formation, etc.) > Oxidation
Description: Processes wherein the external agent supplies oxygen which reacts with the silicon substrate region to form a compound therewith.










Sub-classes under this class:

Class Number Class Name Patents
438/774 In atmosphere containing halogen 132
438/773 In atmosphere containing water vapor (i.e., wet oxidation) 224
438/771 Using electromagnetic or wave energy 192


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

Patent Number Title Of Patent Date Issued
6716695 Semiconductor with a nitrided silicon gate oxide and method Apr. 6, 2004
6716705 EEPROM device having a retrograde program junction region and process for fabricating the device Apr. 6, 2004
6716768 Method of manufacturing thin-film transistor, and liquid-crystal display Apr. 6, 2004
6713364 Method for forming an insulator having a low dielectric constant on a semiconductor substrate Mar. 30, 2004
6713348 Method for forming an etch mask during the manufacture of a semiconductor device Mar. 30, 2004
6706572 Method for manufacturing a thin film transistor using a high pressure oxidation step Mar. 16, 2004
6706643 UV-enhanced oxy-nitridation of semiconductor substrates Mar. 16, 2004
6703322 Method of forming multiple oxide layers with different thicknesses in a linear nitrogen doping process Mar. 9, 2004
6699796 Single chip pad oxide layer growth process Mar. 2, 2004
6696326 Cleaning method to prevent watermarks Feb. 24, 2004
6693047 Method for recycling semiconductor wafers having carbon doped low-k dielectric layers Feb. 17, 2004
6689702 High dielectric constant metal oxide gate dielectrics Feb. 10, 2004
6689675 Method for making a semiconductor device having a high-k gate dielectric Feb. 10, 2004
6689646 Plasma method for fabricating oxide thin films Feb. 10, 2004
6682979 Methods of forming transistors associated with semiconductor substrates Jan. 27, 2004
6680261 Method of reducing boron outgassing at trench power IC's oxidation process for sacrificial oxide layer Jan. 20, 2004
6680225 Method for manufacturing a semiconductor memory Jan. 20, 2004
6677254 Processes for making a barrier between a dielectric and a conductor and products produced therefrom Jan. 13, 2004
6670242 Method for making an integrated circuit device including a graded, grown, high quality gate oxide layer and a nitride layer Dec. 30, 2003
6667197 Method for differential oxidation rate reduction for n-type and p-type materials Dec. 23, 2003
6667232 Thin dielectric layers and non-thermal formation thereof Dec. 23, 2003
6664201 Method of manufacturing anti-reflection layer Dec. 16, 2003
6653184 Method of forming transistors associated with semiconductor substrates comprising forming a nitrogen-comprising region across an oxide region of a transistor gate Nov. 25, 2003
6649536 Method for fabricating capacitor of semiconductor device Nov. 18, 2003
6649535 Method for ultra-thin gate oxide growth Nov. 18, 2003
6649542 Multi-level type nonvolatile semiconductor memory device Nov. 18, 2003
6649537 Intermittent pulsed oxidation process Nov. 18, 2003
6645827 Method for forming isolation regions on semiconductor device Nov. 11, 2003
6642117 Method for forming composite dielectric layer Nov. 4, 2003
6638876 Method of forming dielectric films Oct. 28, 2003
6638877 Ultra-thin SiO2using N2O as the oxidant Oct. 28, 2003
6638899 Photoresist stripping solution and a method of stripping photoresists with the same Oct. 28, 2003
6635584 Versatile system for forming uniform wafer surfaces Oct. 21, 2003
6620744 Insulating film formation method, semiconductor device, and production apparatus Sep. 16, 2003
6620714 Method for reducing oxidation encroachment of stacked gate layer Sep. 16, 2003
6617206 Method of forming a capacitor structure Sep. 9, 2003
6613697 Low metallic impurity SiO based thin film dielectrics on semiconductor substrates using a room temperature wet chemical growth process, method and applications thereof Sep. 2, 2003
6613677 Long range ordered semiconductor interface phase and oxides Sep. 2, 2003
6610614 Method for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates Aug. 26, 2003
6607946 Process for growing a dielectric layer on a silicon-containing surface using a mixture of N2O and O3 Aug. 19, 2003
6607990 Semiconductor device and its manufacturing method Aug. 19, 2003
6607965 Methods of forming capacitors Aug. 19, 2003
6602799 Method of forming a uniform ultra-thin gate oxide layer Aug. 5, 2003
6599807 Method for manufacturing capacitor of semiconductor device having improved leakage current characteristics Jul. 29, 2003
6599845 Oxidizing method and oxidation system Jul. 29, 2003
6596651 Method for stabilizing high pressure oxidation of a semiconductor device Jul. 22, 2003
6596650 Method for fabricating semiconductor integrated circuit device Jul. 22, 2003
6593253 Method of manufacturing semiconductor device Jul. 15, 2003
6593077 Method of making thin films dielectrics using a process for room temperature wet chemical growth of SiO based oxides on a substrate Jul. 15, 2003
6586301 Method of fabricating EEPROM having tunnel window area Jul. 1, 2003

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16










 
 
  Recently Added Patents
Semiconductor device
Inter-cell power control in the presence of fractional frequency reuse
Apparatus and method for exerting force on a subject tissue
Case for electronic device
Stopper, motor, and disk drive apparatus
Methods and systems for providing a business repository
Pizza stone
  Randomly Featured Patents
Device for actuating a locking member
Fender flares and vehicles with fender flares
Printing client management method and wireless LAN printer in wireless network
Fiber bed separator
CATV frequency sweep testing remote unit
Method and apparatus for cable dispensing and placement
Cylinder head gasket
Communication method and control apparatus, base station apparatuses and terminal apparatus using the communication method
Wheel centering system for vehicle service devices
Active cover accelerometer